| Patent | Date |
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Strain and kinetics control during separation phase of imprint process
Grant 11,161,280 - Khusnatdinov , et al. November 2, 2 | 2021-11-02 |
Safe separation for nano imprinting
Grant 11,020,894 - Im , et al. June 1, 2 | 2021-06-01 |
Strain and Kinetics Control During Separation Phase of Imprint Process
App 20190232533 - Khusnatdinov; Niyaz ; et al. | 2019-08-01 |
Safe Separation for Nano Imprinting
App 20190061228 - Im; Se-Hyuk ; et al. | 2019-02-28 |
Drop pattern generation for imprint lithography with directionally-patterned templates
Grant 9,651,862 - Fletcher , et al. May 16, 2 | 2017-05-16 |
Sidewall image templates for directed self-assembly materials
Grant 9,508,562 - Xu , et al. November 29, 2 | 2016-11-29 |
Multilayer pattern transfer for chemical guides
Grant 9,478,506 - Farrell , et al. October 25, 2 | 2016-10-25 |
Methods for fabricating guide patterns and methods for fabricating integrated circuits using such guide patterns
Grant 9,455,154 - Schmid , et al. September 27, 2 | 2016-09-27 |
Sidewall Image Templates For Directed Self-assembly Materials
App 20150380252 - Xu; Ji ; et al. | 2015-12-31 |
Nanostructured solar cell
Grant 9,196,765 - Yang , et al. November 24, 2 | 2015-11-24 |
Nanostructured Solar Cell
App 20150255640 - Yang; Shuqiang ; et al. | 2015-09-10 |
Master template replication
Grant 9,122,148 - Miller , et al. September 1, 2 | 2015-09-01 |
Nanostructured solar cell
Grant 9,070,803 - Yang , et al. June 30, 2 | 2015-06-30 |
Safe Separation For Nano Imprinting
App 20150165671 - Im; Se-Hyuk ; et al. | 2015-06-18 |
Methods and systems of material removal and pattern transfer
Grant 8,980,751 - Schmid , et al. March 17, 2 | 2015-03-17 |
Safe separation for nano imprinting
Grant 8,968,620 - Im , et al. March 3, 2 | 2015-03-03 |
Methods of forming a masking layer for patterning underlying structures
Grant 8,969,207 - Schmid , et al. March 3, 2 | 2015-03-03 |
Asymmetric templates for forming non-periodic patterns using directed self-assembly materials
Grant 8,956,808 - Schmid , et al. February 17, 2 | 2015-02-17 |
Drop Pattern Generation For Imprint Lithography With Directionally-patterned Templates
App 20150017329 - Fletcher; Edward Brian ; et al. | 2015-01-15 |
Directed Self-assembly (dsa) Formulations Used To Form Dsa-based Lithography Films
App 20140377965 - Schmid; Gerard M. ; et al. | 2014-12-25 |
Methods of forming trench/via features in an underlying structure using a process that includes a masking layer formed by a directed self-assembly process
Grant 8,906,802 - Wahl , et al. December 9, 2 | 2014-12-09 |
Optimizing lithographic processes using laser annealing techniques
Grant 8,889,343 - Preil , et al. November 18, 2 | 2014-11-18 |
Imprint lithography template
Grant 8,877,073 - Schmid , et al. November 4, 2 | 2014-11-04 |
Methods for fabricating integrated circuits including formation of chemical guide patterns for directed self-assembly lithography
Grant 8,853,101 - Farrell , et al. October 7, 2 | 2014-10-07 |
Methods Of Forming Trench/via Features In An Underlying Structure Using A Process That Includes A Masking Layer Formed By A Directed Self-assembly Process
App 20140273469 - Wahl; Jeremy A. ; et al. | 2014-09-18 |
Methods For Fabricating Integrated Circuits Including Formation Of Chemical Guide Patterns For Directed Self-assembly Lithography
App 20140273511 - Farrell; Richard A. ; et al. | 2014-09-18 |
Methods Of Forming A Masking Layer For Patterning Underlying Structures
App 20140273473 - Schmid; Gerard M. ; et al. | 2014-09-18 |
Methods For Fabricating Guide Patterns And Methods For Fabricating Integrated Circuits Using Such Guide Patterns
App 20140273475 - Schmid; Gerard M. ; et al. | 2014-09-18 |
