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Patent applications and USPTO patent grants for Schimmanz; Klaus.The latest application filed is for "mems and method of manufacturing the same".
Patent | Date |
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MEMS and method of manufacturing the same Grant 11,186,478 - Langa , et al. November 30, 2 | 2021-11-30 |
Mems And Method Of Manufacturing The Same App 20190382257 - LANGA; Sergiu ;   et al. | 2019-12-19 |
MEMS transducer for interacting with a volume flow of a fluid and method for manufacturing the same Grant 10,457,544 - Schenk , et al. Oc | 2019-10-29 |
Mems Transducer For Interacting With A Volume Flow Of A Fluid And Method For Manufacturing The Same App 20180179048 - SCHENK; Harald ;   et al. | 2018-06-28 |
Micromechanical device with an actively deflectable element Grant 9,676,607 - Gaudet , et al. June 13, 2 | 2017-06-13 |
Micromechanical Device With An Actively Deflectable Element App 20160304333 - Gaudet; Matthieu ;   et al. | 2016-10-20 |
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