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Patent applications and USPTO patent grants for Schoumans; Nicole.The latest application filed is for "inspection method and apparatus and lithographic processing cell".
Patent | Date |
---|---|
Inspection method and apparatus and lithographic processing cell Grant RE49,199 - Mos , et al. September 6, 2 | 2022-09-06 |
Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatus Grant 8,982,347 - Wei , et al. March 17, 2 | 2015-03-17 |
Inspection method and apparatus and lithographic processing cell Grant 8,887,107 - Mos , et al. November 11, 2 | 2014-11-11 |
Lithographic method and arrangement Grant 8,796,684 - Schoumans , et al. August 5, 2 | 2014-08-05 |
Inspection Method and Apparatus and Lithographic Processing Cell App 20140089870 - MOS; Everhardus Cornelis ;   et al. | 2014-03-27 |
Alignment Mark Deformation Estimating Method, Substrate Position Predicting Method, Alignment System and Lithographic Apparatus App 20130141723 - WEI; Xiuhong ;   et al. | 2013-06-06 |
Lithographic Method and Arrangement App 20100323461 - Schoumans; Nicole ;   et al. | 2010-12-23 |
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