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Method and configuration for reinforcement of a dielectric layer at defects by self-aligning and self-limiting electrochemical conversion of a substrate material Grant 7,176,514 - Hecht , et al. February 13, 2 | 2007-02-13 |
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Coating process for patterned substrate surfaces App 20050277295 - Hecht, Thomas ;   et al. | 2005-12-15 |
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Method for fabricating microchips using metal oxide masks App 20050181557 - Jakschik, Stefan ;   et al. | 2005-08-18 |
Process for vertically patterning substrates in semiconductor process technology by means of inconformal deposition App 20050164464 - Hecht, Thomas ;   et al. | 2005-07-28 |
Method for determining the depth of a buried structure App 20050003642 - Hecht, Thomas ;   et al. | 2005-01-06 |
Method of fabricating a trench-structure capacitor device Grant 6,693,016 - Gutsche , et al. February 17, 2 | 2004-02-17 |
Method for patterning ceramic layers App 20040029343 - Seidl, Harald ;   et al. | 2004-02-12 |
Method and configuration for reinforcement of a dielectric layer at defects by self-aligning and self-limiting electrochemical conversion of a substrate material App 20030224584 - Hecht, Thomas ;   et al. | 2003-12-04 |
Method for improving a doping profile for gas phase doping Grant 6,645,839 - Haupt , et al. November 11, 2 | 2003-11-11 |
Method of fabricating a trench-structure capacitor device App 20030045068 - Gutsche, Martin ;   et al. | 2003-03-06 |
Method for improving a doping profile for gas phase doping App 20030013283 - Haupt, Moritz ;   et al. | 2003-01-16 |