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Patent applications and USPTO patent grants for Schreiner; Manfred.The latest application filed is for "micromechanical substrate for a diaphragm with a diffusion barrier layer".
Patent | Date |
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Micromechanical substrate for a diaphragm with a diffusion barrier layer Grant 9,170,226 - Fleischer , et al. October 27, 2 | 2015-10-27 |
Micromechanical Substrate For A Diaphragm With A Diffusion Barrier Layer App 20130264660 - Fleischer; Maximilian ;   et al. | 2013-10-10 |
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