| Patent | Date |
|---|
Ammonia reclamation system
Grant 7,229,601 - Tansy June 12, 2 | 2007-06-12 |
Lapping carrier, apparatus for lapping a wafer and method of fabricating a lapping carrier
Grant 7,196,009 - Bex , et al. March 27, 2 | 2007-03-27 |
Low pressure check valve
Grant 7,137,405 - Barrows , et al. November 21, 2 | 2006-11-21 |
Method of producing a high resistivity SIMOX silicon substrate
Grant 7,112,509 - Erokhin , et al. September 26, 2 | 2006-09-26 |
Wafer polishing template for polishing semiconductor wafers in a wax free polishing process
App 20060211349 - Gaeta; Francisco Javier | 2006-09-21 |
Method and apparatus for recycling slurry
Grant 7,059,943 - Cann , et al. June 13, 2 | 2006-06-13 |
Support fixture for semiconductor wafers and associated fabrication method
App 20050229857 - Beauchaine, David A. ; et al. | 2005-10-20 |
Ammonia reclamation system
App 20050175523 - Tansy, Brian L. | 2005-08-11 |
Method of determining nitrogen concentration within a wafer
Grant 6,896,727 - Koveshnikov May 24, 2 | 2005-05-24 |
Apparatus, system and method for cutting a crystal ingot
Grant 6,889,684 - McAulay , et al. May 10, 2 | 2005-05-10 |
Gettering filter and associated method for removing oxygen from a gas
App 20050053535 - Beauchaine, David A. ; et al. | 2005-03-10 |
Method of reducing particulate contamination during polishing of a wafer
Grant 6,849,548 - Cooper February 1, 2 | 2005-02-01 |
Method for isolation of wafer support-related crystal defects
Grant 6,825,487 - Preece November 30, 2 | 2004-11-30 |
Lapping carrier, apparatus for lapping a wafer and method of fabricating a lapping carrier
App 20040224522 - Bex, Brian L. ; et al. | 2004-11-11 |
Method for locating an alignment feature of a crystalline body
App 20040213376 - Aydelott, Richard M. ; et al. | 2004-10-28 |
In-situ post epitaxial treatment process
Grant 6,808,564 - Dietze October 26, 2 | 2004-10-26 |
Methods and apparatus for predicting oxygen-induced stacking fault density in wafers
Grant 6,798,526 - Brown , et al. September 28, 2 | 2004-09-28 |
Method of producing an SOI wafer
Grant 6,794,227 - Koveshnikov September 21, 2 | 2004-09-21 |
System and method for collecting, storing, and displaying process data including particle measurement data
App 20040176916 - Robinson, Michael M. ; et al. | 2004-09-09 |
Method for fabricating a wafer including dry etching the edge of the wafer
App 20040157461 - Kononchuk, Oleg V. ; et al. | 2004-08-12 |
System and method for collecting, storing, and displaying process data including particle measurement data
Grant 6,773,932 - Robinson , et al. August 10, 2 | 2004-08-10 |
Methods and computer program products for characterizing a crystalline structure
Grant 6,768,965 - Martin , et al. July 27, 2 | 2004-07-27 |
Method and apparatus for orienting a crystalline body during radiation diffractometry
Grant 6,760,403 - Aydelott , et al. July 6, 2 | 2004-07-06 |
Method for seasoning a polishing pad
Grant 6,743,080 - Truong June 1, 2 | 2004-06-01 |
Method for lapping a wafer
Grant 6,733,368 - Pan , et al. May 11, 2 | 2004-05-11 |
Apparatus, system and method for cutting a crystal ingot
App 20040084042 - McAulay, Shawn V. ; et al. | 2004-05-06 |
Quartz to quartz seal using expanded PTFE gasket material
App 20040060519 - Beauchaine, David A. ; et al. | 2004-04-01 |
Growth of epitaxial semiconductor material with improved crystallographic properties
Grant 6,703,290 - Boydston , et al. March 9, 2 | 2004-03-09 |
Internal diameter cutting blades and methods
App 20040038629 - Griggs, Jesse B. | 2004-02-26 |
