Sekimoto; Eiichi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sekimoto; Eiichi.The latest application filed is for "substrate processing apparatus and substrate processing method".

Company Profile

4.8.11

Sekimoto; Eiichi - Koshi JP
SEKIMOTO; Eiichi - Koshi City JP
Sekimoto; Eiichi - Koshi-Shi JP
SEKIMOTO; Eiichi - Koshi City Kumamoto JP
Sekimoto; Eiichi - Kumamoto JP
Sekimoto; Eiichi - Kikuchi-gun JP
Sekimoto, Eiichi - Kumamoto-Ken JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Thermal treatment apparatus, thermal treatment method, and non-transitory computer storage medium Grant 11,087,983 - Sekimoto , et al. August 10, 2	2021-08-10
Substrate Processing Apparatus And Substrate Processing Method App 20200146111 - SEKIMOTO; Eiichi	2020-05-07
Substrate Processing Apparatus And Method Of Adjusting Substrate Processing Apparatus App 20200066559 - Shigetomi; Kenichi ; et al.	2020-02-27
Substrate Processing Apparatus And Substrate Processing Method App 20200035517 - HIDAKA; Shoichiro ; et al.	2020-01-30
Substrate processing apparatus and method of adjusting substrate processing apparatus Grant 10,504,757 - Shigetomi , et al. Dec	2019-12-10
Thermal Treatment Apparatus, Thermal Treatment Method, And Non-transitory Computer Storage Medium App 20180182611 - SEKIMOTO; Eiichi ; et al.	2018-06-28
Substrate Processing Apparatus And Method Of Adjusting Substrate Processing Apparatus App 20170170040 - SHIGETOMI; Kenichi ; et al.	2017-06-15
Temperature control for performing heat process in coating/developing system for resist film Grant 7,868,270 - Ookura , et al. January 11, 2	2011-01-11
Temperature control for performing heat process on resist film Grant 7,755,003 - Ookura , et al. July 13, 2	2010-07-13
Method and apparatus for heat processing of substrate Grant 7,517,217 - Deguchi , et al. April 14, 2	2009-04-14
Temperature Control For Performing Heat Process In Coating/developing System For Resist Film App 20080283515 - OOKURA; Jun ; et al.	2008-11-20
Temperature Control For Performing Heat Process On Resist Film App 20080156785 - Ookura; Jun ; et al.	2008-07-03
Method and apparatus for heat processing of substrate App 20060005420 - Deguchi; Masatoshi ; et al.	2006-01-12
Method for heat processing of substrate Grant 6,969,538 - Deguchi , et al. November 29, 2	2005-11-29
Substrate processing apparatus Grant 6,659,661 - Deguchi , et al. December 9, 2	2003-12-09
Substrate processing apparatus App 20020114632 - Deguchi, Masatoshi ; et al.	2002-08-22
Apparatus and method of thermal processing and method of pattern formation App 20020076659 - Shinya, Hiroshi ; et al.	2002-06-20
Method and apparatus for heat processing of substrate App 20020034714 - Deguchi, Masatoshi ; et al.	2002-03-21
Heating apparatus for heating an object to be processed Grant 6,185,370 - Sekimoto , et al. February 6, 2	2001-02-06

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