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Semiconductor Power Device And Method Of Manufacturing The Same App 20220254892 - Bhandari; Jyotshna ;   et al. | 2022-08-11 |
Method for producing a superjunction device Grant 11,342,187 - Mauder , et al. May 24, 2 | 2022-05-24 |
Apparatus and method for neutron transmutation doping of semiconductor wafers Grant 11,250,966 - Bina , et al. February 15, 2 | 2022-02-15 |
Method For Manufacturing A Semiconductor Device App 20220029013 - Mauder; Anton ;   et al. | 2022-01-27 |
Ion implantation method, ion implantation apparatus and semiconductor device Grant 11,195,695 - Jelinek , et al. December 7, 2 | 2021-12-07 |
Semiconductor device and method for manufacturing a semiconductor device Grant 11,171,230 - Mauder , et al. November 9, 2 | 2021-11-09 |
Method of manufacturing a semiconductor device by using ion beam technique Grant 11,043,384 - Jelinek , et al. June 22, 2 | 2021-06-22 |
Methods For Processing A Semiconductor Substrate App 20210159115 - SCHUSTEREDER; Werner ;   et al. | 2021-05-27 |
Semiconductor devices with steep junctions and methods of manufacturing thereof Grant 10,998,402 - Breymesser , et al. May 4, 2 | 2021-05-04 |
Methods for processing a silicon carbide wafer, and a silicon carbide semiconductor device Grant 10,903,078 - Schulze , et al. January 26, 2 | 2021-01-26 |
Silicon Carbide Device with Compensation Layer and Method of Manufacturing App 20210013310 - Leendertz; Caspar ;   et al. | 2021-01-14 |
Silicon Carbide Device With Compensation Region And Method Of Manufacturing App 20200381253 - SCHULZE; Hans-Joachim ;   et al. | 2020-12-03 |
Method for Producing a Superjunction Device App 20200243340 - Mauder; Anton ;   et al. | 2020-07-30 |
Vertical transistor with trench gate insulator having varying thickness Grant 10,679,857 - Laven , et al. | 2020-06-09 |
Method for producing a superjunction device Grant 10,679,855 - Mauder , et al. | 2020-06-09 |
Apparatus and method for ion implantation Grant 10,622,268 - Laven , et al. | 2020-04-14 |
Semiconductor device having a device doping region of an electrical device arrangement Grant 10,615,039 - Laven , et al. | 2020-04-07 |
Method of reducing a sheet resistance in an electronic device, and an electronic device Grant 10,573,533 - Fuergut , et al. Feb | 2020-02-25 |
SiC-based superjunction semiconductor device Grant 10,541,301 - Schulze , et al. Ja | 2020-01-21 |
Semiconductor device having a variable carbon concentration Grant 10,529,838 - Schulze , et al. J | 2020-01-07 |
Apparatus And Method For Neutron Transmutation Doping Of Semiconductor Wafers App 20200005957 - BINA; Markus ;   et al. | 2020-01-02 |
Semiconductor Device and Method of Manufacturing a Semiconductor Device App 20190385852 - Jelinek; Moriz ;   et al. | 2019-12-19 |
Semiconductor Devices With Steep Junctions And Methods Of Manufacturing Thereof App 20190378895 - Breymesser; Alexander ;   et al. | 2019-12-12 |
Methods for Processing a Silicon Carbide Wafer, and a Silicon Carbide Semiconductor Device App 20190362972 - Schulze; Hans-Joachim ;   et al. | 2019-11-28 |
Semiconductor devices with steep junctions and methods of manufacturing thereof Grant 10,475,881 - Breymesser , et al. Nov | 2019-11-12 |
Apparatus and method for neutron transmutation doping of semiconductor wafers Grant 10,468,148 - Bina , et al. No | 2019-11-05 |
Methods For Forming A Semiconductor Device Using Tilted Reactive Ion Beam App 20190295848 - Laven; Johannes Georg ;   et al. | 2019-09-26 |
Methods for forming a semiconductor device using tilted reactive ion beam Grant 10,366,895 - Laven , et al. July 30, 2 | 2019-07-30 |
Forming recombination centers in a semiconductor device Grant 10,347,491 - Jantscher , et al. July 9, 2 | 2019-07-09 |
Method and assembly for determining the carbon content in silicon Grant 10,317,338 - Ganagona , et al. | 2019-06-11 |
Semiconductor Device and Method for Manufacturing a Semiconductor Device App 20190123193 - Mauder; Anton ;   et al. | 2019-04-25 |
Ion Implantation Method, Ion Implantation Apparatus and Semiconductor Device App 20190066977 - Jelinek; Moriz ;   et al. | 2019-02-28 |
Ion Implantation Apparatus and Method of Manufacturing Semiconductor Devices App 20190051488 - Schustereder; Werner ;   et al. | 2019-02-14 |
Method for Producing a Superjunction Device App 20190051529 - Mauder; Anton ;   et al. | 2019-02-14 |
Semiconductor device containing oxygen-related thermal donors Grant 10,192,955 - Laven , et al. Ja | 2019-01-29 |
