Patent | Date |
---|
Backside contacts for semiconductor devices Grant 11,437,283 - Lilak , et al. September 6, 2 | 2022-09-06 |
Advanced Lithography And Self-assembled Devices App 20220262722 - SCHENKER; Richard E. ;   et al. | 2022-08-18 |
Damascene plug and tab patterning with photobuckets Grant 11,373,900 - Lin , et al. June 28, 2 | 2022-06-28 |
Advanced lithography and self-assembled devices Grant 11,373,950 - Schenker , et al. June 28, 2 | 2022-06-28 |
Colored Gratings In Microelectronic Structures App 20220199420 - Singh; Gurpreet ;   et al. | 2022-06-23 |
Contact Over Active Gate Structures Using Directed Self-assembly For Advanced Integrated Circuit Structure Fabrication App 20220102210 - NYHUS; Paul A. ;   et al. | 2022-03-31 |
Passivating silicide-based approaches for conductive via fabrication and structures resulting therefrom Grant 11,239,112 - Chandhok , et al. February 1, 2 | 2022-02-01 |
Stacked Forksheet Transistors App 20210407999 - HUANG; Cheng-Ying ;   et al. | 2021-12-30 |
Directed Self-assembly Structures And Techniques App 20210375745 - Blackwell; James Munro ;   et al. | 2021-12-02 |
Dielectric Helmet-based Approaches For Back End Of Line (beol) Interconnect Fabrication And Structures Resulting Therefrom App 20210225698 - LIN; Kevin L. ;   et al. | 2021-07-22 |
Dielectric helmet-based approaches for back end of line (BEOL) interconnect fabrication and structures resulting therefrom Grant 11,011,463 - Lin , et al. May 18, 2 | 2021-05-18 |
Contact Over Active Gate Structures With Metal Oxide-caped Contacts To Inhibit Shorting App 20210091194 - HOURANI; Rami ;   et al. | 2021-03-25 |
Contact Over Active Gate Structures With Metal Oxide Layers To Inhibit Shorting App 20210090990 - HOURANI; Rami ;   et al. | 2021-03-25 |
Self-aligned Patterning With Colored Blocking And Structures Resulting Therefrom App 20210090997 - HARAN; Mohit K. ;   et al. | 2021-03-25 |
Advanced Lithography And Self-assembled Devices App 20210082800 - SCHENKER; Richard E. ;   et al. | 2021-03-18 |
Self-aligned hard masks with converted liners Grant 10,937,689 - Chandhok , et al. March 2, 2 | 2021-03-02 |
Subtractive Plug And Tab Patterning With Photobuckets For Back End Of Line (beol) Spacer-based Interconnects App 20210050261 - LIN; Kevin ;   et al. | 2021-02-18 |
Advanced lithography and self-assembled devices Grant 10,892,223 - Schenker , et al. January 12, 2 | 2021-01-12 |
Damascene Plug And Tab Patterning With Photobuckets For Back End Of Line (beol) Spacer-based Interconnects App 20210005511 - LIN; Kevin ;   et al. | 2021-01-07 |
Materials And Layout Design Options For Dsa On Transition Regions Over Active Die App 20200411501 - SINGH; Gurpreet ;   et al. | 2020-12-31 |
Subtractive plug and tab patterning with photobuckets for back end of line (BEOL) spacer-based interconnects Grant 10,867,853 - Lin , et al. December 15, 2 | 2020-12-15 |
1d Vertical Edge Blocking (veb) Via And Plug App 20200388534 - GULER; Leonard P. ;   et al. | 2020-12-10 |
Damascene plug and tab patterning with photobuckets for back end of line (BEOL) spacer-based interconnects Grant 10,804,141 - Lin , et al. October 13, 2 | 2020-10-13 |
Backside Contacts For Semiconductor Devices App 20200294998 - LILAK; AARON D. ;   et al. | 2020-09-17 |
Methods and masks for line end formation for back end of line (BEOL) interconnects and structures resulting therefrom Grant 10,770,291 - Schenker , et al. Sep | 2020-09-08 |
Maskless Air Gap Enabled By A Single Damascene Process App 20200203212 - RESHOTKO; Miriam R. ;   et al. | 2020-06-25 |
Passivating Silicide-based Approaches For Conductive Via Fabrication And Structures Resulting Therefrom App 20200090987 - CHANDHOK; Manish ;   et al. | 2020-03-19 |
Colored Self-aligned Subtractive Patterning By Asymmetric Spacer Formation App 20200075334 - SCHENKER; Richard E. ;   et al. | 2020-03-05 |
Advanced Lithography And Self-assembled Devices App 20200066629 - SCHENKER; Richard E. ;   et al. | 2020-02-27 |
Colored Self-aligned Subtractive Patterning App 20200066521 - LIN; Kevin ;   et al. | 2020-02-27 |
