| Patent | Date |
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Micromechanical Structure And Micromechanical Sensor
App 20220091154 - Nagel; Cristian ; et al. | 2022-03-24 |
Microelectromechanical System And Method For Manufacturing A Microelectromechanical System
App 20220048759 - Scheben; Rolf | 2022-02-17 |
Micromechanical Component For A Yaw Rate Sensor And Corresponding Production Method
App 20210333103 - Kuehnel; Matthias ; et al. | 2021-10-28 |
Micromechanical Device Including A Stop Spring Structure
App 20210323809 - Nagel; Cristian ; et al. | 2021-10-21 |
Micromechanical Sensor
App 20210214213 - Waldmann; Jan ; et al. | 2021-07-15 |
Microelectromechanical component
Grant 10,794,928 - Herzogenrath , et al. October 6, 2 | 2020-10-06 |
Micromechanical yaw rate sensor and method for operating same
Grant 10,753,742 - Neul , et al. A | 2020-08-25 |
Micromechanical yaw rate sensor and method for the production thereof
Grant 10,753,743 - Neul , et al. A | 2020-08-25 |
Sensor device and method for operating a sensor device having at least one seismic mass
Grant 10,260,879 - Maul , et al. | 2019-04-16 |
Micromechanical Yaw Rate Sensor and Method for Operating Same
App 20190056226 - Neul; Reinhard ; et al. | 2019-02-21 |
Microelectromechanical Component
App 20180334381 - Herzogenrath; Benny Pekka ; et al. | 2018-11-22 |
Micromechanical Yaw Rate Sensor and Method for the Production Thereof
App 20180321039 - Neul; Reinhard ; et al. | 2018-11-08 |
MEMS component including a diaphragm element which is attached via a spring structure to the component layer structure
Grant 10,035,696 - Purkl , et al. July 31, 2 | 2018-07-31 |
MEMS microphone element
Grant 9,998,828 - Scheben June 12, 2 | 2018-06-12 |
Rotation rate sensor and a method for operating a rotation rate sensor
Grant 9,945,669 - Balslink , et al. April 17, 2 | 2018-04-17 |
MEMS component including a sound-pressure-sensitive diaphragm element and piezosensitive signal detection
Grant 9,936,298 - Buck , et al. April 3, 2 | 2018-04-03 |
MEMS component including a sound-pressure-sensitive diaphragm element
Grant 9,914,636 - Buck , et al. March 13, 2 | 2018-03-13 |
Rotation-rate sensor having a substrate having a main extension plane for detecting a rotation rate
Grant 9,823,073 - Balslink , et al. November 21, 2 | 2017-11-21 |
Capacitive MEMS-sensor element having bond pads for the electrical contacting of the measuring capacitor electrodes
Grant 9,725,300 - Stahl , et al. August 8, 2 | 2017-08-08 |
Yaw-rate sensor with a compensating mass
Grant 9,651,375 - Kuhlmann , et al. May 16, 2 | 2017-05-16 |
Micromechanical sound transducer system and a corresponding manufacturing method
Grant 9,621,996 - Schelling , et al. April 11, 2 | 2017-04-11 |
Microphone element and device for detecting acoustic and ultrasound signals
Grant 9,571,938 - Schelling , et al. February 14, 2 | 2017-02-14 |
Mems Component Including A Sound-pressure-sensitive Diaphragm Element And Piezosensitive Signal Detection
App 20170026754 - Buck; Thomas ; et al. | 2017-01-26 |
Mems Component Including A Diaphragm Element Which Is Attached Via A Spring Structure To The Component Layer Structure
App 20170022047 - PURKL; Fabian ; et al. | 2017-01-26 |
Mems Component Including A Sound-pressure-sensitive Diaphragm Element
App 20170022046 - BUCK; Thomas ; et al. | 2017-01-26 |
Micromechanical Sound Transducer System And A Corresponding Manufacturing Method
App 20170013364 - SCHELLING; Christoph ; et al. | 2017-01-12 |
Sensor Device and Method for Operating a Sensor Device Having at Least One Seismic Mass
App 20160356599 - Maul; Robert ; et al. | 2016-12-08 |
