Schoeppach; Armin

Patent Applications and Registrations

Patent applications and USPTO patent grants for Schoeppach; Armin.The latest application filed is for "optical projection system".

Company Profile

0.41.44

Schoeppach; Armin - Aalen DE
Schoeppach; Armin - Wohnsitz DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Optical Projection System App 20180259856 - Rau; Johannes ; et al.	2018-09-13
Optical Device Having A Deformable Optical Element App 20180120710 - Steinbach; Manfred ; et al.	2018-05-03
Optical projection system Grant 9,891,535 - Rau , et al. February 13, 2	2018-02-13
Optical device having a deformable optical element Grant 9,798,243 - Steinbach , et al. October 24, 2	2017-10-24
Actuators and microlithography projection exposure systems and methods using the same Grant 9,766,550 - Weber , et al. September 19, 2	2017-09-19
Optical Projection System App 20170219929 - Rau; Johannes ; et al.	2017-08-03
Method and device for connecting an optical element to a frame Grant 9,604,299 - Schoeppach , et al. March 28, 2	2017-03-28
Optical projection system Grant 9,557,653 - Rau , et al. January 31, 2	2017-01-31
Projection exposure apparatus for microlithography for the production of semiconductor components Grant 9,513,562 - Fischer , et al. December 6, 2	2016-12-06
Optical arrangement and microlithographic projection exposure apparatus including same Grant 9,436,101 - Schoeppach , et al. September 6, 2	2016-09-06
Optical Device Having A Deformable Optical Element App 20160209752 - Steinbach; Manfred ; et al.	2016-07-21
Gravitation compensation for optical elements in projection exposure apparatuses Grant 9,341,807 - Muehlberger , et al. May 17, 2	2016-05-17
Actuators And Microlithography Projection Exposure Systems And Methods Using The Same App 20150370176 - Weber; Ulrich ; et al.	2015-12-24
Optical device having a deformable optical element Grant 9,217,936 - Steinbach , et al. December 22, 2	2015-12-22
Microlithographic imaging optical system including multiple mirrors Grant 9,195,145 - Mann , et al. November 24, 2	2015-11-24
Optical Projection System App 20150323873 - Rau; Johannes ; et al.	2015-11-12
Optical module with a measuring device Grant 9,175,948 - Schoeppach , et al. November 3, 2	2015-11-03
Optical projection system Grant 9,104,016 - Rau , et al. August 11, 2	2015-08-11
Holding Device for an Optical Element in an Objective App 20150138520 - Gellrich; Bernhard ; et al.	2015-05-21
Microlithographic Imaging Optical System Including Multiple Mirrors App 20150022799 - Mann; Hans-Juergen ; et al.	2015-01-22
Projection Exposure Apparatus For Microlithography For The Production Of Semiconductor Components App 20150015864 - Fischer; Juergen ; et al.	2015-01-15
Method And Device For Connecting An Optical Element To A Frame App 20150008215 - Schoeppach; Armin ; et al.	2015-01-08
Gravitation Compensation For Optical Elements In Projection Exposure Apparatuses App 20150009557 - Muehlberger; Norbert ; et al.	2015-01-08
Projection exposure apparatus for microlithography for the production of semiconductor components Grant 8,885,143 - Fischer , et al. November 11, 2	2014-11-11
Microlithographic imaging optical system including multiple mirrors Grant 8,873,122 - Mann , et al. October 28, 2	2014-10-28
Gravitation compensation for optical elements in projection exposure apparatuses Grant 8,854,603 - Muehlberger , et al. October 7, 2	2014-10-07
Holding device for an optical element in an objective Grant 8,854,602 - Gellrich , et al. October 7, 2	2014-10-07
Optical Module With A Measuring Device App 20140125995 - Schoeppach; Armin ; et al.	2014-05-08
Method and device for connecting an optical element to a frame Grant 8,705,006 - Schoeppach , et al. April 22, 2	2014-04-22
Optical element Grant 8,705,185 - Rau , et al. April 22, 2	2014-04-22
Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations Grant 8,659,745 - Limbach , et al. February 25, 2	2014-02-25
Optical System With An Exchangeable, Manipulable Correction Arrangement For Reducing Image Aberrations App 20130278911 - Limbach; Guido ; et al.	2013-10-24
Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations Grant 8,542,346 - Limbach , et al. September 24, 2	2013-09-24
Holding arrangement for an optical element Grant 8,508,868 - Weber , et al. August 13, 2	2013-08-13