Method for seasoning a polishing pad
App 20040023597 - Truong, Phillip P. | 2004-02-05 |
Method for isolation of wafer support-related crystal defects
App 20040021097 - Preece, Brazel G. | 2004-02-05 |
Systems, methods and computer program products for determining contaminant concentrations in semiconductor materials
App 20040010394 - Koveshnikov, Sergei V. | 2004-01-15 |
Sound enhanced lapping apparatus
Grant 6,676,489 - Fitzgerald , et al. January 13, 2 | 2004-01-13 |
High resistivity silicon wafer having electrically inactive dopant and method of producing same
Grant 6,673,147 - Kononchuk , et al. January 6, 2 | 2004-01-06 |
High resistivity silicon wafer produced by a controlled pull rate czochralski method
Grant 6,669,775 - Kononchuk , et al. December 30, 2 | 2003-12-30 |
Method of producing a high resistivity silicon wafer utilizing heat treatment that occurs during device fabrication
Grant 6,669,777 - Kononchuk , et al. December 30, 2 | 2003-12-30 |
Method of growing large-diameter dislocation-free <110> crystalline ingots
Grant 6,652,824 - Nettleton , et al. November 25, 2 | 2003-11-25 |
Bromine biocide removal
Grant 6,649,065 - Boyce November 18, 2 | 2003-11-18 |
Method for evaluating impurity concentrations in epitaxial susceptors
Grant 6,649,427 - Koveshnikov , et al. November 18, 2 | 2003-11-18 |
Methods and computer program products for characterizing a crystalline structure
App 20030200047 - Martin, Stephen L. ; et al. | 2003-10-23 |
Method for evaluating impurity concentrations in epitaxial reagent gases
Grant 6,632,688 - Koveshnikov October 14, 2 | 2003-10-14 |
Optimized silicon wafer gettering for advanced semiconductor devices
Grant 6,632,277 - Dietze , et al. October 14, 2 | 2003-10-14 |
Method of reducing particulate contamination during polishing of a wafer
App 20030190810 - Cooper, Steven P. | 2003-10-09 |
Method for evaluating impurity concentrations in unpolished wafers grown by the Czochralski method
Grant 6,630,363 - Koveshnikov , et al. October 7, 2 | 2003-10-07 |
Method for evaluating impurity concentrations in semiconductor substrates
Grant 6,620,632 - Koveshnikov , et al. September 16, 2 | 2003-09-16 |
Recycling heat from industrial processes to generate electricity using a thermophotovoltaic generator
Grant 6,620,998 - Salstrom September 16, 2 | 2003-09-16 |
Enhanced defect detection using surface scanning inspection tools
Grant 6,611,325 - Clark August 26, 2 | 2003-08-26 |
Method and system for assigning and reporting preventative maintenance workorders
App 20030158770 - Carlson, Leif ; et al. | 2003-08-21 |
Universal system, method and computer program product for collecting and processing process data including particle measurement data
Grant 6,606,582 - Brinkman , et al. August 12, 2 | 2003-08-12 |
Method and system for reporting, assigning, and tracking facilities incident reports
App 20030135378 - Carlson, Leif ; et al. | 2003-07-17 |
High resistivity silicon wafer produced by a controlled pull rate czochralski method
App 20030106481 - Kononchuk, Oleg V. ; et al. | 2003-06-12 |
High Resistivity Silicon Wafer And Method Of Producing Same Using The Magnetic Field Czochralski Method
App 20030106485 - Kononchuk, Oleg V. ; et al. | 2003-06-12 |
Method of producing a high resistivity silicon wafer utilizing heat treatment that occurs during device fabrication
App 20030106486 - Kononchuk, Oleg V. ; et al. | 2003-06-12 |
High resistivity silicon wafer having electrically inactive dopant and method of producing same
App 20030106482 - Kononchuk, Oleg V. ; et al. | 2003-06-12 |