Structure and method to self align via to top and bottom of tight pitch metal interconnect layers Grant 10,553,532 - Schenker , et al. Fe | 2020-02-04 |
Self-aligned via below subtractively patterned interconnect Grant 10,546,772 - Chandhok , et al. Ja | 2020-01-28 |
Self-aligned Hard Masks With Converted Liners App 20190371657 - Chandhok; Manish ;   et al. | 2019-12-05 |
Subtractive Plug And Tab Patterning With Photobuckets For Back End Of Line (beol) Spacer-based Interconnects App 20190206733 - LIN; Kevin ;   et al. | 2019-07-04 |
Damascene Plug And Tab Patterning With Photobuckets For Back End Of Line (beol) Spacer-based Interconnects App 20190164815 - LIN; Kevin ;   et al. | 2019-05-30 |
Dielectric Helmet-based Approaches For Back End Of Line (beol) Interconnect Fabrication And Structures Resulting Therefrom App 20190139887 - LIN; Kevin L. ;   et al. | 2019-05-09 |
Self-aligned Via Below Subtractively Patterned Interconnect App 20190035677 - CHANDHOK; Manish ;   et al. | 2019-01-31 |
Grating Based Plugs And Cuts For Feature End Formation For Back End Of Line (beol) Interconnects And Structures Resulting Therefrom App 20180315590 - SCHENKER; Richard E. ;   et al. | 2018-11-01 |
Method for creating alternate hardmask cap interconnect structure with increased overlay margin Grant 10,109,583 - Bristol , et al. October 23, 2 | 2018-10-23 |
Method and structure to contact tight pitch conductive layers with guided vias using alternating hardmasks and encapsulating etchstop liner scheme Grant 10,032,643 - Chawla , et al. July 24, 2 | 2018-07-24 |
Method And Structure To Contact Tight Pitch Conductive Layers With Guided Vias Using Alternating Hardmasks And Encapsulating Etchstop Liner Scheme App 20170330761 - CHAWLA; Jasmeet S. ;   et al. | 2017-11-16 |
Subtractive self-aligned via and plug patterning for back end of line (BEOL) interconnects Grant 9,793,163 - Bristol , et al. October 17, 2 | 2017-10-17 |
Novel Method For Creating Alternate Hardmask Cap Interconnect Structure With Increased Overlay Margin App 20170263551 - BRISTOL; ROBERT L. ;   et al. | 2017-09-14 |
Structure And Method To Self Align Via To Top And Bottom Of Tight Pitch Metal Interconnect Layers App 20170263553 - SCHENKER; RICHARD E. ;   et al. | 2017-09-14 |
Method and structure to contact tight pitch conductive layers with guided vias Grant 9,659,860 - Schenker , et al. May 23, 2 | 2017-05-23 |
Self-aligned via and plug patterning with photobuckets for back end of line (BEOL) interconnects Grant 9,553,018 - Bristol , et al. January 24, 2 | 2017-01-24 |
Subtractive Self-Aligned Via and Plug Patterning for Back End of Line (BEOL) Interconnects App 20160197011 - BRISTOL; ROBERT L. ;   et al. | 2016-07-07 |
Methods for forming interconnect layers having tight pitch interconnect structures Grant 9,379,010 - Jezewski , et al. June 28, 2 | 2016-06-28 |
Method And Structure To Contact Tight Pitch Conductive Layers With Guided Vias App 20160148869 - SCHENKER; Richard E. ;   et al. | 2016-05-26 |
Self-aligned Via And Plug Patterning With Photobuckets For Back End Of Line (beol) Interconnects App 20160104642 - Bristol; Robert L. ;   et al. | 2016-04-14 |
Methods of forming parallel wires of different metal materials through double patterning and fill techniques Grant 9,312,204 - Clarke , et al. April 12, 2 | 2016-04-12 |
Self-aligned via and plug patterning with photobuckets for back end of line (BEOL) interconnects Grant 9,236,342 - Bristol , et al. January 12, 2 | 2016-01-12 |
Methods For Forming Interconnect Layers Having Tight Pitch Interconnect Structures App 20150214094 - Jezewski; Christopher J. ;   et al. | 2015-07-30 |
Self-aligned Via And Plug Patterning With Photobuckets For Back End Of Line (beol) Interconnects App 20150171010 - Bristol; Robert L. ;   et al. | 2015-06-18 |
Methods Of Forming Parallel Wires Of Different Metal Materials Through Double Patterning And Fill Techniques App 20150091174 - Clarke; James S. ;   et al. | 2015-04-02 |