Schicketanz; Thomas

Patent Applications and Registrations

Patent applications and USPTO patent grants for Schicketanz; Thomas.The latest application filed is for "method and device for characterizing the surface shape of an optical element".

Company Profile

7.29.30

Schicketanz; Thomas - Aalen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method And Device For Characterizing The Surface Shape Of An Optical Element App 20220236139 - SIEGLER; Steffen ; et al.	2022-07-28
Method and device for characterizing the surface shape of an optical element Grant 11,326,872 - Siegler , et al. May 10, 2	2022-05-10
Method And Device For Characterizing The Surface Shape Of An Optical Element App 20210140762 - SIEGLER; Steffen ; et al.	2021-05-13
Projection optical unit for EUV projection lithography Grant 10,545,323 - Schwab , et al. Ja	2020-01-28
Optical system, in particular for a microlithographic projection exposure apparatus Grant 10,520,827 - Enkisch , et al. Dec	2019-12-31
Optical element and optical arrangement therewith Grant 10,474,036 - Paul , et al. Nov	2019-11-12
Optical System, In Particular For A Microlithographic Projection Exposure Apparatus App 20190212659 - ENKISCH; Hartmut ; et al.	2019-07-11
Projection Optical Unit For Euv Projection Lithography App 20190121107 - Schwab; Markus ; et al.	2019-04-25
Catadioptric Projection Objective Comprising Deflection Mirrors And Projection Exposure Method App 20190056576 - Schicketanz; Thomas ; et al.	2019-02-21
EUV mirror and optical system comprising EUV mirror Grant 10,203,435 - Schicketanz , et al. Feb	2019-02-12
Catadioptric Projection Objective App 20180373006 - Epple; Alexander ; et al.	2018-12-27
Catadioptric projection objective comprising deflection mirrors and projection exposure method Grant 10,120,176 - Schicketanz , et al. November 6, 2	2018-11-06
Catadioptric projection objective Grant 10,042,146 - Epple , et al. August 7, 2	2018-08-07
Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film element Grant 10,001,631 - Bittner , et al. June 19, 2	2018-06-19
Catadioptric Projection Objective App 20180095258 - Epple; Alexander ; et al.	2018-04-05
Catadioptric Projection Objective Comprising Deflection Mirrors And Projection Exposure Method App 20180095259 - Schicketanz; Thomas ; et al.	2018-04-05
EUV mirror and optical system comprising EUV mirror Grant 9,915,876 - Schicketanz , et al. March 13, 2	2018-03-13
Reflective optical element, and optical system of a microlithographic projection exposure apparatus Grant 9,915,873 - Enkisch , et al. March 13, 2	2018-03-13
Catadioptric projection objective comprising deflection mirrors and projection exposure method Grant 9,817,220 - Schicketanz , et al. November 14, 2	2017-11-14
Projection Lens for EUV Microlithography, Film Element and Method for Producing a Projection Lens Comprising a Film Element App 20170261730 - Bittner; Boris ; et al.	2017-09-14
Catadioptric projection objective Grant 9,726,870 - Epple , et al. August 8, 2	2017-08-08
Imaging catoptric EUV projection optical unit Grant 9,639,005 - Ruoff , et al. May 2, 2	2017-05-02
Method of lithographically transferring a pattern on a light sensitive surface and illumination system of a microlithographic projection exposure apparatus Grant 9,581,910 - Schlesener , et al. February 28, 2	2017-02-28
Catadioptric Projection Objective Comprising Deflection Mirrors And Projection Exposure Method App 20170052355 - Schicketanz; Thomas ; et al.	2017-02-23
Optical Element And Optical Arrangement Therewith App 20160377988 - PAUL; Hans-Jochen ; et al.	2016-12-29
Euv Mirror And Optical System Comprising Euv Mirror App 20160327702 - SCHICKETANZ; Thomas ; et al.	2016-11-10
Method For Correcting The Surface Form Of A Mirror App 20160299268 - MUELLER; Juergen ; et al.	2016-10-13