Growth of epitaxial semiconductor material with improved crystallographic properties
App 20030109095 - Boydston, Mark R. ; et al. | 2003-06-12 |
Double side polished wafers having external gettering sites, and method of producing same
Grant 6,576,501 - Beauchaine , et al. June 10, 2 | 2003-06-10 |
System and method for collecting, storing, and displaying process data including particle measurement data
App 20030105546 - Robinson, Michael M. ; et al. | 2003-06-05 |
Method of growing large-diameter dislocation-free <110> crystalline ingots
App 20030097975 - Nettleton, Rosemary T. ; et al. | 2003-05-29 |
Method and apparatus for orienting a crystalline body during radiation diffractometry
App 20030081723 - Aydelott, Richard M. ; et al. | 2003-05-01 |
Recycling heat from industrial processes to generate electricity using a thermophotovoltaic generator
App 20030079773 - Salstrom, Neil F. | 2003-05-01 |
Method and apparatus for recycling slurry
App 20030003851 - Cann, Scott ; et al. | 2003-01-02 |
Chucking systems and methods
App 20020174823 - Salstrom, Neil | 2002-11-28 |
Processes for polishing wafers
App 20020175143 - Cooper, Steven P. | 2002-11-28 |
Resin trap device for use in ultrapure water systems and method of purifying water using same
Grant 6,475,385 - Boyce , et al. November 5, 2 | 2002-11-05 |
In-situ post epitaxial treatment process
Grant 6,471,771 - Dietze October 29, 2 | 2002-10-29 |
Bromine biocide removal
App 20020139750 - Boyce, Allen R. | 2002-10-03 |
Method of growing large-diameter dislocation-free<110> crystalline ingots
App 20020104475 - Nettleton, Rosemary T. ; et al. | 2002-08-08 |
Apparatus and method for indicating liquid level in a chemical tank
Grant 6,398,382 - Boyce , et al. June 4, 2 | 2002-06-04 |
Wafer support device and reactor system for epitaxial layer growth
App 20020062792 - Boydston, Mark R. ; et al. | 2002-05-30 |
Susceptorless semiconductor wafer support and reactor system for epitaxial layer growth
Grant 6,375,749 - Boydston , et al. April 23, 2 | 2002-04-23 |
Growth of epitaxial semiconductor material with improved crystallographic properties
App 20020025660 - Boydston, Mark R. ; et al. | 2002-02-28 |
Methods of producing doped semiconductors
Grant 6,350,315 - Anderson February 26, 2 | 2002-02-26 |
Optimized silicon wafer strength for advanced semiconductor devices
App 20020020340 - Dietze, Gerald R. ; et al. | 2002-02-21 |
In-situ post epitaxial treatment process
Grant 6,338,756 - Dietze January 15, 2 | 2002-01-15 |
Method for automatically transferring wafers between wafer holders in a liquid environment
App 20010021340 - Sato, Michito ; et al. | 2001-09-13 |
System and method for wafer thickness sorting
Grant 6,286,685 - Kononchuk , et al. September 11, 2 | 2001-09-11 |
Method of determining the thickness of a layer on a silicon substrate
Grant 6,284,986 - Dietze , et al. September 4, 2 | 2001-09-04 |
Method for measurement of OSF density
Grant 6,275,293 - Brown August 14, 2 | 2001-08-14 |
High efficiency silicon wafer optimized for advanced semiconductor devices
App 20010007240 - Dietze, Gerald R. ; et al. | 2001-07-12 |
Improved purity silicon wafer for use in advanced semiconductor devices
App 20010007241 - Dietze, Gerald R. ; et al. | 2001-07-12 |
Methods of producing doped semiconductors
App 20010001943 - Anderson, Douglas G. | 2001-05-31 |
Gas injection methods for a LPCVD furnace
Grant 6,197,373 - Brown March 6, 2 | 2001-03-06 |
Growth of epitaxial semiconductor material with improved crystallographic properties
Grant 6,190,453 - Boydston , et al. February 20, 2 | 2001-02-20 |
