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Wafer Processing Method App 20210280419 - OKABE; Noriaki ;   et al. | 2021-09-09 |
Film formation method, vacuum processing apparatus, method of manufacturing semiconductor light emitting element, semiconductor light emitting element, method of manufacturing semiconductor electronic element, semiconductor electronic element, and illuminating apparatus Grant 11,035,034 - Daigo , et al. June 15, 2 | 2021-06-15 |
Method of manufacturing tunnel magnetoresistive effect element and sputtering apparatus Grant 10,361,363 - Otani , et al. | 2019-07-23 |
Manufacturing method of magnetoresistive effect element Grant 10,153,426 - Seino , et al. Dec | 2018-12-11 |
Substrate cleaning method for removing oxide film Grant 10,083,830 - Seino , et al. September 25, 2 | 2018-09-25 |
Method of manufacturing perpendicular MTJ device Grant 9,929,340 - Seino March 27, 2 | 2018-03-27 |
Oxidation process apparatus, oxidation method, and method for manufacturing electronic device Grant 9,905,441 - Shimane , et al. February 27, 2 | 2018-02-27 |
Method for manufacturing magnetoresistive element Grant 9,865,805 - Seino , et al. January 9, 2 | 2018-01-09 |
Magnetoresistance effect element Grant 9,853,207 - Seino , et al. December 26, 2 | 2017-12-26 |
Method Of Manufacturing Perpendicular Mtj Device App 20170317274 - Seino; Takuya | 2017-11-02 |
Film Formation Method, Vacuum Processing Apparatus, Method Of Manufacturing Semiconductor Light Emitting Element, Semiconductor Light Emitting Element, Method Of Manufacturing Semiconductor Electronic Element, Semiconductor Electronic Element, And Illuminating Apparatus App 20170145588 - DAIGO; YOSHIAKI ;   et al. | 2017-05-25 |
Magnetoresistance Effect Element App 20160380187 - Seino; Takuya ;   et al. | 2016-12-29 |
Substrate Cleaning Method For Removing Oxide Film App 20160343565 - SEINO; Takuya ;   et al. | 2016-11-24 |
Method Of Manufacturing Tunnel Magnetoresistive Effect Element And Sputtering Apparatus App 20160276583 - Otani; Yuichi ;   et al. | 2016-09-22 |
Electronic component manufacturing method and electrode structure Grant 9,437,702 - Matsuo , et al. September 6, 2 | 2016-09-06 |
Manufacturing Method Of Magnetoresistive Effect Element App 20160240772 - Seino; Takuya ;   et al. | 2016-08-18 |
Method For Manufacturing Magnetoresistive Element App 20160005958 - Seino; Takuya ;   et al. | 2016-01-07 |
Oxidation Process Apparatus, Oxidation Method, And Method For Manufacturing Electronic Device App 20150318466 - Shimane; Yoshimitsu ;   et al. | 2015-11-05 |
Tunnel Magneto-resistance Element Manufacturing Apparatus App 20140353149 - SEINO; Takuya ;   et al. | 2014-12-04 |
Electronic Component Manufacturing Method And Electrode Structure App 20140319676 - MATSUO; Akira ;   et al. | 2014-10-30 |
Electronic component manufacturing method including step of embedding metal film Grant 8,835,296 - Wakayanagi , et al. September 16, 2 | 2014-09-16 |
Semiconductor device and manufacturing method thereof Grant 8,669,624 - Kitano , et al. March 11, 2 | 2014-03-11 |
Semiconductor Device And Manufacturing Method Thereof App 20130285158 - Kitano; Naomu ;   et al. | 2013-10-31 |
Method and apparatus for manufacturing semiconductor device Grant 8,481,382 - Kitano , et al. July 9, 2 | 2013-07-09 |
Method And Apparatus For Manufacturing Semiconductor Device App 20130071975 - KITANO; Naomu ;   et al. | 2013-03-21 |
Method of manufacturing hafnium-containing and silicon-containing metal oxynitride dielectric film Grant 8,288,234 - Seino , et al. October 16, 2 | 2012-10-16 |
Method And Apparatus For Selectively Growing Doped Epitaxial Film App 20120258582 - SEINO; Takuya ;   et al. | 2012-10-11 |
Electronic Component Manufacturing Method Including Step Of Embedding Metal Film App 20120161322 - Wakayanagi; Shunichi ;   et al. | 2012-06-28 |
Tunneling magnetic sensing element including enhancing layer having high Fe concentration in the vicinity of barrier layer Grant 7,898,776 - Nakabayashi , et al. March 1, 2 | 2011-03-01 |
Dielectric Film, Method Of Manufacutring Semiconductor Device Using Dielectric Film, And Semiconductor Manufacturing Apparatus App 20110027979 - Seino; Takuya ;   et al. | 2011-02-03 |
Tunnel-type magnetic detecting element and method of manufacturing the same Grant 7,881,024 - Ide , et al. February 1, 2 | 2011-02-01 |
Substrate Cleaning Method For Removing Oxide Film App 20100255667 - SEINO; Takuya ;   et al. | 2010-10-07 |
Method of fabricating a semiconductor device Grant 7,807,585 - Seino , et al. October 5, 2 | 2010-10-05 |
Surface Treatment Apparatus And Surface Treatment Method App 20100221895 - Seino; Takuya ;   et al. | 2010-09-02 |
Method Of Fabricating A Semiconductor Device App 20100075508 - Seino; Takuya ;   et al. | 2010-03-25 |
Silicide Forming Method And System Thereof App 20090298288 - Seino; Takuya ;   et al. | 2009-12-03 |
Magnetoresistive Element, Magnetic Sensor, And Method Of Producing The Magnetoresistive Element App 20090147409 - Sugihara; Shinji ;   et al. | 2009-06-11 |
Exchange coupling film and magnetic sensing element including the same Grant 7,495,868 - Seino , et al. February 24, 2 | 2009-02-24 |
Exchange-coupled film including pinned magnetic layer composed of a plurality of cobalt-iron alloys having different compositions disposed on antiferromagnetic layer, and magnetic sensing element Grant 7,369,372 - Ikarashi , et al. May 6, 2 | 2008-05-06 |
Tunneling magnetic sensing element including enhancing layer having high Fe concentration in the vicinity of barrier layer and method for manufacturing tunneling magnetic sensing element App 20080030907 - Nakabayashi; Ryo ;   et al. | 2008-02-07 |
Tunnel Type Magnetic Detection Element In Which Fe Composition Of Top/bottom Surface Of Insulating Barrier Layer Is Adjusted And Manufacturing Method Thereof App 20070171580 - Nishimura; Kazumasa ;   et al. | 2007-07-26 |
Tunnel Type Magnetic Detection Element In Which Crystal Orientation Of Magnetic Layer And Barrier Layer Is Selected And Manufacturing Method Thereof App 20070171579 - Ide; Yosuke ;   et al. | 2007-07-26 |
Tunnel-type Magnetic Detecting Element And Method Of Manufacturing The Same App 20070165337 - Ide; Yosuke ;   et al. | 2007-07-19 |
Exchange-coupled film including pinned magnetic layer composed of a plurality of cobalt-iron alloys having different compositions disposed on antiferromagnetic layer, and magnetic sensing element App 20060098355 - Ikarashi; Kazuaki ;   et al. | 2006-05-11 |
Exchange coupling film and magnetic sensing element including the same App 20060012927 - Seino; Takuya ;   et al. | 2006-01-19 |