Patent | Date |
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Modular Switch Apparatus For Controlling At Least One Electric Drive App 20220139659 - HANSMEIER; Stephan ;   et al. | 2022-05-05 |
Switching Device For Safely Disconnecting An Electrical Load From A Power Supply Network And A Safety Switching System App 20220006291 - SCHAPER; Elmar ;   et al. | 2022-01-06 |
Valve for Pressure Compensation and/or for Emergency Venting of a Container, in Particular of a Container of a Battery of an Electric Vehicle, as well as Container with such a Valve App 20210127511 - Schulz; Bernd ;   et al. | 2021-04-29 |
Method and device for controlling an electrical or electronic switching element Grant 10,298,218 - Heuer , et al. | 2019-05-21 |
Switching Device And System For Switching On And Off An Electrical Load App 20190074146 - KORREK; Andre ;   et al. | 2019-03-07 |
Method and Device for Controlling an Electrical or Electronic Switching Element App 20170155250 - Heuer; Lutz ;   et al. | 2017-06-01 |
Electrical apparatus for the short-circuit protection of a three-phase load in a three-phase system Grant 9,300,126 - Schaper , et al. March 29, 2 | 2016-03-29 |
Automatic Circuit Breaker With Auxiliary Short Circuit App 20150348734 - Schaper; Elmar ;   et al. | 2015-12-03 |
Electrical Apparatus For The Short-circuit Protection Of A Three-phase Load In A Three-phase System App 20140071574 - Schaper; Elmar ;   et al. | 2014-03-13 |
Use of aqueous guanidinium formate solutions for the selective catalytic reduction of nitrogen oxides in exhaust gases of vehicles Grant 8,652,426 - Hammer , et al. February 18, 2 | 2014-02-18 |
Method and device for the detection of current asymmetries in three-phase circuits Grant 8,531,179 - Hawel , et al. September 10, 2 | 2013-09-10 |
Method And Device For The Detection Of Current Asymmetries In Three-phase Circuits App 20120056613 - HAWEL; DANIEL ;   et al. | 2012-03-08 |
Method for the selective catalytic reduction of nitrogen oxides in exhaust gases of vehicles Grant 8,048,390 - Hammer , et al. November 1, 2 | 2011-11-01 |
Use Of Aqueous Guanidinium Formate Solutions For The Selective Catalytic Reduction Of Nitrogen Oxides In Exhaust Gases Of Vehicles App 20110008228 - Hammer; Benedikt ;   et al. | 2011-01-13 |
Method and system for reducing overlay errors within exposure fields by APC control strategies Grant 7,842,442 - Seltmann , et al. November 30, 2 | 2010-11-30 |
Method for the Selective Catalytic Reduction of Nitrogen Oxides in Exhaust Gases of Vehicles App 20100047144 - Hammer; Benedikt ;   et al. | 2010-02-25 |
Structure and method for simultaneously determining an overlay accuracy and pattern placement error Grant 7,667,842 - Schulz February 23, 2 | 2010-02-23 |
Structure and method for determining an overlay accuracy Grant 7,666,559 - Schulz February 23, 2 | 2010-02-23 |
Structure And Method For Determining An Overlay Accuracy App 20090087756 - Schulz; Bernd | 2009-04-02 |
Method And Apparatus For Generating Metrology Tags To Allow Automatic Metrology Recipe Generation App 20090082897 - Cain; Jason P. ;   et al. | 2009-03-26 |
Method And System For Reducing Overlay Errors Within Exposure Fields By Apc Control Strategies App 20080057418 - Seltmann; Rolf ;   et al. | 2008-03-06 |
Structure And Method For Simultaneously Determining An Overlay Accuracy And Pattern Placement Error App 20070076205 - SCHULZ; BERND | 2007-04-05 |
Two-dimensional structure for determining an overlay accuracy by means of scatterometry Grant 7,099,010 - Schulz August 29, 2 | 2006-08-29 |
Apparatus for determining an overlay error and critical dimensions in a semiconductor structure by means of scatterometry Grant 6,816,252 - Schulz November 9, 2 | 2004-11-09 |
Scatterometer including an internal calibration system Grant 6,795,193 - Schulz September 21, 2 | 2004-09-21 |
Semiconductor structure and method for determining critical dimensions and overlay error Grant 6,767,680 - Schulz July 27, 2 | 2004-07-27 |
Semiconductor structure and method for determining critical dimensions and overlay error Grant 6,765,282 - Schulz July 20, 2 | 2004-07-20 |
Die corner alignment structure Grant 6,724,096 - Werner , et al. April 20, 2 | 2004-04-20 |
Scatterometer including an internal calibration system App 20030223072 - Schulz, Bernd | 2003-12-04 |
Two-dimensional structure for determining an overlay accuracy by means of scatterometry App 20030224261 - Schulz, Bernd | 2003-12-04 |
Bearing arrangement for tension forces and bearing head therefor Grant 6,622,579 - Muth , et al. September 23, 2 | 2003-09-23 |
Semiconductor structure and method for determining critical dimensions and overlay error App 20030042579 - Schulz, Bernd | 2003-03-06 |
Apparatus for determining an overlay error and critical dimensions in a semiconductor structure by means of scatterometry App 20030043372 - Schulz, Bernd | 2003-03-06 |
Semiconductor structure and method for determining critical dimensions and overlay error App 20030044702 - Schulz, Bernd | 2003-03-06 |
Die corner alignment structure App 20020185753 - Werner, Thomas ;   et al. | 2002-12-12 |
Aerostatic bearing and method of manufacturing an aerostatic bearing Grant 5,645,354 - Heinzl , et al. July 8, 1 | 1997-07-08 |