| Patent | Date |
|---|
Applying a positive feedback voltage to an electromechanical sensor utilizing a voltage-to-voltage converter to facilitate a reduction of charge flow in such sensor representing spring
Grant 11,428,702 - Seeger , et al. August 30, 2 | 2022-08-30 |
Demodulation phase calibration using external input
Grant 11,365,983 - Senkal , et al. June 21, 2 | 2022-06-21 |
Sensor With Integrated Heater
App 20220098030 - Yen; Pei-Wen ; et al. | 2022-03-31 |
Sensor with integrated heater
Grant 11,225,409 - Yen , et al. January 18, 2 | 2022-01-18 |
Applying a positive feedback voltage to an electromechanical sensor utilizing a voltage-to-voltage converter to facilitate a reduction of charge flow in such sensor representing spring softening
Grant 11,085,770 - Seeger August 10, 2 | 2021-08-10 |
Configuration to reduce non-linear motion
Grant 11,047,685 - Anac , et al. June 29, 2 | 2021-06-29 |
Device comprising a micro-electro-mechanical system substrate with protrusions of different heights that has been integrated with a complementary metal-oxide-semiconductor substrate
Grant 11,040,871 - Shin , et al. June 22, 2 | 2021-06-22 |
Deformable membrane and a compensating structure thereof
Grant 11,027,967 - Lin , et al. June 8, 2 | 2021-06-08 |
Drive And Sense Balanced, Semi-coupled 3-axis Gyroscope
App 20210116244 - Senkal; Doruk ; et al. | 2021-04-22 |
Drive and sense balanced, semi-coupled 3-axis gyroscope
Grant 10,914,584 - Senkal , et al. February 9, 2 | 2021-02-09 |
Device and method for a threshold sensor
Grant 10,793,424 - Thompson , et al. October 6, 2 | 2020-10-06 |
On-chip gap measurement
Grant 10,794,702 - Senkal , et al. October 6, 2 | 2020-10-06 |
MEMS sensor compensation for off-axis movement
Grant 10,766,764 - Gurin , et al. Sep | 2020-09-08 |
Demodulation phase calibration
Grant 10,746,565 - Senkal , et al. A | 2020-08-18 |
Configuration To Reduce Non-linear Motion
App 20200225038 - ANAC; Ozan ; et al. | 2020-07-16 |
Selectively controlling application of a self-assembled monolayer coating on a substrate of a device for facilitating a reduction of adverse effects of such coating on the device
Grant 10,692,761 - Kim , et al. | 2020-06-23 |
Self-calibrating microelectromechanical system devices
Grant 10,649,002 - Thompson , et al. | 2020-05-12 |
Sensor With Integrated Heater
App 20200087142 - Yen; Pei-Wen ; et al. | 2020-03-19 |
Applying A Positive Feedback Voltage To An Electromechanical Sensor Utilizing A Voltage-to-voltage Converter To Facilitate A Red
App 20200056887 - Seeger; Joseph | 2020-02-20 |
Applying A Positive Feedback Voltage To An Electromechanical Sensor Utilizing A Voltage-to-voltage Converter To Facilitate A Red
App 20200057087 - Seeger; Joseph ; et al. | 2020-02-20 |
MEMS device with improved spring system
Grant 10,551,193 - Seeger , et al. Fe | 2020-02-04 |
Configuration to reduce non-linear motion
Grant 10,527,421 - Anac , et al. J | 2020-01-07 |
Elastic bump stops for MEMS devices
Grant 10,527,420 - Qiu , et al. J | 2020-01-07 |
Device And Method For A Threshold Sensor
App 20190382259 - THOMPSON; MATTHEW JULIAN ; et al. | 2019-12-19 |
Proof mass and polysilicon electrode integrated thereon
Grant 10,505,006 - Kim , et al. Dec | 2019-12-10 |
Mems Sensor Compensation For Off-axis Movement
App 20190359479 - Gurin; Ilya ; et al. | 2019-11-28 |
Deformable Membrane And A Compensating Structure Thereof
App 20190345024 - LIN; Chung-Hsien ; et al. | 2019-11-14 |
MEMS gyroscope amplitude control via quadrature
Grant 10,451,418 - Seeger Oc | 2019-10-22 |
MEMS sensor with high voltage switch
Grant 10,427,930 - Thompson , et al. October 1, 2 | 2019-10-01 |