Method Of Reducing A Sheet Resistance In An Electronic Device, And An Electronic Device App 20190013210 - Fuergut; Edward ;   et al. | 2019-01-10 |
Method of manufacturing semiconductor devices and semiconductor device containing hydrogen-related donors Grant 10,128,328 - Jelinek , et al. November 13, 2 | 2018-11-13 |
Apparatus And Method For Neutron Transmutation Doping Of Semiconductor Wafers App 20180308698 - Bina; Markus ;   et al. | 2018-10-25 |
Method for producing a superjunction device Grant 10,109,489 - Mauder , et al. October 23, 2 | 2018-10-23 |
Methods for forming a semiconductor device and a semiconductor device Grant 10,096,677 - Jelinek , et al. October 9, 2 | 2018-10-09 |
Forming electrode trenches by using a directed ion beam and semiconductor device with trench electrode structures Grant 10,083,835 - Laven , et al. September 25, 2 | 2018-09-25 |
Semiconductor wafer, implantation apparatus for implanting protons and method for forming a semiconductor device Grant 10,074,715 - Schustereder , et al. September 11, 2 | 2018-09-11 |
Semiconductor Device Having a Device Doping Region of an Electrical Device Arrangement App 20180240672 - Laven; Johannes Georg ;   et al. | 2018-08-23 |
Method for implanting ions into a semiconductor substrate and an implantation system Grant 10,037,887 - Brugger , et al. July 31, 2 | 2018-07-31 |
Forming Recombination Centers in a Semiconductor Device App 20180182629 - Jantscher; Wolfgang ;   et al. | 2018-06-28 |
Forming a contact layer on a semiconductor body Grant 10,002,930 - Rupp , et al. June 19, 2 | 2018-06-19 |
SiC-Based Superjunction Semiconductor Device App 20180138266 - Schulze; Hans-Joachim ;   et al. | 2018-05-17 |
Method for forming a semiconductor device and a semiconductor device Grant 9,972,704 - Jelinek , et al. May 15, 2 | 2018-05-15 |
Method of Manufacturing Semiconductor Devices and Semiconductor Device Containing Hydrogen-Related Donors App 20180122895 - Jelinek; Moriz ;   et al. | 2018-05-03 |
Semiconductor device and methods for forming a semiconductor device Grant 9,960,044 - Laven , et al. May 1, 2 | 2018-05-01 |
Semiconductor Device Having a Variable Carbon Concentration App 20180102423 - Schulze; Hans-Joachim ;   et al. | 2018-04-12 |
Method for processing a silicon wafer Grant 9,934,988 - Schustereder , et al. April 3, 2 | 2018-04-03 |
Method And Assembly For Determining The Carbon Content In Silicon App 20180088042 - GANAGONA; Naveen Goud ;   et al. | 2018-03-29 |
Methods For Forming A Semiconductor Device And Semiconductor Devices App 20180061644 - Laven; Johannes Georg ;   et al. | 2018-03-01 |
Semiconductor Devices with Steep Junctions and Methods of Manufacturing Thereof App 20180040691 - Breymesser; Alexander ;   et al. | 2018-02-08 |
Method for Producing a Superjunction Device App 20180019132 - Mauder; Anton ;   et al. | 2018-01-18 |
Method of Manufacturing Semiconductor Devices and Semiconductor Device Containing Oxygen-Related Thermal Donors App 20180019306 - Laven; Johannes Georg ;   et al. | 2018-01-18 |
Forming Electrode Trenches By Using A Directed Ion Beam And Semiconductor Device With Trench Electrode Structures App 20180005830 - Laven; Johannes Georg ;   et al. | 2018-01-04 |
SiC-based superjunction semiconductor device Grant 9,859,361 - Schulze , et al. January 2, 2 | 2018-01-02 |
Method of manufacturing semiconductor devices and semiconductor device containing oxygen-related thermal donors Grant 9,825,131 - Laven , et al. November 21, 2 | 2017-11-21 |
Ion implantation apparatus with ion beam directing unit Grant 9,809,877 - Breymesser , et al. November 7, 2 | 2017-11-07 |
Transistor with field electrodes and improved avalanche breakdown behavior Grant 9,812,563 - Siemieniec , et al. November 7, 2 | 2017-11-07 |
Method for Implanting Ions into a Semiconductor Substrate and an Implantation System App 20170243747 - Brugger; Michael ;   et al. | 2017-08-24 |
Method for Processing a Silicon Wafer App 20170170028 - Schustereder; Werner ;   et al. | 2017-06-15 |
Apparatus and Method for Ion Implantation App 20170162459 - Laven; Johannes Georg ;   et al. | 2017-06-08 |
Forming a Contact Layer on a Semiconductor Body App 20170162390 - Rupp; Roland ;   et al. | 2017-06-08 |
Method of manufacturing semiconductor devices using light ion implantation and semiconductor device Grant 9,634,086 - Jelinek , et al. April 25, 2 | 2017-04-25 |
Semiconductor Device and Methods for Forming a Semiconductor Device App 20170110322 - Laven; Johannes Georg ;   et al. | 2017-04-20 |
Method for producing a semiconductor Grant 9,627,209 - Schulze , et al. April 18, 2 | 2017-04-18 |
