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Patent applications and USPTO patent grants for SCULLIN; Paul.The latest application filed is for "apparatus and method for sensing rf signals from rf plasma processing equipment".
Patent | Date |
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Apparatus And Method For Sensing Rf Signals From Rf Plasma Processing Equipment App 20220196558 - HOPKINS; Michael ;   et al. | 2022-06-23 |
Apparatus For Ion Energy Analysis Of Plasma Processes App 20220157581 - SCULLIN; Paul ;   et al. | 2022-05-19 |
Apparatus For Ion Energy Analysis Of Plasma Processes App 20220076933 - SCULLIN; Paul ;   et al. | 2022-03-10 |
Sensing of plasma process parameters Grant 9,263,236 - Scullin , et al. February 16, 2 | 2016-02-16 |
Analysing Rf Signals From A Plasma System App 20150276833 - Scullin; Paul ;   et al. | 2015-10-01 |
Sensing Of Plasma Process Parameters App 20130056155 - Scullin; Paul ;   et al. | 2013-03-07 |
Sensor For Measuring Plasma Parameters App 20120232817 - O'Sullivan; Donal ;   et al. | 2012-09-13 |
Method and system for detecting electrical arcing in a plasma process powered by an AC source App 20050212450 - Martinez, Francisco ;   et al. | 2005-09-29 |
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