loadpatents
Patent applications and USPTO patent grants for Schellenberg; Franklin Mark.The latest application filed is for "method and system for nanoscale data recording".
Patent | Date |
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Method And System For Nanoscale Data Recording App 20220197150 - Schellenberg; Franklin Mark ;   et al. | 2022-06-23 |
Method and system for nanoscale data recording Grant 11,269,258 - Schellenberg , et al. March 8, 2 | 2022-03-08 |
Method And System For Nanoscale Data Recording App 20210124273 - Schellenberg; Franklin Mark ;   et al. | 2021-04-29 |
Method and system for nanoscale data recording Grant 10,884,340 - Schellenberg , et al. January 5, 2 | 2021-01-05 |
Method And System For Nanoscale Data Recording App 20200379356 - Schellenberg; Franklin Mark ;   et al. | 2020-12-03 |
Method and system for nanoscale data recording Grant 10,747,118 - Schellenberg , et al. A | 2020-08-18 |
Method And System For Nanoscale Data Recording App 20200166850 - Schellenberg; Franklin Mark ;   et al. | 2020-05-28 |
Method and system for nanoscale data recording Grant 10,539,880 - Schellenberg , et al. Ja | 2020-01-21 |
Method And System For Nanoscale Data Recording App 20190155167 - Schellenberg; Franklin Mark ;   et al. | 2019-05-23 |
Nanoscale pattern exposure system Grant 10,191,385 - Schellenberg , et al. Ja | 2019-01-29 |
Nanoscale Pattern Exposure System App 20180173106 - Schellenberg; Franklin Mark ;   et al. | 2018-06-21 |
System for creating nanoscale patterns Grant 9,891,536 - Schellenberg , et al. February 13, 2 | 2018-02-13 |
System For Creating Nanoscale Patterns App 20160377987 - Schellenberg; Franklin Mark ;   et al. | 2016-12-29 |
Super-resolution exposure system Grant 9,442,382 - Schellenberg , et al. September 13, 2 | 2016-09-13 |
Super-resolution Exposure System App 20160116846 - Schellenberg; Franklin Mark ;   et al. | 2016-04-28 |
Method for writing nanoscale patterns Grant 9,229,330 - Schellenberg , et al. January 5, 2 | 2016-01-05 |
Method and system for nanopatterning Grant 9,128,380 - Schellenberg , et al. September 8, 2 | 2015-09-08 |
Method And System For Writing Nanoscale Patterns App 20150198895 - Schellenberg; Franklin Mark ;   et al. | 2015-07-16 |
Method And System For Nanolithography App 20150042971 - Schellenberg; Franklin Mark ;   et al. | 2015-02-12 |
Method for nanolithography Grant 8,841,637 - Schellenberg , et al. September 23, 2 | 2014-09-23 |
Illuminating Waveguide Fabrication Method App 20140116982 - Schellenberg; Franklin Mark ;   et al. | 2014-05-01 |
Illuminating waveguide fabrication method Grant 8,710,463 - Schellenberg , et al. April 29, 2 | 2014-04-29 |
Method For Nanolithography App 20140055769 - Schellenberg; Franklin Mark ;   et al. | 2014-02-27 |
Nanolithography system Grant 8,507,881 - Schellenberg , et al. August 13, 2 | 2013-08-13 |
Illuminating waveguide fabrication method Grant 8,507,880 - Schellenberg , et al. August 13, 2 | 2013-08-13 |
Illuminating waveguide fabrication method App 20120312774 - Schellenberg; Franklin Mark ;   et al. | 2012-12-13 |
Nanolithography system App 20120257183 - Schellenberg; Franklin Mark ;   et al. | 2012-10-11 |
Illuminating waveguide fabrication method Grant 8,193,519 - Schellenberg , et al. June 5, 2 | 2012-06-05 |
Nanolithography system Grant 7,989,783 - Schellenberg , et al. August 2, 2 | 2011-08-02 |
Nanolithography system App 20100073657 - Schellenberg; Franklin Mark ;   et al. | 2010-03-25 |
Illuminating waveguide fabrication method App 20100075259 - Schellenberg; Franklin Mark ;   et al. | 2010-03-25 |
Nanolithography system Grant 7,586,583 - Schellenberg , et al. September 8, 2 | 2009-09-08 |
Nanolithography system App 20070125969 - Schellenberg; Franklin Mark ;   et al. | 2007-06-07 |
Chromeless phase mask layout generation Grant 7,172,838 - Maurer , et al. February 6, 2 | 2007-02-06 |
Chromeless phase mask layout generation App 20040063000 - Maurer, Wilhelm ;   et al. | 2004-04-01 |
Integrated device structure prediction based on model curvature Grant 6,643,616 - Granik , et al. November 4, 2 | 2003-11-04 |
Method for the repair of defects in lithographic masks Grant 6,159,641 - Baum , et al. December 12, 2 | 2000-12-12 |
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