Method for forming a semiconductor device Grant 9,613,805 - Schustereder , et al. April 4, 2 | 2017-04-04 |
Semiconductor Wafer, Implantation Apparatus for Implanting Protons and Method for Forming a Semiconductor Device App 20170069712 - Schustereder; Werner ;   et al. | 2017-03-09 |
Semiconductor device with a semiconductor body containing hydrogen-related donors Grant 9,564,495 - Laven , et al. February 7, 2 | 2017-02-07 |
Laser thermal annealing of deep doped region using structured antireflective coating Grant 9,558,948 - Breymesser , et al. January 31, 2 | 2017-01-31 |
Methods for Forming a Semiconductor Device and a Semiconductor Device App 20160372329 - Jelinek; Moriz ;   et al. | 2016-12-22 |
Transistor with Field Electrodes and Improved Avalanche Breakdown Behavior App 20160365441 - Siemieniec; Ralf ;   et al. | 2016-12-15 |
Method of reducing a sheet resistance in an electronic device, and an electronic device App 20160336226 - FUERGUT; Edward ;   et al. | 2016-11-17 |
Method of Manufacturing Semiconductor Devices and Semiconductor Device Containing Oxygen-Related Thermal Donors App 20160329401 - Laven; Johannes Georg ;   et al. | 2016-11-10 |
Ion Source for Metal Implantation and Methods Thereof App 20160322198 - Wiltsche; Ewald ;   et al. | 2016-11-03 |
Ion Implantation Apparatus with Ion Beam Directing Unit App 20160305012 - Breymesser; Alexander ;   et al. | 2016-10-20 |
SiC-Based Superjunction Semiconductor Device App 20160233295 - Schulze; Hans-Joachim ;   et al. | 2016-08-11 |
Semiconductor component having a dopant region formed by a dopant composed of an oxygen/vacancy complex Grant 9,412,824 - Neidhart , et al. August 9, 2 | 2016-08-09 |
Method For Producing A Semiconductor App 20160225626 - Schulze; Hans-Joachim ;   et al. | 2016-08-04 |
Semiconductor Device with a Semiconductor Body Containing Hydrogen-Related Donors App 20160211336 - Laven; Johannes Georg ;   et al. | 2016-07-21 |
Implantation apparatus with ion beam directing unit, semiconductor device and method of manufacturing Grant 9,390,883 - Breymesser , et al. July 12, 2 | 2016-07-12 |
Method of Manufacturing Semiconductor Devices using Light Ion Implantation and Semiconductor Device App 20160172438 - Jelinek; Moriz ;   et al. | 2016-06-16 |
Adjusting the charge carrier lifetime in a bipolar semiconductor device Grant 9,349,799 - Schmidt , et al. May 24, 2 | 2016-05-24 |
Method of manufacturing semiconductor devices including generating and annealing radiation-induced crystal defects Grant 9,312,135 - Laven , et al. April 12, 2 | 2016-04-12 |
Method for producing a semiconductor Grant 9,293,330 - Schulze , et al. March 22, 2 | 2016-03-22 |
Adjusting the Charge Carrier Lifetime in a Bipolar Semiconductor Device App 20160049474 - Schmidt; Gerhard ;   et al. | 2016-02-18 |
Method of Manufacturing Semiconductor Devices Including Generating and Annealing Radiation-Induced Crystal Defects App 20150270132 - Laven; Johannes Georg ;   et al. | 2015-09-24 |
Implantation Apparatus with Ion Beam Directing Unit, Semiconductor Device and Method of Manufacturing App 20150228446 - Breymesser; Alexander ;   et al. | 2015-08-13 |
Super junction semiconductor device Grant 9,105,487 - Schulze , et al. August 11, 2 | 2015-08-11 |
Semiconductor Component Having A Dopant Region Formed By A Dopant Composed Of An Oxygen / Vacancy Complex App 20150123247 - Neidhart; Thomas ;   et al. | 2015-05-07 |
Method of manufacturing a semiconductor device including proton irradiation and semiconductor device including charge compensation structure Grant 9,012,980 - Schulze , et al. April 21, 2 | 2015-04-21 |
Method For Producing A Semiconductor App 20150064890 - Schulze; Hans-Joachim ;   et al. | 2015-03-05 |
Semiconductor component comprising a dopant region in a semiconductor body and a method for producing a dopant region in a semiconductor body Grant 8,859,409 - Neidhart , et al. October 14, 2 | 2014-10-14 |
Super Junction Semiconductor Device App 20140175593 - Schulze; Hans-Joachim ;   et al. | 2014-06-26 |
Method of manufacturing semiconductor devices using ion implantation Grant 8,710,620 - Schulze , et al. April 29, 2 | 2014-04-29 |
Method of Manufacturing Semiconductor Devices Using Ion Implantation App 20140021590 - Schulze; Hans-Joachim ;   et al. | 2014-01-23 |
Semiconductor Component Comprising A Dopant Region In A Semiconductor Body And A Method For Producing A Dopant Region In A Semiconductor Body App 20130249058 - Neidhart; Thomas ;   et al. | 2013-09-26 |