Patent | Date |
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Facet Mirror For An Illumination Optical Unit Of A Projection Exposure Apparatus App 20220206398 - Anderl; Willi ;   et al. | 2022-06-30 |
Polygon scanner and method of detecting objects in a monitored zone Grant 11,353,560 - Steinkogler , et al. June 7, 2 | 2022-06-07 |
Portion-wise filling of a reservoir with bulk components Grant 11,240,948 - Rossmann , et al. February 1, 2 | 2022-02-01 |
Method of pump operation, use of the method in HPLC, pump, pump system, and HPLC system Grant 10,767,643 - Strobl , et al. Sep | 2020-09-08 |
Sensor and method of heating a sensor Grant 10,719,108 - Seitz | 2020-07-21 |
Portion-wise Filling Of A Reservoir With Bulk Componets App 20200170153 - ROSSMANN; Thomas ;   et al. | 2020-05-28 |
Light receiver and method for reading out avalanche photodiodes in Geiger mode Grant 10,612,972 - Clemens , et al. | 2020-04-07 |
Light receiver having a plurality of avalanche photodiode elements and method for supplying a bias voltage Grant 10,584,998 - Clemens , et al. | 2020-03-10 |
Light receiver having geiger-mode avalanche photodiodes and method for reading out Grant 10,436,638 - Clemens , et al. O | 2019-10-08 |
Illumination optic for EUV projection lithography Grant 10,379,444 - Mueller , et al. A | 2019-08-13 |
Polygon Scanner And Method Of Detecting Objects In A Monitored Zone App 20190154807 - STEINKOGLER; Sascha ;   et al. | 2019-05-23 |
Method Of Pump Operation, Use Of The Method In Hplc, Pump, Pump System, And Hplc System App 20190010940 - STROBL; Christoph ;   et al. | 2019-01-10 |
Geiger mode APD light receiver having an active readout forming a virtual short-circuit Grant 10,018,505 - Clemens , et al. July 10, 2 | 2018-07-10 |
Light Receiver Having a Plurality of Avalanche Photodiode Elements in Geiger Mode and Method for Temperature Compensation App 20180180471 - MARRA; Martin ;   et al. | 2018-06-28 |
Portion-wise Filling Of A Reservoir With Bulk Components App 20180184555 - ROSSMANN; Thomas ;   et al. | 2018-06-28 |
Light Receiver Having a Plurality of Avalanche Photodiode Elements and Method for Supplying a Bias Voltage App 20180180473 - CLEMENS; Klaus ;   et al. | 2018-06-28 |
Light Receiver And Method For Reading Out Avalanche Photodiodes In Geiger Mode App 20180180472 - CLEMENS; Klaus ;   et al. | 2018-06-28 |
Light Receiver Having A Plurality Of Avalanche Photodiode Elements And Method For Detecting Light App 20180180470 - SEITZ; Stefan | 2018-06-28 |
Illumination Optic For Euv Projection Lithography App 20180074410 - Mueller; Matthias ;   et al. | 2018-03-15 |
Electromechanical braking device for a braking system and braking system for a vehicle Grant 9,889,836 - Mahnkopf , et al. February 13, 2 | 2018-02-13 |
Light Receiver Having Geiger-mode Avalanche Photodiodes And Method For Reading Out App 20170363467 - CLEMENS; Klaus ;   et al. | 2017-12-21 |
Sensor And Method Of Heating A Sensor App 20170248997 - SEITZ; Stefan | 2017-08-31 |
Light Receiver with Avalanche Photo Diodes in a Geiger Mode App 20170030769 - CLEMENS; Klaus ;   et al. | 2017-02-02 |
Electromechanical braking device for a braking system and braking system for a vehicle App 20160107628 - Mahnkopf; Dirk ;   et al. | 2016-04-21 |
MEMS microphone and method for producing the MEMS microphone Grant 8,865,499 - Pahl , et al. October 21, 2 | 2014-10-21 |
MEMS Microphone And Method For Producing The MEMS Microphone App 20130140656 - Pahl; Wolfgang ;   et al. | 2013-06-06 |
MEMS package and method for the production thereof Grant 8,432,007 - Leidl , et al. April 30, 2 | 2013-04-30 |
MEMS package and method for the production thereof Grant 8,169,041 - Pahl , et al. May 1, 2 | 2012-05-01 |
Adjustable capacitor and circuit provided therewith Grant 8,009,407 - Leidl , et al. August 30, 2 | 2011-08-30 |
MEMS Package and Method for the Production Thereof App 20110186943 - Pahl; Wolfgang ;   et al. | 2011-08-04 |
Method and apparatus for online contact lens evaluation Grant 7,771,053 - Polland , et al. August 10, 2 | 2010-08-10 |
Online wavefront measurement and display Grant 7,708,411 - Polland , et al. May 4, 2 | 2010-05-04 |
Mems Package and Method for the Production Thereof App 20090001553 - Pahl; Wolfgang ;   et al. | 2009-01-01 |
Adjustable Capacitor and Circuit Provided Therewith App 20080253056 - Leidl; Anton ;   et al. | 2008-10-16 |
Method and Apparatus for Online Contact Lens Evaluation App 20070273828 - Polland; Hans-Joachim ;   et al. | 2007-11-29 |
Online wavefront measurement and display App 20070008491 - Polland; Hans-Joachim ;   et al. | 2007-01-11 |
Electromagnetically actuatable valve Grant 6,976,665 - Seitz , et al. December 20, 2 | 2005-12-20 |
Electromagnetically actuatable valve App 20040227398 - Seitz, Stefan ;   et al. | 2004-11-18 |