MEMS sensor compensation for off-axis movement
Grant 10,421,659 - Gurin , et al. Sept | 2019-09-24 |
Gyroscope self test by applying rotation on Coriolis sense mass
Grant 10,415,994 - Anac , et al. Sept | 2019-09-17 |
Device and method for a threshold sensor
Grant 10,399,849 - Thompson , et al. Sep | 2019-09-03 |
MEMS device to selectively measure excitation in different directions
Grant 10,393,768 - Thompson , et al. A | 2019-08-27 |
Demodulation Phase Calibration
App 20190226871 - SENKAL; Doruk ; et al. | 2019-07-25 |
Device Comprising A Micro-electro-mechanical System Substrate With Protrusions Of Different Heights That Has Been Integrated Wit
App 20190185317 - Shin; Jongwoo ; et al. | 2019-06-20 |
On-chip Gap Measurement
App 20190178645 - Senkal; Doruk ; et al. | 2019-06-13 |
Stress Isolation Frame For A Sensor
App 20190169018 - SENKAL; Doruk ; et al. | 2019-06-06 |
Mems Sensor Compensation For Off-axis Movement
App 20190144264 - Gurin; Ilya ; et al. | 2019-05-16 |
Demodulation Phase Calibration Using External Input
App 20190120657 - Senkal; Doruk ; et al. | 2019-04-25 |
Demodulation phase calibration
Grant 10,267,650 - Senkal , et al. | 2019-04-23 |
Proof Mass And Polysilicon Electrode Integrated Thereon
App 20190035905 - KIM; Bongsang ; et al. | 2019-01-31 |
Self-calibrating Microelectromechanical System Devices
App 20190033342 - Thompson; Matthew Julian ; et al. | 2019-01-31 |
Electrostatic Offset Correction
App 20190025056 - Hughes; Kevin ; et al. | 2019-01-24 |
Drive And Sense Balanced, Semi-coupled 3-axis Gyroscope
App 20180216935 - Senkal; Doruk ; et al. | 2018-08-02 |
Mode-tuning sense interface
Grant 10,001,387 - Cagdaser , et al. June 19, 2 | 2018-06-19 |
Mems Device With Improved Spring System
App 20180128615 - SEEGER; Joseph ; et al. | 2018-05-10 |
Configuration to reduce non-linear motion
Grant 9,958,271 - Anac , et al. May 1, 2 | 2018-05-01 |
Configuration To Reduce Non-linear Motion
App 20180073875 - ANAC; Ozan ; et al. | 2018-03-15 |
MEMS device with improved spring system
Grant 9,891,053 - Seeger , et al. February 13, 2 | 2018-02-13 |
MEMS sensor with decoupled drive system
Grant 9,863,769 - Anac , et al. January 9, 2 | 2018-01-09 |
Mems Sensor With High Voltage Switch
App 20180002162 - Thompson; Matthew ; et al. | 2018-01-04 |
MEMS rotation sensor with integrated electronics
Grant 9,846,175 - Nasiri , et al. December 19, 2 | 2017-12-19 |
Translating Z axis accelerometer
Grant 9,840,409 - Thompson , et al. December 12, 2 | 2017-12-12 |
Demodulation Phase Calibration
App 20170350722 - Senkal; Doruk ; et al. | 2017-12-07 |
Gyroscope Self Test By Applying Rotation On Coriolis Sense Mass
App 20170314960 - Anac; Ozan ; et al. | 2017-11-02 |
Method of increasing MEMS enclosure pressure using outgassing material
Grant 9,731,963 - Zhang , et al. August 15, 2 | 2017-08-15 |
Gyroscope self test by applying rotation on coriolis sense mass
Grant 9,714,842 - Anac , et al. July 25, 2 | 2017-07-25 |
MEMS sensor with high voltage switch
Grant 9,708,176 - Thompson , et al. July 18, 2 | 2017-07-18 |
MEMS Gyroscope Amplitude Control via Quadrature
App 20170199035 - Seeger; Joseph | 2017-07-13 |
Mems Device To Selectively Measure Excitation In Different Directions
App 20170184627 - THOMPSON; MATTHEW JULIAN ; et al. | 2017-06-29 |
Extension-mode angular velocity sensor
Grant 9,683,844 - Seeger , et al. June 20, 2 | 2017-06-20 |
MEMS device with electrodes permeable to outgassing species
Grant 9,663,349 - Shin , et al. May 30, 2 | 2017-05-30 |
In-plane sensing Lorentz force magnetometer
Grant 9,664,750 - Thompson , et al. May 30, 2 | 2017-05-30 |
Magnetometer using magnetic materials on accelerometer
