Schellhorn; Uwe

Patent Applications and Registrations

Patent applications and USPTO patent grants for Schellhorn; Uwe.The latest application filed is for "device and method for the optical measurement of an optical system by using an immersion fluid".

Company Profile

0.11.11

Schellhorn; Uwe - Aalen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Beam control apparatus for an illumination beam and metrology system comprising an optical system containing such a beam control apparatus Grant 8,988,752 - Krebs , et al. March 24, 2	2015-03-24
Device And Method For The Optical Measurement Of An Optical System By Using An Immersion Fluid App 20140022524 - Wegmann; Ulrich ; et al.	2014-01-23
Method for calibrating a specimen stage of a metrology system and metrology system comprising a specimen stage Grant 8,473,237 - Huebel , et al. June 25, 2	2013-06-25
Beam Control Apparatus For An Illumination Beam And Metrology System Comprising An Optical System Containing Such A Beam Control Apparatus App 20130120820 - Krebs; Marten ; et al.	2013-05-16
Method for determination of residual errors Grant 8,416,412 - Schellhorn , et al. April 9, 2	2013-04-09
Device And Method For The Optical Measurement Of An Optical System By Using An Immersion Fluid App 20120113429 - Wegmann; Ulrich ; et al.	2012-05-10
Device and method for the optical measurement of an optical system by using an immersion fluid Grant 8,120,763 - Wegmann , et al. February 21, 2	2012-02-21
Method For Calibrating A Specimen Stage Of A Metrology System And Metrology System Comprising A Specimen Stage App 20100241384 - Huebel; Alexander ; et al.	2010-09-23
Apparatus And Method For Measuring The Positions Of Marks On A Mask App 20100153059 - Klose; Gerd ; et al.	2010-06-17
Method For Determination Of Residual Errors App 20100097608 - Schellhorn; Uwe ; et al.	2010-04-22
Device And Method For The Optical Measurement Of An Optical System By Using An Immersion Fluid App 20090257049 - Wegmann; Ulrich ; et al.	2009-10-15
Device And Method For The Optical Measurement Of An Optical System By Using An Immersion Fluid App 20090021726 - Wegmann; Ulrich ; et al.	2009-01-22
Device and method for the optical measurement of an optical system by using an immersion fluid Grant 7,408,652 - Wegmann , et al. August 5, 2	2008-08-05
Method for determining distortion and/or image surface Grant 7,400,388 - Emer , et al. July 15, 2	2008-07-15
Phase shifting wavefront interference method Grant 7,119,910 - Schellhorn October 10, 2	2006-10-10
Moire method and measuring system for measuring the distortion of an optical imaging system Grant 7,019,824 - Wegmann , et al. March 28, 2	2006-03-28
Method for determining distortion and/or image surface App 20060007429 - Emer; Wolfgang ; et al.	2006-01-12
Device and method for the optical measurement of an optical system, a container therefor, and a microlithography projection exposure machine App 20050243328 - Wegmann, Ulrich ; et al.	2005-11-03
Moire method and measuring system for measuring the distortion of an optical imaging system App 20050122506 - Wegmann, Ulrich ; et al.	2005-06-09
Moire method and a system for measuring the distortion of an optical imaging system Grant 6,816,247 - Heppner , et al. November 9, 2	2004-11-09

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