loadpatents
Patent applications and USPTO patent grants for Schumaker; Norman E..The latest application filed is for "step and repeat imprint lithography process".
Patent | Date |
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Step and repeat imprint lithography process Grant 8,318,066 - Sreenivasan , et al. November 27, 2 | 2012-11-27 |
Step and Repeat Imprint Lithography Process App 20110221095 - Sreenivasan; Sidlgata V. ;   et al. | 2011-09-15 |
Step and repeat imprint lithography processes Grant 7,943,081 - Sreenivasan , et al. May 17, 2 | 2011-05-17 |
Step and Repeat Imprint Lithography Processes App 20100201042 - Sreenivasan; Sidlgata V. ;   et al. | 2010-08-12 |
Step and repeat imprint lithography processes Grant 7,727,453 - Sreenivasan , et al. June 1, 2 | 2010-06-01 |
Method of separating a mold from a solidified layer disposed on a substrate Grant 7,635,445 - Choi , et al. December 22, 2 | 2009-12-22 |
Applying imprinting material to substrates employing electromagnetic fields Grant 7,261,830 - Cherala , et al. August 28, 2 | 2007-08-28 |
Imprint lithography substrate processing tool for modulating shapes of substrates Grant 7,224,443 - Choi , et al. May 29, 2 | 2007-05-29 |
Chucking system for modulating shapes of substrates App 20060176466 - Choi; Byung J. ;   et al. | 2006-08-10 |
Method of separating a mold from a solidified layer disposed on a substrate App 20060172549 - Choi; Byung-Jin ;   et al. | 2006-08-03 |
Step and repeat imprint lithography processes Grant 7,077,992 - Sreenivasan , et al. July 18, 2 | 2006-07-18 |
Alignment systems for imprint lithography Grant 7,070,405 - Sreenivasan , et al. July 4, 2 | 2006-07-04 |
Step and repeat imprint lithography systems App 20060077374 - Sreenivasan; Sidlgata V. ;   et al. | 2006-04-13 |
Step and repeat imprint lithography processes App 20060076717 - Sreenivasan; Sidlgata V. ;   et al. | 2006-04-13 |
Chucking system for modulating shapes of substrates Grant 7,019,819 - Choi , et al. March 28, 2 | 2006-03-28 |
Chucking system for modulating shapes of substrates Grant 6,982,783 - Choi , et al. January 3, 2 | 2006-01-03 |
Method for modulating shapes of substrates Grant 6,980,282 - Choi , et al. December 27, 2 | 2005-12-27 |
Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing App 20050270312 - Lad, Pankaj B. ;   et al. | 2005-12-08 |
Step and repeat imprint lithography systems Grant 6,900,881 - Sreenivasan , et al. May 31, 2 | 2005-05-31 |
Applying imprinting material to substrates employing electromagnetic fields App 20050082253 - Cherala, Anshuman ;   et al. | 2005-04-21 |
Chucking system for modulating shapes of substrates App 20040223131 - Choi, Byung J. ;   et al. | 2004-11-11 |
Method for modulating shapes of substrates App 20040112861 - Choi, Byung J. ;   et al. | 2004-06-17 |
Chucking system for modulating shapes of substrates App 20040090611 - Choi, Byung J. ;   et al. | 2004-05-13 |
Alignment systems for imprint lithography App 20040022888 - Sreenivasan, Sidlgata V. ;   et al. | 2004-02-05 |
Step and repeat imprint lithography systems App 20040008334 - Sreenivasan, Sidlgata V. ;   et al. | 2004-01-15 |
Gas treatment apparatus and method Grant 4,838,983 - Schumaker , et al. * June 13, 1 | 1989-06-13 |
Gas treatment apparatus and method Grant 4,772,356 - Schumaker , et al. September 20, 1 | 1988-09-20 |
Light emitting semiconductor devices Grant 4,313,125 - Hartman , et al. January 26, 1 | 1982-01-26 |
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