Grant 9,606,191 - Seeger , et al. March 28, 2 | 2017-03-28 |
MEMS sensor including an over-travel stop and method of manufacture
Grant 9,593,008 - Thompson , et al. March 14, 2 | 2017-03-14 |
Method Of Increasing Mems Enclosure Pressure Using Outgassing Material
App 20170001861 - ZHANG; Cerina ; et al. | 2017-01-05 |
Mems Device With Electrodes Permeable To Outgassing Species
App 20160376143 - SHIN; Jongwoo ; et al. | 2016-12-29 |
Configuration To Reduce Non-linear Motion
App 20160363445 - ANAC; Ozan ; et al. | 2016-12-15 |
MEMS Sensor with High Voltage Switch
App 20160347605 - Thompson; Matthew ; et al. | 2016-12-01 |
Device And Method For A Threshold Sensor
App 20160297670 - THOMPSON; MATTHEW JULIAN ; et al. | 2016-10-13 |
Microelectromechanical system device with internal direct electric coupling
Grant 9,452,920 - Thompson , et al. September 27, 2 | 2016-09-27 |
Method of increasing MEMS enclosure pressure using outgassing material
Grant 9,452,925 - Zhang , et al. September 27, 2 | 2016-09-27 |
Translating Z Axis Accelerometer
App 20160214853 - THOMPSON; Matthew Julian ; et al. | 2016-07-28 |
Micromachined gyroscope including a guided mass system
Grant 9,395,183 - Seeger , et al. July 19, 2 | 2016-07-19 |
Mode-tuning Sense Interface
App 20160178393 - Cagdaser; Baris ; et al. | 2016-06-23 |
Internal Electrical Contact For Enclosed Mems Devices
App 20160107881 - Thompson; Matthew Julian ; et al. | 2016-04-21 |
Mode-tuning sense interface
Grant 9,304,155 - Cagdaser , et al. April 5, 2 | 2016-04-05 |
Mems Sensor Including An Over-travel Stop And Method Of Manufacture
App 20160094156 - THOMPSON; Matthew Julian ; et al. | 2016-03-31 |
MEMS device with a stress-isolation structure
Grant 9,296,606 - Williams , et al. March 29, 2 | 2016-03-29 |
Internal electrical contact for enclosed MEMS devices
Grant 9,221,676 - Huang , et al. December 29, 2 | 2015-12-29 |
Method Of Increasing Mems Enclosure Pressure Using Outgassing Material
App 20150360939 - Zhang; Cerina ; et al. | 2015-12-17 |
Internal Electrical Contact For Enclosed Mems Devices
App 20150336792 - HUANG; Kegang ; et al. | 2015-11-26 |
Mems Device With Improved Spring System
App 20150316379 - SEEGER; Joseph ; et al. | 2015-11-05 |
Micromachined gyroscope including a guided mass system
Grant 9,170,107 - Anac , et al. October 27, 2 | 2015-10-27 |
Mems Device With A Stress-isolation Structure
App 20150284239 - WILLIAMS; KIRT REED ; et al. | 2015-10-08 |
Extension-mode Angular Velocity Sensor
App 20150226558 - SEEGER; Joseph ; et al. | 2015-08-13 |
MEMS device with improved spring system
Grant 9,097,524 - Seeger , et al. August 4, 2 | 2015-08-04 |
Mems Sensor With Decoupled Drive System
App 20150211853 - ANAC; Ozan ; et al. | 2015-07-30 |
Selectable communication interface configurations for motion sensing device
Grant 9,086,730 - Aria , et al. July 21, 2 | 2015-07-21 |
Extension-mode angular velocity sensor
Grant 9,052,194 - Seeger , et al. June 9, 2 | 2015-06-09 |
Mems Rotation Sensor With Integrated Electronics
App 20150135831 - NASIRI; Steven S. ; et al. | 2015-05-21 |
High-voltage MEMS apparatus and method
Grant 9,006,832 - Shaeffer , et al. April 14, 2 | 2015-04-14 |
Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
Grant 8,960,002 - Nasiri , et al. February 24, 2 | 2015-02-24 |
Micromachined resonant magnetic field sensors
Grant 8,947,081 - Seeger , et al. February 3, 2 | 2015-02-03 |
Internal electrical contact for enclosed MEMS devices
Grant 8,945,969 - Huang , et al. February 3, 2 | 2015-02-03 |
Micromachined Gyroscope Including A Guided Mass System
App 20140366631 - SEEGER; Joseph ; et al. | 2014-12-18 |
