Seamons; Martin

Patent Applications and Registrations

Patent applications and USPTO patent grants for Seamons; Martin.The latest application filed is for "gas delivery systems and methods".

Company Profile

0.5.5

Seamons; Martin - San Jose CA
Seamons; Martin - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Gas Delivery Systems And Methods App 20210143029 - Kedlaya; Diwakar ; et al.	2021-05-13
Low Refractive Index Coating Deposited By Remote Plasma Cvd App 20140091417 - TANG; Sum-Yee Betty ; et al.	2014-04-03
Fluorocarbon Coating Having Low Refractive Index App 20140091379 - TANG; Sum-Yee Betty ; et al.	2014-04-03
Enhanced remote plasma cleaning Grant 6,868,856 - Nowak , et al. March 22, 2	2005-03-22
Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber Grant 6,843,881 - Kim , et al. January 18, 2	2005-01-18
Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber App 20030185966 - Kim, Bok Hoen ; et al.	2003-10-02
Enhanced remote plasma cleaning App 20030010355 - Nowak, Thomas ; et al.	2003-01-16
Method and apparatus for reducing particle contamination on wafer backside during CVD process Grant 6,413,321 - Kim , et al. July 2, 2	2002-07-02
Gas chemistry for improved in-situ cleaning of residue for a CVD apparatus Grant 6,060,397 - Seamons , et al. May 9, 2	2000-05-09
Chamber monitoring and adjustment by plasma RF metrology Grant 6,051,284 - Byrne , et al. April 18, 2	2000-04-18

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