Scheruebl; Thomas

Patent Applications and Registrations

Patent applications and USPTO patent grants for Scheruebl; Thomas.The latest application filed is for "method for detecting a structure of a lithography mask and device for carrying out the method".

Company Profile

5.18.15

Scheruebl; Thomas - Jena DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for detecting a structure of a lithography mask and device for carrying out the method Grant 11,079,338 - Matejka , et al. August 3, 2	2021-08-03
Method for correcting the critical dimension uniformity of a photomask for semiconductor lithography Grant 10,578,975 - Thaler , et al.	2020-03-03
Pattern inspection apparatus, pattern position measurement apparatus, aerial image measurement system, method for measuring aerial image, pattern position repairing apparatus, method for repairing pattern position, aerial image data processing apparatus, m Grant 10,572,990 - Yoshitake , et al. Feb	2020-02-25
Method For Detecting A Structure Of A Lithography Mask And Device For Carrying Out The Method App 20190391087 - Matejka; Ulrich ; et al.	2019-12-26
Apparatus And Method For Analyzing An Element Of A Photolithography Process With The Aid Of A Transformation Model App 20190354019 - Freytag; Alexander ; et al.	2019-11-21
Method for Correcting the Critical Dimension Uniformity of a Photomask for Semiconductor Lithography App 20190107783 - Thaler; Thomas ; et al.	2019-04-11
Pattern Inspection Apparatus, Pattern Position Measurement Apparatus, Aerial Image Measurement System, Method For Measuring Aerial Image,pattern Position Repairing Apparatus, Method For Repairing Pattern Position, Aerial Image Data Processing Apparatus, Method For Processing Aerial Image Data, Patte App 20180293720 - YOSHITAKE; Shusuke ; et al.	2018-10-11
Method for analyzing a photomask Grant 9,261,775 - Garetto , et al. February 16, 2	2016-02-16
Method For Analyzing A Photomask App 20140254915 - Garetto; Anthony ; et al.	2014-09-11
Method and device for measuring the relative local position error of one of the sections of an object that is exposed section by section Grant 8,731,273 - Arnz , et al. May 20, 2	2014-05-20
Method and apparatus for measuring of masks for the photo-lithography Grant 8,730,474 - Scheruebl , et al. May 20, 2	2014-05-20
Method for analyzing masks for photolithography Grant 8,718,354 - Stroessner , et al. May 6, 2	2014-05-06
Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection Grant RE44,216 - Totzeck , et al. May 14, 2	2013-05-14
Method and apparatus for analyzing a group of photolithographic masks Grant 8,264,535 - Kienzle , et al. September 11, 2	2012-09-11
Method And Device For Measuring The Relative Local Position Error Of One Of The Sections Of An Object That Is Exposed Section By Section App 20110229010 - Arnz; Michael ; et al.	2011-09-22
Method And Apparatus For Analyzing A Group Of Photolithographic Masks App 20100157046 - Kienzle; Oliver ; et al.	2010-06-24
Arrangement for inspecting objects, especially masks in microlithography Grant 7,525,115 - Dobschal , et al. April 28, 2	2009-04-28
Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection Grant 7,286,284 - Totzeck , et al. October 23, 2	2007-10-23
Arrangement for inspecting objects, especially masks in microlithography App 20060262306 - Dobschal; Hans-Juergen ; et al.	2006-11-23
Polarizer device for generating a defined spatial distribution of polarization states App 20060028706 - Totzeck; Michael ; et al.	2006-02-09
Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection App 20060012873 - Totzeck; Michael ; et al.	2006-01-19
Imaging system for an extreme ultraviolet (EUV) beam-based microscope Grant 6,894,837 - Dobschal , et al. May 17, 2	2005-05-17
Automatic focusing device for an optical appliance Grant 6,825,454 - Czarnetzki , et al. November 30, 2	2004-11-30
Imaging system for an extreme ultraviolet (EUV) beam-based microscope App 20040212891 - Dobschal, Hans-Juergen ; et al.	2004-10-28
Automatic focussing device for an optical appliance App 20040129858 - Czarnetzki, Norbert ; et al.	2004-07-08
Microscope with and automatic focusing device App 20040021936 - Czarnetzki, Norbert ; et al.	2004-02-05
Confocal microscopic device Grant 6,674,572 - Scheruebl , et al. January 6, 2	2004-01-06
Autofocussing device for optical instruments App 20030164440 - Czarnetzki, Nobert ; et al.	2003-09-04
Arrangement for confocal autofocussing App 20030112504 - Czarnetzki, Norbert ; et al.	2003-06-19

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