Membrane arrangement for a microelectromechanical measuring transducer and method for producing a membrane arrangement
Grant 9,516,423 - Daley , et al. December 6, 2 | 2016-12-06 |
Micromechanical sensor system combination and a corresponding manufacturing method
Grant 9,516,424 - Schelling , et al. December 6, 2 | 2016-12-06 |
Capacitive Mems-sensor Element Having Bond Pads For The Electrical Contacting Of The Measuring Capacitor Electrodes
App 20160280534 - Stahl; Heiko ; et al. | 2016-09-29 |
MEMS component for generating pressure pulses
Grant 9,369,809 - Zoellin , et al. June 14, 2 | 2016-06-14 |
Micromechanical spring for an inertial sensor
App 20160138666 - HOEPPNER; Christian ; et al. | 2016-05-19 |
Mems Microphone Element
App 20160112803 - Scheben; Rolf | 2016-04-21 |
Rotation Rate Sensor And A Method For Operating A Rotation Rate Sensor
App 20160084653 - Balslink; Thorsten ; et al. | 2016-03-24 |
Rotation Rate Sensor Having A Substrate Having A Main Extension Plance For Detecting A Rotation Rate
App 20160069682 - BALSLINK; Thorsten ; et al. | 2016-03-10 |
Capacitive MEMS element including a pressure-sensitive diaphragm
Grant 9,277,329 - Schelling , et al. March 1, 2 | 2016-03-01 |
Yaw rate sensor
Grant 9,255,801 - Kuhlmann , et al. February 9, 2 | 2016-02-09 |
Micromechanical Sensor System Combination and a Corresponding Manufacturing Method
App 20150365751 - Schelling; Christoph ; et al. | 2015-12-17 |
Component Having A Microphone And Media Sensor Function
App 20150256917 - SCHELLING; Christoph ; et al. | 2015-09-10 |
Energy source and method for supplying an autonomous electrical load system and the use of same
Grant 9,112,108 - Scheben , et al. August 18, 2 | 2015-08-18 |
Mems Microphone Element And Device Including Such An Mems Microphone Element
App 20150156591 - SCHELLING; Christoph ; et al. | 2015-06-04 |
Yaw rate sensor
Grant 8,997,566 - Ohms , et al. April 7, 2 | 2015-04-07 |
Membrane Arrangement for a MicroElectromechanical Measuring Transducer and Method for Producing a Membrane Arrangement
App 20150078590 - Daley; Mike ; et al. | 2015-03-19 |
Capacitive mems element including a pressure-sensitive diaphragm
App 20150063608 - SCHELLING; Christoph ; et al. | 2015-03-05 |
rotational rate sensor having preset quadrature offset
App 20150052999 - Scheben; Rolf ; et al. | 2015-02-26 |
Yaw-rate sensor
Grant 8,943,891 - Ohms , et al. February 3, 2 | 2015-02-03 |
Yaw rate sensor
Grant 8,875,575 - Ohms , et al. November 4, 2 | 2014-11-04 |
Yaw-rate sensor and method for operating a yaw-rate sensor
Grant 8,844,357 - Scheben , et al. September 30, 2 | 2014-09-30 |
Yaw-rate sensor and method for operating a yaw-rate sensor
Grant 8,783,105 - Kuhlmann , et al. July 22, 2 | 2014-07-22 |
Mems Component For Generating Pressure Pulses
App 20140169594 - ZOELLIN; Jochen ; et al. | 2014-06-19 |
Micromechanical Structure
App 20140116134 - Classen; Johannes ; et al. | 2014-05-01 |
Yam Rate Sensor
App 20130340522 - KUHLMANN; Burkhard ; et al. | 2013-12-26 |
Yaw-rate Sensor
App 20130298672 - KUHLMANN; Burkhard ; et al. | 2013-11-14 |
Energy Source And Method For Supplying An Autonomous Electrical Load System And The Use Of Same
App 20130284227 - Scheben; Rolf ; et al. | 2013-10-31 |
Yaw-rate sensor and method for operating a yaw-rate sensor
App 20120152019 - Kuhlmann; Burkhard ; et al. | 2012-06-21 |
Yaw-rate Sensor And Method For Operating A Yaw-rate Sensor
App 20120125099 - Scheben; Rolf ; et al. | 2012-05-24 |
Yaw Rate Sensor
App 20120011933 - OHMS; Torsten ; et al. | 2012-01-19 |
Yaw rate sensor
App 20110296913 - Ohms; Torsten ; et al. | 2011-12-08 |
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