Internal Electrical Contact For Enclosed Mems Devices
App 20140349434 - HUANG; Kegang ; et al. | 2014-11-27 |
Micromachined resonant magnetic field sensors
Grant 8,860,409 - Seeger , et al. October 14, 2 | 2014-10-14 |
Method and system for using a MEMS structure as a timing source
Grant 8,847,693 - Seeger , et al. September 30, 2 | 2014-09-30 |
Magnetometer Using Magnetic Materials On Accelerometer
App 20140266170 - Seeger; Joseph ; et al. | 2014-09-18 |
Elastic Bump Stops For Mems Devices
App 20140260613 - Qiu; Jin ; et al. | 2014-09-18 |
Micromachined gyroscope including a guided mass system
Grant 8,833,162 - Seeger , et al. September 16, 2 | 2014-09-16 |
Internal electrical contact for enclosed MEMS devices
Grant 8,822,252 - Huang , et al. September 2, 2 | 2014-09-02 |
Internal Electrical Contact For Enclosed Mems Devices
App 20140213007 - HUANG; Kegang ; et al. | 2014-07-31 |
In-plane Sensing Lorentz Force Magnetometer
App 20140184213 - Thompson; Matthew Julian ; et al. | 2014-07-03 |
Mode-tuning Sense Interface
App 20140167789 - Cagdaser; Baris ; et al. | 2014-06-19 |
Extension-mode Angular Velocity Sensor
App 20140047921 - SEEGER; Joseph ; et al. | 2014-02-20 |
Micromachined Gyroscope Including A Guided Mass System
App 20140026662 - ANAC; Ozan ; et al. | 2014-01-30 |
Integrated MEMS device and method of use
Grant 8,567,246 - Shaeffer , et al. October 29, 2 | 2013-10-29 |
Internal electrical contact for enclosed MEMS devices
Grant 8,564,076 - Huang , et al. October 22, 2 | 2013-10-22 |
Low inertia frame for detecting coriolis acceleration
Grant 8,539,835 - Seeger , et al. September 24, 2 | 2013-09-24 |
Extension-mode angular velocity sensor
Grant 8,534,127 - Seeger , et al. September 17, 2 | 2013-09-17 |
Gyroscope Self Test By Applying Rotation On Coriolis Sense Mass
App 20130233048 - Anac; Ozan ; et al. | 2013-09-12 |
Micromachined Gyroscope Including A Guided Mass System
App 20130068018 - SEEGER; Joseph ; et al. | 2013-03-21 |
Selectable Communication Interface Configurations For Motion Sensing Device
App 20130069866 - ARIA; Behrad ; et al. | 2013-03-21 |
Micromachined magnetic field sensors
Grant 8,395,381 - Lo , et al. March 12, 2 | 2013-03-12 |
Extension-mode angular velocity sensor
Grant 8,347,717 - Seeger , et al. January 8, 2 | 2013-01-08 |
Process For A Sealed Mems Device With A Portion Exposed To The Environment
App 20130001710 - DANEMAN; Michael J. ; et al. | 2013-01-03 |
Hermetically Sealed Mems Device With A Portion Exposed To The Environment With Vertically Integrated Electronics
App 20130001550 - SEEGER; Joseph ; et al. | 2013-01-03 |
Extension-mode Angular Velocity Sensor
App 20120291549 - SEEGER; Joseph ; et al. | 2012-11-22 |
Selectable communication interface configurations for motion sensing device
Grant 8,310,380 - Aria , et al. November 13, 2 | 2012-11-13 |
High-voltage Mems Apparatus And Method
App 20120242400 - SHAEFFER; Derek ; et al. | 2012-09-27 |
Low Inertia Frame For Detecting Coriolis Acceleration
App 20120216612 - SEEGER; Joseph ; et al. | 2012-08-30 |
Method And System For Using A Mems Structure As A Timing Source
App 20120200362 - SEEGER; Joseph ; et al. | 2012-08-09 |
Micromachined Resonant Magnetic Field Sensors
App 20120176129 - SEEGER; Joseph ; et al. | 2012-07-12 |
Micromachined Resonant Magnetic Field Sensors
App 20120176128 - SEEGER; Joseph ; et al. | 2012-07-12 |
Mems Device With Improved Spring System
App 20120125101 - SEEGER; Joseph ; et al. | 2012-05-24 |
Method and system for using a MEMS structure as a timing source
Grant 8,183,944 - Seeger , et al. May 22, 2 | 2012-05-22 |
Integrated Mems Device And Method Of Use
