Schmerek; Dieter

Patent Applications and Registrations

Patent applications and USPTO patent grants for Schmerek; Dieter.The latest application filed is for "method of processing an optical element and an optical element, in particular for a microlithographic projection exposure apparatus".

Company Profile

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Schmerek; Dieter - Huettlingen N/A DE
Schmerek, Dieter - Hihling DE
Schmerek; Dieter - Aalen-Hofen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method of processing an optical element and an optical element, in particular for a microlithographic projection exposure apparatus Grant 8,435,726 - Pazidis , et al. May 7, 2	2013-05-07
Optical system of an illumination device of a projection exposure apparatus Grant 8,068,279 - Schuster , et al. November 29, 2	2011-11-29
Optical element unit for exposure processes Grant 7,545,483 - Gellrich , et al. June 9, 2	2009-06-09
Method Of Processing An Optical Element And An Optical Element, In Particular For A Microlithographic Projection Exposure Apparatus App 20080309905 - PAZIDIS; Alexandra ; et al.	2008-12-18
Optical element unit for exposure processes App 20080192215 - Gellrich; Bernhard ; et al.	2008-08-14
Optical System Of An Illumination Device Of A Projection Exposure Apparatus App 20070217013 - Schuster; Karl-Heinz ; et al.	2007-09-20
Microlithographic projection exposure apparatus and method for introducing an immersion liquid into an immersion space App 20070132969 - Gellrich; Bernhard ; et al.	2007-06-14
System for purifying purge gases App 20050195376 - Schmerek, Dieter	2005-09-08
System for flushing at least one internal space of an objective Grant 6,825,914 - Schroeder , et al. November 30, 2	2004-11-30
System for flushing at least one internal space of an objective App 20020155384 - Schroeder, Joachim ; et al.	2002-10-24

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