Method of processing the backside of a wafer within an epitaxial reactor chamber
Grant 6,184,154 - Dietze , et al. February 6, 2 | 2001-02-06 |
Level transmitter connector
Grant 6,128,967 - Campbell October 10, 2 | 2000-10-10 |
Clean room air filtering system
Grant 6,123,617 - Johnson September 26, 2 | 2000-09-26 |
Level detector and method for detecting a surface level of a material in a container
Grant 6,106,612 - White August 22, 2 | 2000-08-22 |
Make-up air handler and method for supplying boron-free outside air to clean rooms
Grant 6,102,977 - Johnson August 15, 2 | 2000-08-15 |
Fluid deflecting device for use in work piece holder during a semiconductor wafer grinding process
Grant 6,071,184 - Anderson, III June 6, 2 | 2000-06-06 |
Method of effecting nitrogen doping in Czochralski grown silicon crystal
Grant 6,059,875 - Kirkland , et al. May 9, 2 | 2000-05-09 |
Contamination monitoring system
Grant 6,058,947 - Bennett , et al. May 9, 2 | 2000-05-09 |
Silicon and oxygen ion co-implantation for metallic gettering in epitaxial wafers
Grant 6,022,793 - Wijaranakula , et al. February 8, 2 | 2000-02-08 |
Apparatus and method for extending the lifetime of an exhaust sleeve for growing single crystal silicon by silicon nitride (SI.sub.3 N.sub.4) coating
Grant 5,993,902 - Heid November 30, 1 | 1999-11-30 |
Prevention of edge stain in silicon wafers by ozone dipping
Grant 5,972,802 - Nakano , et al. October 26, 1 | 1999-10-26 |
Exhaust insert for barrel-type epitaxial reactors
Grant 5,964,948 - Dietze , et al. October 12, 1 | 1999-10-12 |
Diameter and melt measurement method used in automatically controlled crystal growth
Grant 5,961,716 - White , et al. October 5, 1 | 1999-10-05 |
In-situ epitaxial passivation for resistivity measurement
Grant 5,872,017 - Boydston , et al. February 16, 1 | 1999-02-16 |
Method for improving mechanical strength of the neck section of czochralski silicon crystal
Grant 5,865,887 - Wijaranakula , et al. February 2, 1 | 1999-02-02 |
Method of monitoring fluid contamination
Grant 5,849,103 - Bennett , et al. December 15, 1 | 1998-12-15 |
Ingot trimming method and apparatus
Grant 5,832,914 - Aydelott November 10, 1 | 1998-11-10 |
Clean storage unit air flow system
Grant 5,827,118 - Johnson , et al. October 27, 1 | 1998-10-27 |
Back side damage monitoring system
Grant 5,764,353 - Tate , et al. June 9, 1 | 1998-06-09 |
Two-stage air filter for use with electronic enclosures
Grant 5,730,770 - Greisz March 24, 1 | 1998-03-24 |
Method for forming epitaxial semiconductor wafer for CMOS integrated circuits
Grant 5,702,973 - Mitani , et al. December 30, 1 | 1997-12-30 |
Flowhood work station
Grant 5,700,190 - Johnson , et al. December 23, 1 | 1997-12-23 |
Method and apparatus for configuring an epitaxial reactor for reduced set-up time and improved layer quality
Grant 5,685,906 - Dietze , et al. November 11, 1 | 1997-11-11 |
Combination wafer carrier and storage device
Grant 5,657,879 - Anderson , et al. August 19, 1 | 1997-08-19 |
Water purification system and method
Grant 5,651,894 - Boyce , et al. July 29, 1 | 1997-07-29 |
Puller cell
Grant 5,641,354 - Sakauchi , et al. June 24, 1 | 1997-06-24 |
Method for producing semiconductor wafers with low light scattering anomalies
Grant 5,629,216 - Wijaranakula , et al. May 13, 1 | 1997-05-13 |
Method for manufacturing a calibration wafer having a microdefect-free layer of a precisely predetermined depth
Grant 5,611,855 - Wijaranakula March 18, 1 | 1997-03-18 |
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