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Patent applications and USPTO patent grants for Schenau; Koen Van Ingen.The latest application filed is for "anti-reflection coating for an euv mask".
Patent | Date |
---|---|
Anti-reflection coating for an EUV mask App 20070259275 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2007-11-08 |
Lithography measurements using scatterometry App 20060192936 - Schenau; Koen Van Ingen ;   et al. | 2006-08-31 |
Lithographic apparatus and device manufacturing method App 20060057471 - Schenau; Koen Van Ingen ;   et al. | 2006-03-16 |
Device manufacturing method and computer program App 20040137677 - Lowisch, Martin ;   et al. | 2004-07-15 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20040105081 - Schenau, Koen Van Ingen | 2004-06-03 |
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