loadpatents
Patent applications and USPTO patent grants for Schweitzer; Marc O..The latest application filed is for "fabricating and cleaning chamber components having textured surfaces".
Patent | Date |
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Apparatus, method and computer program product for modifying a surface of a component Grant 8,073,572 - Schweitzer December 6, 2 | 2011-12-06 |
Fabricating and cleaning chamber components having textured surfaces Grant 7,993,470 - West , et al. August 9, 2 | 2011-08-09 |
Fabricating and cleaning chamber components having textured surfaces App 20090120462 - West; Brian T. ;   et al. | 2009-05-14 |
Apparatus, Method And Computer Program Product For Modifying A Surface Of A Component App 20080248719 - Schweitzer; Marc O. | 2008-10-09 |
Motorized chamber lid Grant 7,371,285 - Rosenstein , et al. May 13, 2 | 2008-05-13 |
Fabricating And Cleaning Chamber Components Having Textured Surfaces App 20080038481 - West; Brian T. ;   et al. | 2008-02-14 |
Method and apparatus for controlling darkspace gap in a chamber Grant 7,097,744 - Liu , et al. August 29, 2 | 2006-08-29 |
End point detection for sputtering and resputtering Grant 7,048,837 - Somekh , et al. May 23, 2 | 2006-05-23 |
Method of surface texturizing Grant 6,933,508 - Popiolkowski , et al. August 23, 2 | 2005-08-23 |
End point detection for sputtering and resputtering App 20050173239 - Somekh, Sasson R. ;   et al. | 2005-08-11 |
Fabricating and cleaning chamber components having textured surfaces App 20050048876 - West, Brian T. ;   et al. | 2005-03-03 |
Method and apparatus for controlling darkspace gap in a chamber App 20040251130 - Liu, Alan Barry ;   et al. | 2004-12-16 |
Method for detecting the position of a shutter disk in a physical vapor deposition chamber Grant 6,827,825 - Feltsman , et al. December 7, 2 | 2004-12-07 |
Method of surface texturizing Grant 6,812,471 - Popiolkowski , et al. November 2, 2 | 2004-11-02 |
Motorized chamber lid App 20040173162 - Rosenstein, Michael ;   et al. | 2004-09-09 |
Motorized chamber lid Grant 6,776,848 - Rosenstein , et al. August 17, 2 | 2004-08-17 |
Method for detecting the position of a shutter disk in a physical vapor deposition chamber App 20040089536 - Feltsman, Michael ;   et al. | 2004-05-13 |
Method of surface texturizing App 20040056211 - Popiolkowski, Alan R. ;   et al. | 2004-03-25 |
Shutter disk and blade alignment sensor Grant 6,669,829 - Feltsman , et al. December 30, 2 | 2003-12-30 |
Method of surface texturizing App 20030173526 - Popiolkowski, Alan R. ;   et al. | 2003-09-18 |
Shutter disk and blade alignment sensor App 20030155234 - Feltsman, Michael ;   et al. | 2003-08-21 |
Motorized chamber lid App 20030131794 - Rosenstein, Michael ;   et al. | 2003-07-17 |
Adjustable throw reactor App 20030116432 - Schweitzer, Marc O. ;   et al. | 2003-06-26 |
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