Catadioptric projection objective comprising deflection mirrors and projection exposure method Grant 9,459,435 - Schicketanz , et al. October 4, 2	2016-10-04
Reflective Optical Element, And Optical System Of A Microlithographic Projection Exposure Apparatus App 20160266499 - ENKISCH; Hartmut ; et al.	2016-09-15
Catadioptric Projection Objective App 20160231546 - Epple; Alexander ; et al.	2016-08-11
Euv Mirror And Optical System Comprising Euv Mirror App 20160195648 - Schicketanz; Thomas ; et al.	2016-07-07
Catadioptric Projection Objective Comprising Deflection Mirrors And Projection Exposure Method App 20160154228 - Schicketanz; Thomas ; et al.	2016-06-02
Method for correcting the surface form of a mirror Grant 9,341,756 - Mueller , et al. May 17, 2	2016-05-17
Imaging optical unit and projection exposure apparatus for projection lithography comprising such an imaging optical unit Grant 9,291,751 - Rostalski , et al. March 22, 2	2016-03-22
Catadioptric projection objective Grant 9,279,969 - Epple , et al. March 8, 2	2016-03-08
Catadioptric projection objective comprising deflection mirrors and projection exposure method Grant 9,274,327 - Schicketanz , et al. March 1, 2	2016-03-01
Method Of Lithographically Transferring A Pattern On A Light Sensitive Surface And Illumination System Of A Microlithographic Projection Exposure Apparatus App 20150301455 - Schlesener; Frank ; et al.	2015-10-22
Catadioptric Projection Objective Comprising Deflection Mirrors And Projection Exposure Method App 20150062725 - Schicketanz; Thomas ; et al.	2015-03-05
Catadioptric Projection Objective App 20150055212 - Epple; Alexander ; et al.	2015-02-26
Imaging Optical Unit And Projection Exposure Apparatus For Projection Lithography Comprising Such An Imaging Optical Unit App 20140368801 - Rostalski; Hans-Juergen ; et al.	2014-12-18
Projection objective Grant 8,902,406 - Walser , et al. December 2, 2	2014-12-02
Projection Lens for EUV Microlithography, Film Element and Method for Producing a Projection Lens Comprising a Film Element App 20140347721 - Bittner; Boris ; et al.	2014-11-27
Catadioptric projection objective comprising deflection mirrors and projection exposure method Grant 8,896,814 - Schicketanz , et al. November 25, 2	2014-11-25
Catadioptric projection objective Grant 8,873,137 - Epple , et al. October 28, 2	2014-10-28
Imaging Catoptric Euv Projection Optical Unit App 20140176928 - Ruoff; Johannes ; et al.	2014-06-26
Projection objective for a microlithographic EUV projection exposure apparatus Grant 8,693,098 - Rennon , et al. April 8, 2	2014-04-08
Method For Correcting The Surface Form Of A Mirror App 20140078481 - MUELLER; Juergen ; et al.	2014-03-20
Catadioptric Projection Objective App 20130242279 - EPPLE; Alexander ; et al.	2013-09-19
Catadioptric projection objective Grant 8,446,665 - Epple , et al. May 21, 2	2013-05-21
High transmission, high aperture catadioptric projection objective and projection exposure apparatus Grant 8,345,222 - Kraehmer , et al. January 1, 2	2013-01-01
Catadioptric Projection Objective Comprising Deflection Mirrors And Projection Exposure Method App 20120236277 - Schicketanz; Thomas ; et al.	2012-09-20
Projection Objective App 20110141446 - Walser; Reinhold ; et al.	2011-06-16
Projection Objective For A Microlithographic Euv Projection Exposure Apparatus App 20110090559 - Rennon; Siegfried ; et al.	2011-04-21
Catadioptric Projection Objective App 20110038061 - EPPLE; Alexander ; et al.	2011-02-17
High Transmission, High Aperture Catadioptric Projection Objective And Projection Exposure Apparatus App 20100097592 - Kraehmer; Daniel ; et al.	2010-04-22

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