Optical system having heat dissipation arrangement Grant 8,456,615 - Holderer , et al. June 4, 2	2013-06-04
Optical Projection System App 20130044304 - Rau; Johannes ; et al.	2013-02-21
Temperature-control device for an optical assembly Grant 8,339,569 - Schoeppach , et al. December 25, 2	2012-12-25
Optical projection system Grant 8,300,210 - Rau , et al. October 30, 2	2012-10-30
Optical Element App 20120194795 - Rau; Johannes ; et al.	2012-08-02
Optical Arrangement And Microlithographic Projection Exposure Apparatus Including Same App 20120182533 - Schoeppach; Armin ; et al.	2012-07-19
Holding Arrangement For An Optical Element App 20120154935 - Weber; Ulrich ; et al.	2012-06-21
Actuators And Microlithography Projection Exposure Systems And Methods Using The Same App 20120147344 - Weber; Ulrich ; et al.	2012-06-14
Optical Device Having A Deformable Optical Element App 20110299053 - Steinbach; Manfred ; et al.	2011-12-08
Gravitation Compensation For Optical Elements In Projection Exposure Apparatuses App 20110267596 - Muehlberger; Norbert ; et al.	2011-11-03
Projection Exposure Apparatus For Microlithography For The Production Of Semiconductor Components App 20110235012 - Fischer; Juergen ; et al.	2011-09-29
Temperature-control Device For An Optical Assembly App 20110181851 - Schoeppach; Armin ; et al.	2011-07-28
Imaging Optical System App 20110165522 - Mann; Hans-Juergen ; et al.	2011-07-07
Actuators And Microlithography Projection Exposure Systems And Methods Using The Same App 20110128521 - Weber; Ulrich ; et al.	2011-06-02
Arrangement for mounting an optical element Grant 7,920,344 - Schoeppach , et al. April 5, 2	2011-04-05
Optical System Having An Optical Arrangement App 20110025992 - Holderer; Hubert ; et al.	2011-02-03
Optical element unit Grant 7,729,065 - Schoeppach , et al. June 1, 2	2010-06-01
Projection Objective For A Microlithography Apparatus And Method App 20100128367 - Beckenbach; Mariella ; et al.	2010-05-27
Arrangement for Mounting An Optical Element App 20090284849 - Schoeppach; Armin ; et al.	2009-11-19
Optical System With An Exchangeable, Manipulable Correction Arrangement For Reducing Image Aberrations App 20090244509 - Limbach; Guido ; et al.	2009-10-01
Method And Device For Connecting An Optical Element To A Frame App 20090244508 - Schoeppach; Armin ; et al.	2009-10-01
Optical Device With Stiff Housing App 20090219497 - Schoeppach; Armin ; et al.	2009-09-03
Assembly For Adjusting An Optical Element App 20090207511 - Schoeppach; Armin ; et al.	2009-08-20
Device for preventing the displacement of an optical element Grant 7,564,636 - Zengerling , et al. July 21, 2	2009-07-21
Optical Projection System App 20090174874 - Rau; Johannes ; et al.	2009-07-09
Process for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and assembly Grant 7,551,375 - Rau , et al. June 23, 2	2009-06-23
Optical Element App 20080278828 - Rau; Johannes ; et al.	2008-11-13
Optical Element Unit App 20080218721 - Schoeppach; Armin ; et al.	2008-09-11
Arrangement For Mounting An Optical Component App 20080144199 - Schoeppach; Armin ; et al.	2008-06-19
Optical measuring system, and a projection objective App 20080100930 - Holderer; Hubert ; et al.	2008-05-01
Holding Device for an Optical Element in an Objective App 20080002170 - Gellrich; Bernhard ; et al.	2008-01-03
Device for preventing the displacement of an optical element App 20070183063 - Zengerling; Christian ; et al.	2007-08-09
Objective with at least one optical element Grant 7,239,462 - Rau , et al. July 3, 2	2007-07-03
Process for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and assembly App 20060243779 - Rau; Johannes ; et al.	2006-11-02
Device for holding a beam splitter element Grant 7,079,331 - Weber , et al. July 18, 2	2006-07-18
Device for receiving an optical module in an imaging unit App 20060126195 - Rau; Johannes ; et al.	2006-06-15
Device for holding a beam splitter element App 20050248858 - Weber, Ulrich ; et al.	2005-11-10
Objective with at least one optical element App 20050190462 - Rau, Johannes ; et al.	2005-09-01
Bearing arrangement comprising an optical element and a mount App 20040257681 - Weber, Ulrich ; et al.	2004-12-23
Optical measuring system, and a projection objective App 20040257675 - Holderer, Hubert ; et al.	2004-12-23