Multilayer Pattern Transfer For Chemical Guides
App 20140252660 - Farrell; Richard A. ; et al. | 2014-09-11 |
Chemical And Physical Templates For Forming Patterns Using Directed Self-assembly Materials
App 20140224764 - Schmid; Gerard M. ; et al. | 2014-08-14 |
Chemical and physical templates for forming patterns using directed self-assembly materials
Grant 8,790,522 - Schmid , et al. July 29, 2 | 2014-07-29 |
Optimizing Lithographic Processes Using Laser Annealing Techniques
App 20140178824 - E Preil; Moshe ; et al. | 2014-06-26 |
Asymmetric Templates For Forming Non-periodic Patterns Using Directes Self-assembly Materials
App 20140154630 - Schmid; Gerard M. ; et al. | 2014-06-05 |
Strain and Kinetics Control During Separation Phase of Imprint Process
App 20140117574 - Khusnatdinov; Niyaz ; et al. | 2014-05-01 |
Strain and kinetics control during separation phase of imprint process
Grant 8,652,393 - Khusnatdinov , et al. February 18, 2 | 2014-02-18 |
Template pillar formation
Grant 8,512,585 - Doyle , et al. August 20, 2 | 2013-08-20 |
In-situ cleaning of an imprint lithography tool
Grant 8,394,203 - Schmid , et al. March 12, 2 | 2013-03-12 |
High Aspect Ratio Patterning of Silicon
App 20120214066 - Miller; Michael N. ; et al. | 2012-08-23 |
Template Pillar Formation
App 20120111832 - Doyle; Gary F. ; et al. | 2012-05-10 |
Nanostructured Solar Cell
App 20110277827 - Yang; Shuqiang ; et al. | 2011-11-17 |
Backside Contact Solar Cell
App 20110277833 - Miller; Michael N. ; et al. | 2011-11-17 |
Safe Deparation For Nano Imprinting
App 20110260361 - Im; Se-Hyuk ; et al. | 2011-10-27 |
Template having alignment marks formed of contrast material
Grant 8,012,395 - Selinidis , et al. September 6, 2 | 2011-09-06 |
Methods And Systems Of Material Removal And Pattern Transfer
App 20110183521 - Schmid; Gerard M. ; et al. | 2011-07-28 |
Etch-enhanced technique for lift-off patterning
Grant 7,985,530 - Schmid , et al. July 26, 2 | 2011-07-26 |
Method of creating a template employing a lift-off process
Grant 7,906,274 - Schmid , et al. March 15, 2 | 2011-03-15 |
Etch-Enhanced Technique for Lift-Off Patterning
App 20100266965 - Schmid; Gerard M. ; et al. | 2010-10-21 |
Master Template Replication
App 20100109194 - Miller; Michael N. ; et al. | 2010-05-06 |
Substrate Patterning
App 20100112310 - Truskett; Van Nguyen ; et al. | 2010-05-06 |
Imprint Lithography Template
App 20100102029 - Schmid; Gerard M. ; et al. | 2010-04-29 |
Strain and Kinetics Control During Separation Phase of Imprint Process
App 20100102469 - Khusnatdinov; Niyaz ; et al. | 2010-04-29 |
Complementary Alignment Marks for Imprint Lithography
App 20100092599 - Selinidis; Kosta S. ; et al. | 2010-04-15 |
In-Situ Cleaning of an Imprint Lithography Tool
App 20100085555 - Schmid; Gerard M. ; et al. | 2010-04-08 |
Particle Mitigation for Imprint Lithography
App 20100078846 - Resnick; Douglas J. ; et al. | 2010-04-01 |
Nano-imprint Lithography Template Fabrication And Treatment
App 20100072671 - Schmid; Gerard M. ; et al. | 2010-03-25 |
Template Having Alignment Marks Formed of Contrast Material
App 20090250840 - Selinidis; Kosta S. ; et al. | 2009-10-08 |
Template Pillar Formation
App 20090200266 - Doyle; Gary F. ; et al. | 2009-08-13 |
Self-aligned process for fabricating imprint templates containing variously etched features
Grant 7,547,398 - Schmid , et al. June 16, 2 | 2009-06-16 |
Method of Creating a Template Employing a Lift-Off Process
App 20090130598 - Schmid; Gerard M. ; et al. | 2009-05-21 |
Self-Aligned Process for Fabricating Imprint Templates Containing Variously Etched Features
App 20070243655 - Schmid; Gerard M. ; et al. | 2007-10-18 |
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