Schlesener; Frank

Patent Applications and Registrations

Patent applications and USPTO patent grants for Schlesener; Frank.The latest application filed is for "method for operating an illumination system of a microlithographic projection exposure apparatus".

Company Profile

2.34.33

Schlesener; Frank - Oberkochen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method of operating a microlithographic projection apparatus and illumination system of such an apparatus Grant 10,444,631 - Deguenther , et al. Oc	2019-10-15
Method For Operating An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20190155166 - Natt; Oliver ; et al.	2019-05-23
Method for operating an illumination system of a microlithographic projection exposure apparatus Grant 10,222,704 - Natt , et al.	2019-03-05
Illumination system for microlithography Grant 10,088,754 - Scholz , et al. October 2, 2	2018-10-02
Method Of Operating A Microlithographic Projection Apparatus And Illumination System Of Such An Apparatus App 20180217506 - Deguenther; Markus ; et al.	2018-08-02
Illumination system of a microlithographic projection exposure apparatus Grant 9,983,483 - Patra , et al. May 29, 2	2018-05-29
Illumination system of a microlithographic projection exposure apparatus Grant 9,910,359 - Deguenther , et al. March 6, 2	2018-03-06
Method For Operating An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20180024439 - Natt; Oliver ; et al.	2018-01-25
Optical system of a microlithographic projection exposure apparatus Grant 9,817,317 - Saenger , et al. November 14, 2	2017-11-14
Method and apparatus for compensating at least one defect of an optical system Grant 9,798,249 - Dmitriev , et al. October 24, 2	2017-10-24
Illumination optical unit for projection lithography Grant 9,753,375 - Scholz , et al. September 5, 2	2017-09-05
Measuring an optical symmetry property on a projection exposure apparatus Grant 9,703,205 - Neumann , et al. July 11, 2	2017-07-11
Method for operating an illumination system of a microlithographic projection exposure apparatus Grant 9,703,206 - Natt , et al. July 11, 2	2017-07-11
Illumination System For Microlithography App 20170192361 - Scholz; Axel ; et al.	2017-07-06
Mirror system comprising at least one mirror for use for guiding illumination and imaging light in EUV projection lithography Grant 9,665,008 - Saenger , et al. May 30, 2	2017-05-30
Collector Grant 9,645,503 - Saenger , et al. May 9, 2	2017-05-09
Apparatus and method for compensating a defect of a channel of a microlithographic projection exposure system Grant 9,632,413 - Saenger , et al. April 25, 2	2017-04-25
Illumination system for microlithography Grant 9,606,441 - Scholz , et al. March 28, 2	2017-03-28
Method of lithographically transferring a pattern on a light sensitive surface and illumination system of a microlithographic projection exposure apparatus Grant 9,581,910 - Schlesener , et al. February 28, 2	2017-02-28
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20170038691 - Patra; Michael ; et al.	2017-02-09
Illumination system for an EUV lithography device and facet mirror therefor Grant 9,551,941 - Ruoff , et al. January 24, 2	2017-01-24
Illumination optical unit for projection lithography Grant 9,507,269 - Hennerkes , et al. November 29, 2	2016-11-29
Illumination system of a microlithographic projection exposure apparatus Grant 9,500,954 - Deguenther , et al. November 22, 2	2016-11-22
Optical system of a microlithographic projection exposure apparatus, and microlithographic exposure Grant 9,500,956 - Saenger , et al. November 22, 2	2016-11-22
Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method Grant 9,488,918 - Saenger , et al. November 8, 2	2016-11-08
Illumination system of a microlithographic projection exposure apparatus Grant 9,477,157 - Patra , et al. October 25, 2	2016-10-25
Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method Grant 9,442,385 - Saenger , et al. September 13, 2	2016-09-13
Method For Operating An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20160246180 - Natt; Oliver ; et al.	2016-08-25
Polarization-influencing optical arrangement, in particular in a microlithographic projection exposure apparatus Grant 9,411,245 - Saenger , et al. August 9, 2	2016-08-09
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20160209759 - Deguenther; Markus ; et al.	2016-07-21
