loadpatents
Patent applications and USPTO patent grants for Schilling; Paul.The latest application filed is for "optical cell".
Patent | Date |
---|---|
Multi-channel device and method for measuring optical properties of a liquid Grant 9,696,261 - Tokhtuev , et al. July 4, 2 | 2017-07-04 |
Optical cell Grant 9,110,049 - Tokhtuev , et al. August 18, 2 | 2015-08-18 |
Optical Cell App 20140141523 - Tokhtuev; Eugene ;   et al. | 2014-05-22 |
Optical cell Grant 8,563,320 - Tokhtuev , et al. October 22, 2 | 2013-10-22 |
Optical Cell App 20120149121 - Tokhtuev; Eugene ;   et al. | 2012-06-14 |
Optical cell Grant 8,143,070 - Tokhtuev , et al. March 27, 2 | 2012-03-27 |
UV fluorometric sensor and method for using the same Grant 8,084,756 - Tokhtuev , et al. December 27, 2 | 2011-12-27 |
Method of calibration for nonlinear optical sensor Grant 8,076,154 - Erickson , et al. December 13, 2 | 2011-12-13 |
Wide range kinetic determination of peracid and/or peroxide concentrations Grant 8,076,155 - Tokhtuev , et al. December 13, 2 | 2011-12-13 |
UV fluorometric sensor and method for using the same App 20110260079 - Tokhtuev; Eugene ;   et al. | 2011-10-27 |
Optical product detection sensor Grant 8,004,683 - Tokhtuev , et al. August 23, 2 | 2011-08-23 |
UV fluorometric sensor and method for using the same Grant 7,989,780 - Tokhtuev , et al. August 2, 2 | 2011-08-02 |
Uv Fluorometric Sensor And Method For Using The Same App 20100084572 - Tokhtuev; Eugene ;   et al. | 2010-04-08 |
UV fluorometric sensor and method for using the same Grant 7,652,267 - Tokhtuev , et al. January 26, 2 | 2010-01-26 |
Uv Fluorometric Sensor And Method For Using The Same App 20090212236 - Tokhtuev; Eugene ;   et al. | 2009-08-27 |
UV fluorometric sensor and method for using the same Grant 7,550,746 - Tokhtuev , et al. June 23, 2 | 2009-06-23 |
Method Of Calibration For Nonlinear Optical Sensor App 20090150106 - Erickson; Joseph ;   et al. | 2009-06-11 |
Optical Cell App 20090145202 - Tokhtuev; Eugene ;   et al. | 2009-06-11 |
Wide Range Kinetic Determination Of Peracid And/or Peroxide Concentrations App 20090150086 - Tokhtuev; Eugene ;   et al. | 2009-06-11 |
Multi-channel Device And Method For Measuring Optical Properties Of A Liquid App 20090098022 - Tokhtuev; Eugene ;   et al. | 2009-04-16 |
Optical Product Detection Sensor App 20090097029 - Tokhtuev; Eugene ;   et al. | 2009-04-16 |
Method of treating a composite spin-on glass/anti-reflective material prior to cleaning Grant 7,399,708 - Schilling July 15, 2 | 2008-07-15 |
Near UV absorption spectrometer and method for using the same Grant 7,372,039 - Tokhtuev , et al. May 13, 2 | 2008-05-13 |
UV fluorometric sensor and method for using the same App 20080030712 - Tokhtuev; Eugene ;   et al. | 2008-02-07 |
Method of passivating of low dielectric materials in wafer processing Grant 7,270,941 - Toma , et al. September 18, 2 | 2007-09-18 |
Near UV absorption spectrometer and method for using the same App 20070138401 - Tokhtuev; Eugene ;   et al. | 2007-06-21 |
Method of treatment of porous dielectric films to reduce damage during cleaning Grant 7,169,540 - Schilling January 30, 2 | 2007-01-30 |
Method of treating a composite spin-on glass/anti-reflective material prior to cleaning App 20060223314 - Schilling; Paul | 2006-10-05 |
Developing photoresist with supercritical fluid and developer Grant 7,044,662 - Arena-Foster , et al. May 16, 2 | 2006-05-16 |
Drying resist with a solvent bath and supercritical CO2 Grant 6,928,746 - Arena-Foster , et al. August 16, 2 | 2005-08-16 |
Developing photoresist with supercritical fluid and developer Grant 6,924,086 - Arena-Foster , et al. August 2, 2 | 2005-08-02 |
Developing photoresist with supercritical fluid and developer App 20050008980 - Arena-Foster, Chantal J. ;   et al. | 2005-01-13 |
Decontamination of supercritical wafer processing equipment App 20040231707 - Schilling, Paul ;   et al. | 2004-11-25 |
Removal of contaminants using supercritical processing App 20040072706 - Arena-Foster, Chantal J. ;   et al. | 2004-04-15 |
Drying resist with a solvent bath and supercritical CO2 App 20040035021 - Arena-Foster, Chantal J. ;   et al. | 2004-02-26 |
Method of treatment of porous dielectric films to reduce damage during cleaning App 20040018452 - Schilling, Paul | 2004-01-29 |
Method of passivating of low dielectric materials in wafer processing App 20030198895 - Toma, Dorel Ioan ;   et al. | 2003-10-23 |
Oxidizing polishing slurries for low dielectric constant materials Grant 6,610,114 - Towery , et al. August 26, 2 | 2003-08-26 |
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