App 20120086446 - SHAEFFER; Derek ; et al. | 2012-04-12 |
Low inertia frame for detecting coriolis acceleration
Grant 8,141,424 - Seeger , et al. March 27, 2 | 2012-03-27 |
Micromachined Offset Reduction Structures For Magnetic Field Sensing
App 20120007597 - Seeger; Joseph ; et al. | 2012-01-12 |
Micromachined Magnetic Field Sensors
App 20120007598 - Lo; Chiung C. ; et al. | 2012-01-12 |
X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
Grant 8,069,726 - Seeger , et al. December 6, 2 | 2011-12-06 |
Vertically integrated 3-axis MEMS accelerometer with electronics
Grant 8,047,075 - Nasiri , et al. November 1, 2 | 2011-11-01 |
Dual mode sensing for vibratory gyroscope
Grant 8,020,441 - Seeger September 20, 2 | 2011-09-20 |
Selectable Communication Interface Configurations For Motion Sensing Device
App 20110215952 - ARIA; Behrad ; et al. | 2011-09-08 |
Vertically Integrated 3-axis Mems Angular Accelerometer With Integrated Electronics
App 20110197677 - NASIRI; Steven S. ; et al. | 2011-08-18 |
Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
Grant 7,934,423 - Nasiri , et al. May 3, 2 | 2011-05-03 |
Extension -mode Angular Velocity Sensor
App 20110061460 - SEEGER; JOSEPH ; et al. | 2011-03-17 |
Performance-enhancing two-sided MEMS anchor design for vertically integrated micromachined devices
Grant 7,863,698 - Seeger , et al. January 4, 2 | 2011-01-04 |
Method And System For Using A Mems Structure As A Timing Source
App 20100253437 - SEEGER; Joseph ; et al. | 2010-10-07 |
Performance-enhancing Two-sided Mems Anchor Design For Vertically Integrated Micromachined Devices
App 20100252897 - SEEGER; Joseph ; et al. | 2010-10-07 |
X-y Axis Dual-mass Tuning Fork Gyroscope With Vertically Integrated Electronics And Wafer-scale Hermetic Packaging
App 20100132460 - SEEGER; Joseph ; et al. | 2010-06-03 |
Integrated Multiaxis Motion Sensor
App 20100071467 - NASIRI; STEVE ; et al. | 2010-03-25 |
Low Inertia Frame For Detecting Coriolis Acceleration
App 20100064805 - Seeger; Joseph ; et al. | 2010-03-18 |
X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
Grant 7,621,183 - Seeger , et al. November 24, 2 | 2009-11-24 |
Dual Mode Sensing For Vibratory Gyroscope
App 20090193892 - SEEGER; Joseph | 2009-08-06 |
Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
App 20090145225 - NASIRI; Steven S. ; et al. | 2009-06-11 |
Vertically Integrated 3-axis Mems Accelerometer With Electronics
App 20080314147 - Nasiri; Steven S. ; et al. | 2008-12-25 |
Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
Grant 7,458,263 - Nasiri , et al. December 2, 2 | 2008-12-02 |
X-y Axis Dual-mass Tuning Fork Gyroscope With Vertically Integrated Electronics And Wafer-scale Hermetic Packaging
App 20080115579 - SEEGER; Joseph ; et al. | 2008-05-22 |
Method and apparatus for electronic cancellation of quadrature error
Grant 7,290,435 - Seeger , et al. November 6, 2 | 2007-11-06 |
Multiple axis accelerometer
Grant 7,258,011 - Nasiri , et al. August 21, 2 | 2007-08-21 |
Method and apparatus for electronic cancellation of quadrature error
App 20070180908 - Seeger; Joseph ; et al. | 2007-08-09 |
Multiple axis accelerometer
App 20070113653 - Nasiri; Steven S. ; et al. | 2007-05-24 |
Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
App 20060219006 - Nasiri; Steven S. ; et al. | 2006-10-05 |
X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
Grant 6,892,575 - Nasiri , et al. May 17, 2 | 2005-05-17 |
X-y Axis Dual-mass Tuning Fork Gyroscope With Vertically Integrated Electronics And Wafer-scale Hermetic Packaging
App 20050081633 - Nasiri, Steven S. ; et al. | 2005-04-21 |
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