Illumination System For Microlithography App 20160161858 - Scholz; Axel ; et al.	2016-06-09
Method for operating an illumination system of a microlithographic projection exposure apparatus Grant 9,341,957 - Natt , et al. May 17, 2	2016-05-17
Illumination system of a microlithographic projection exposure apparatus Grant 9,310,690 - Deguenther , et al. April 12, 2	2016-04-12
Method For Operating An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20160077444 - Natt; Oliver ; et al.	2016-03-17
Illumination system for microlithography Grant 9,280,060 - Scholz , et al. March 8, 2	2016-03-08
Measuring An Optical Symmetry Property On A Projection Exposure Apparatus App 20160004168 - NEUMANN; Jens Timo ; et al.	2016-01-07
Illumination System For An Euv Lithography Device And Facet Mirror Therefor App 20160004164 - Ruoff; Johannes ; et al.	2016-01-07
Method for operating an illumination system of a microlithographic projection exposure apparatus Grant 9,217,931 - Natt , et al. December 22, 2	2015-12-22
Optical system of a microlithographic projection exposure apparatus Grant 9,182,677 - Schlesener , et al. November 10, 2	2015-11-10
Method Of Lithographically Transferring A Pattern On A Light Sensitive Surface And Illumination System Of A Microlithographic Projection Exposure Apparatus App 20150301455 - Schlesener; Frank ; et al.	2015-10-22
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20150234291 - Patra; Michael ; et al.	2015-08-20
Optical System For A Microlithographic Projection Exposure Apparatus And Microlithographic Exposure Method App 20150160566 - Saenger; Ingo ; et al.	2015-06-11
Illumination system of a microlithographic projection exposure apparatus Grant 9,046,786 - Patra , et al. June 2, 2	2015-06-02
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20150146183 - Deguenther; Markus ; et al.	2015-05-28
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20150146184 - Deguenther; Markus ; et al.	2015-05-28
Optical System Of A Microlithographic Projection Exposure Apparatus App 20150085272 - Saenger; Ingo ; et al.	2015-03-26
Optical System Of A Microlithographic Projection Exposure Apparatus App 20150029480 - Schlesener; Frank ; et al.	2015-01-29
Illumination System For Microlithography App 20150022798 - Scholz; Axel ; et al.	2015-01-22
Illumination Optical Unit For Projection Lithography App 20150015862 - Scholz; Axel ; et al.	2015-01-15
Apparatus And Method For Compensating A Defect Of A Channel Of A Microlithographic Projection Exposure System App 20150017589 - Saenger; Ingo ; et al.	2015-01-15
Method And Apparatus For Compensating At Least One Defect Of An Optical System App 20140347646 - Dmitriev; Vladimir ; et al.	2014-11-27
Illumination system for microlithography Grant 8,873,023 - Scholz , et al. October 28, 2	2014-10-28
Polarization-influencing Optical Arrangement, In Particular In A Microlithographic Projection Exposure Apparatus App 20140313498 - Saenger; Ingo ; et al.	2014-10-23
Optical System For A Microlithographic Projection Exposure Apparatus And Microlithographic Exposure Method App 20140285788 - Saenger; Ingo ; et al.	2014-09-25
Mirror System Comprising At Least One Mirror For Use For Guiding Illumination And Imaging Light In Euv Projection Lithography App 20140226142 - Saenger; Ingo ; et al.	2014-08-14
Collector App 20140192339 - Saenger; Ingo ; et al.	2014-07-10
Optical System Of A Microlithographic Projection Exposure Apparatus, And Microlithographic Exposure App 20140132942 - Saenger; Ingo ; et al.	2014-05-15
Illumination Optical Unit For Projection Lithography App 20140111785 - Hennerkes; Christoph ; et al.	2014-04-24
Method For Operating An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20130258303 - Natt; Oliver ; et al.	2013-10-03
Method for operating an illumination system of a microlithographic projection exposure apparatus Grant 8,467,033 - Natt , et al. June 18, 2	2013-06-18
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20130057844 - Patra; Michael ; et al.	2013-03-07
Illumination System For Microlithography App 20120019796 - Scholz; Axel ; et al.	2012-01-26
Method For Operating An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20100321661 - Natt; Oliver ; et al.	2010-12-23

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.