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Patent applications and USPTO patent grants for Schieferstein; Guenter.The latest application filed is for "device for measuring positions of structures on a substrate".
Patent | Date |
---|---|
Device for measuring positions of structures on a substrate Grant 7,817,262 - Ehrenberg , et al. October 19, 2 | 2010-10-19 |
Coordinate measuring machine with vibration decoupling and method for vibration decoupling of a coordinate measuring machine App 20090002715 - Goetz; Uwe ;   et al. | 2009-01-01 |
Device for measuring positions of structures on a substrate App 20090002720 - Ehrenberg; Tillmann ;   et al. | 2009-01-01 |
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