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Apparatus for inspecting defects of devices and method of inspecting defects App 20040178811 - Ishitani, Tohru ;   et al. | 2004-09-16 |
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Refilling method by ion beam, instrument for fabrication and observation by ion beam, and manufacturing method of electron device App 20030198755 - Shichi, Hiroyasu ;   et al. | 2003-10-23 |
Probe driving method, and probe apparatus App 20030184332 - Tomimatsu, Satoshi ;   et al. | 2003-10-02 |