Schmidt; Robert-Han Munnig
Patent Applications and Registrations
Patent applications and USPTO patent grants for Schmidt; Robert-Han Munnig.The latest application filed is for "lithographic apparatus, radiation supply and device manufacturing method".
- Schmidt; Robert-Han Munnig - Hapert NL
| Patent | Date |
|---|---|
| Lithographic apparatus and device manufacturing method Grant 7,391,499 - Schmidt June 24, 2 | 2008-06-24 |
| Lithographic apparatus, radiation supply and device manufacturing method App 20070222961 - Schmidt; Robert-Han Munnig | 2007-09-27 |
| Lithographic apparatus and device manufacturing method App 20070162781 - Visser; Huibert ; et al. | 2007-07-12 |
| Lithographic apparatus and device manufacturing method App 20070150779 - Visser; Huibert ; et al. | 2007-06-28 |
| Lithographic Apparatus And Device Manufacturing Method App 20050286039 - Schmidt, Robert-Han Munnig ; et al. | 2005-12-29 |
| Positioning device App 20050200825 - Schmidt, Robert-Han Munnig | 2005-09-15 |
| Lithographic positioning device and device manufacturing method App 20050200826 - Schmidt, Robert-Han Munnig | 2005-09-15 |
| Movable stage system, lithographic apparatus, and device manufacturing method App 20050099616 - Loopstra, Erik Roelof ; et al. | 2005-05-12 |
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