Schoepp; Alan
Patent Applications and Registrations
Patent applications and USPTO patent grants for Schoepp; Alan.The latest application filed is for "compact high density plasma source".
- Schoepp; Alan - Ben Lomond CA
| Patent | Date |
|---|---|
| Compact High Density Plasma Source App 20210183619 - Patrick; Roger ; et al. | 2021-06-17 |
| Deposition apparatus including an isothermal processing zone Grant 10,808,317 - Chandrasekharan , et al. October 20, 2 | 2020-10-20 |
| Controlled ambient system for interface engineering Grant 9,117,860 - Boyd , et al. August 25, 2 | 2015-08-25 |
| Method for distributing gas for a bevel etcher Grant 8,940,098 - Sexton , et al. January 27, 2 | 2015-01-27 |
| Deposition Apparatus Including An Isothermal Processing Zone App 20150011096 - Chandrasekharan; Ramesh ; et al. | 2015-01-08 |
| Method and System for Distributing Gas for A Bevel Edge Etcher App 20130276821 - Sexton; Greg ; et al. | 2013-10-24 |
| Apparatuses and methods for cleaning a substrate Grant 7,625,452 - de Larios , et al. December 1, 2 | 2009-12-01 |
| System, method and apparatus for in-situ substrate inspection Grant 7,542,134 - Owczarz , et al. June 2, 2 | 2009-06-02 |
| Apparatuses And Methods For Cleaning A Substrate App 20090000044 - de Larios; John M. ; et al. | 2009-01-01 |
| System, Method And Apparatus For In-situ Substrate Inspection App 20080273195 - Owczarz; Aleksander ; et al. | 2008-11-06 |
| Apparatuses and methods for cleaning a substrate Grant 7,441,299 - de Larios , et al. October 28, 2 | 2008-10-28 |
| Method And System For Distributing Gas For A Bevel Edge Etcher App 20080216864 - Sexton; Greg ; et al. | 2008-09-11 |
| System, method and apparatus for in-situ substrate inspection Grant 7,397,555 - Owczarz , et al. July 8, 2 | 2008-07-08 |
| Controlled ambient system for interface engineering App 20080057221 - Boyd; John ; et al. | 2008-03-06 |
| Method For Gap Fill In Controlled Ambient System App 20080057182 - Boyd; John ; et al. | 2008-03-06 |
| System, method and apparatus for in-situ substrate inspection App 20060139450 - Owczarz; Aleksander ; et al. | 2006-06-29 |
| Apparatuses and methods for cleaning a substrate App 20050133061 - de Larios, John M. ; et al. | 2005-06-23 |
| High temperature electrostatic chuck Grant 6,669,783 - Sexton , et al. December 30, 2 | 2003-12-30 |
| High temperature electrostatic chuck Grant 6,567,258 - Sexton , et al. May 20, 2 | 2003-05-20 |
| High temperature electrostatic chuck App 20030003749 - Sexton, Greg ; et al. | 2003-01-02 |
| High temperature electrostatic chuck App 20020075625 - Sexton, Greg ; et al. | 2002-06-20 |
| High temperature electrostatic chuck Grant 6,377,437 - Sexton , et al. April 23, 2 | 2002-04-23 |
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