Schriever; Martin

Patent Applications and Registrations

Patent applications and USPTO patent grants for Schriever; Martin.The latest application filed is for "measuring system for measuring an imaging quality of an euv lens".

Company Profile

0.20.26

Schriever; Martin - Aalen DE
Schriever; Martin - Buchen-Hainstadt DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Measuring system for measuring an imaging quality of an EUV lens Grant 9,494,483 - Frese , et al. November 15, 2	2016-11-15
Measuring System for Measuring an Imaging Quality of an EUV Lens App 20150009492 - Frese; Ralf ; et al.	2015-01-08
Device and method for the optical measurement of an optical system by using an immersion fluid Grant 8,836,929 - Wegmann , et al. September 16, 2	2014-09-16
Device And Method For The Optical Measurement Of An Optical System By Using An Immersion Fluid App 20140022524 - Wegmann; Ulrich ; et al.	2014-01-23
Device And Method For The Optical Measurement Of An Optical System By Using An Immersion Fluid App 20120113429 - Wegmann; Ulrich ; et al.	2012-05-10
Optical apparatus and method for modifying the imaging behavior of such apparatus Grant 8,169,595 - Schriever , et al. May 1, 2	2012-05-01
Device and method for the optical measurement of an optical system by using an immersion fluid Grant 8,120,763 - Wegmann , et al. February 21, 2	2012-02-21
Device And Method For The Optical Measurement Of An Optical System By Using An Immersion Fluid App 20090257049 - Wegmann; Ulrich ; et al.	2009-10-15
Method of optimizing imaging performance Grant 7,570,345 - Reisinger , et al. August 4, 2	2009-08-04
Optical Apparatus And Method For Modifying The Imaging Behavior Of Such Apparatus App 20090174876 - Schriever; Martin ; et al.	2009-07-09
Device And Method For The Optical Measurement Of An Optical System By Using An Immersion Fluid App 20090021726 - Wegmann; Ulrich ; et al.	2009-01-22
Roof Tiles App 20080302025 - Schriever; Martin ; et al.	2008-12-11
Optical measuring apparatus and operating method for imaging error correction in an optical imaging system Grant 7,436,521 - Emer , et al. October 14, 2	2008-10-14
Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometry Grant 7,417,745 - Haidner , et al. August 26, 2	2008-08-26
Device and method for the optical measurement of an optical system by using an immersion fluid Grant 7,408,652 - Wegmann , et al. August 5, 2	2008-08-05
Apparatus For Wavefront Detection App 20080144043 - WEGMANN; Ulrich ; et al.	2008-06-19
Diffuser, wavefront source, wavefront sensor and projection exposure apparatus Grant 7,388,696 - Schriever , et al. June 17, 2	2008-06-17
Apparatus and method for measuring the wavefront of an optical system Grant 7,336,371 - Haidner , et al. February 26, 2	2008-02-26
Apparatus for wavefront detection Grant 7,333,216 - Wegmann , et al. February 19, 2	2008-02-19
Method For Structuring A Substrate Using Multiple Exposure App 20080036982 - Wegmann; Ulrich ; et al.	2008-02-14
Method And Apparatus For Determining The Influencing Of The State Of Polarization By An Optical System, And An Analyser App 20080037905 - Wegmann; Ulrich ; et al.	2008-02-14
Method of optimizing imaging performance App 20080007706 - Reisinger; Gerd ; et al.	2008-01-10
Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser Grant 7,286,245 - Wegmann , et al. October 23, 2	2007-10-23
Method of optimizing imaging performance Grant 7,233,386 - Reisinger , et al. June 19, 2	2007-06-19
Method of determining optical properties and projection exposure system comprising a wavefront detection system Grant 7,230,220 - Lauer , et al. June 12, 2	2007-06-12
Interferometric Measuring Device And Projection Exposure Installation Comprising Such Measuring Device App 20070046912 - Schriever; Martin ; et al.	2007-03-01
Interferometric measuring device and projection exposure installation comprising such measuring device Grant 7,158,237 - Schriever , et al. January 2, 2	2007-01-02
Method of determining optical properties and projection exposure system comprising a wavefront detection system App 20060231731 - Lauer; Steffen ; et al.	2006-10-19
Projection exposure system for microlithography and method for generating microlithographic images Grant 7,113,260 - Schuster , et al. September 26, 2	2006-09-26
Optical measuring apparatus and operating method for an optical imaging system App 20060119838 - Emer; Wolfgang ; et al.	2006-06-08
Diffuser, wavefront source, wavefront sensor and projection exposure apparatus App 20060109533 - Schriever; Martin ; et al.	2006-05-25
Projection exposure system for microlithography and method for generating microlithographic images App 20060023193 - Schuster; Karl-Heinz ; et al.	2006-02-02
Projection exposure system for microlithography and method for generating microlithographic images Grant 6,972,831 - Schuster , et al. December 6, 2	2005-12-06
Interferometric measuring device and projection exposure installation comprising such measuring device App 20050264827 - Schriever, Martin ; et al.	2005-12-01
Device and method for the optical measurement of an optical system, a container therefor, and a microlithography projection exposure machine App 20050243328 - Wegmann, Ulrich ; et al.	2005-11-03
Method of optimizing imaging performance App 20050237506 - Reisinger, Gerd ; et al.	2005-10-27
Projection exposure system for microlithography and method for generating microlithographic images Grant 6,950,174 - Schuster , et al. September 27, 2	2005-09-27
Process for the decontamination of microlithographic projection exposure devices Grant 6,936,825 - Gerhard , et al. August 30, 2	2005-08-30
Projection exposure system for microlithography and method for generating microlithographic images Grant 6,930,758 - Schuster , et al. August 16, 2	2005-08-16
Projection exposure system for microlithography and method for generating microlithographic images App 20050083507 - Schuster, Karl-Heinz ; et al.	2005-04-21
Projection exposure system for microlithography and method for generating microlithographic images App 20050083506 - Schuster, Karl-Heinz ; et al.	2005-04-21
Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometry App 20050007602 - Haidner, Helmut ; et al.	2005-01-13
Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser App 20040114150 - Wegmann, Ulrich ; et al.	2004-06-17
Apparatus for wavefront detection App 20020001088 - Wegmann, Ulrich ; et al.	2002-01-03
Process for the decontamination of microlithographic projection exposure devices App 20010026402 - Gerhard, Michael ; et al.	2001-10-04
Projection exposure system for microlithography and method for generating microlithographic images App 20010019404 - Schuster, Karl-Heinz ; et al.	2001-09-06

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