| Patent | Date |
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Method For Depositing An Epitaxial Layer On A Front Side Of A Semiconductor Wafer, And Device For Carrying Out The Method
App 20220267926 - HABERECHT; Joerg ; et al. | 2022-08-25 |
Susceptor for holding a semiconductor wafer having an orientation notch, a method for depositing a layer on a semiconductor wafer, and semiconductor wafer
Grant 11,380,621 - Schauer , et al. July 5, 2 | 2022-07-05 |
Susceptor for holding a semiconductor wafer with an orientation notch during the deposition of a layer on a front side of the semiconductor wafer and method for depositing the layer by using the susceptor
Grant 10,991,614 - Schauer April 27, 2 | 2021-04-27 |
Epitaxially Coated Semiconductor Wafer Of Monocrystalline Silicon And Method For Production Thereof
App 20210087705 - SCHAUER; Reinhard ; et al. | 2021-03-25 |
Susceptor For Holding A Semiconductor Wafer With An Orientation Notch During The Deposition Of A Layer On A Front Side Of The Semiconductor Wafer And Method For Depositing The Layer By Using The Susceptor
App 20200365443 - SCHAUER; Reinhard | 2020-11-19 |
Method for producing a semiconductor wafer with epitaxial layer in a deposition chamber, apparatus for producing a semiconductor wafer with epitaxial layer, and semiconductor wafer with epitaxial layer
Grant 10,597,795 - Moos , et al. | 2020-03-24 |
Method For Producing A Semiconductor Wafer With Epitaxial Layer In A Deposition Chamber, Apparatus For Producing A Semiconductor Wafer With Epitaxial Layer, And Semiconductor Wafer With Epitaxial Layer
App 20180282900 - MOOS; Patrick ; et al. | 2018-10-04 |
Susceptor For Holding A Semiconductor Wafer Having An Orientation Notch, A Method For Depositing A Layer On A Semiconductor Wafer, And Semiconductor Wafer
App 20180211923 - SCHAUER; Reinhard ; et al. | 2018-07-26 |
Susceptor for holding a semiconductor wafer having an orientation notch, a method for depositing a layer on a semiconductor wafer, and semiconductor wafer
Grant 9,991,208 - Schauer , et al. June 5, 2 | 2018-06-05 |
Susceptor For Holding A Semiconductor Wafer Having An Orientation Notch, A Method For Depositing A Layer On A Semiconductor Wafer, And Semiconductor Wafer
App 20170117228 - SCHAUER; Reinhard ; et al. | 2017-04-27 |
Method for producing an epitaxially coated semiconductor wafer
Grant 9,240,316 - Schauer , et al. January 19, 2 | 2016-01-19 |
Epitaxially coated silicon wafer and method for producing an epitaxially coated silicon wafer
Grant 8,304,860 - Passek , et al. November 6, 2 | 2012-11-06 |
Susceptor For Supporting A Semiconductor Wafer And Method For Depositing A Layer On A Front Side Of A Semiconductor Wafer
App 20120270407 - Werner; Norbert ; et al. | 2012-10-25 |
Epitaxially coated silicon wafer and method for producing epitaxially coated silicon wafers
Grant 7,935,614 - Schauer , et al. May 3, 2 | 2011-05-03 |
Epitaxially coated silicon wafer and method for producing epitaxially coated silicon wafers
Grant 7,922,813 - Schauer , et al. April 12, 2 | 2011-04-12 |
Epitaxially Coated Semiconductor Wafer and Device and Method For Producing An Epitaxially Coated Semiconductor Wafer
App 20110073041 - Schauer; Reinhard ; et al. | 2011-03-31 |
Epitaxially coated semiconductor wafer and device and method for producing an epitaxially coated semiconductor wafer
Grant 7,838,398 - Schauer , et al. November 23, 2 | 2010-11-23 |
Epitaxially coated silicon wafer and method for producing an epitaxially coated silicon wafer
App 20100224964 - Passek; Friedrich ; et al. | 2010-09-09 |
Epitaxially coated silicon wafer and method for producing epitaxially coated silicon wafer
Grant 7,659,207 - Schauer , et al. February 9, 2 | 2010-02-09 |
Method for producing an epitaxially coated semiconductor wafer
App 20090277376 - Schauer; Reinhard ; et al. | 2009-11-12 |
Epitaxially Coated Silicon Wafer And Method For Producing Epitaxially Coated Silicon Wafers
App 20090261456 - Schauer; Reinhard ; et al. | 2009-10-22 |
Epitaxially coated silicon wafer and method for producing epitaxially coated silicon wafers
Grant 7,579,261 - Schauer , et al. August 25, 2 | 2009-08-25 |
Epitaxially coated semiconductor wafer and device and method for producing an epitaxially coated semiconductor wafer
App 20080118712 - Schauer; Reinhard ; et al. | 2008-05-22 |
Coated semiconductor wafer, and process and apparatus for producing the semiconductor wafer
Grant 7,285,483 - Schauer , et al. October 23, 2 | 2007-10-23 |
Epitaxially coated silicon wafer and method for producing epitaxially coated silicon wafers
App 20070062438 - Schauer; Reinhard ; et al. | 2007-03-22 |
Epitaxially coated silicon wafer and method for producing epitaxially coated silicon wafers
App 20070066036 - Schauer; Reinhard ; et al. | 2007-03-22 |
Epitaxially coated silicon wafer and method for producing epitaxially coated silicon wafer
App 20070066082 - Schauer; Reinhard ; et al. | 2007-03-22 |
Coated semiconductor wafer, and process and device for producing the semiconductor wafer
Grant 7,101,794 - Schauer , et al. September 5, 2 | 2006-09-05 |
Coated semiconductor wafer, and process and apparatus for producing the semiconductor wafer
App 20060079089 - Schauer; Reinhard ; et al. | 2006-04-13 |
Coated semiconductor wafer, and process and device for producing the semiconductor wafer
App 20040266181 - Schauer, Reinhard ; et al. | 2004-12-30 |
Semiconductor wafer with a thin epitaxial silicon layer, and production process
App 20040144977 - Schauer, Reinhard ; et al. | 2004-07-29 |
Method for the production of an epitaxially grown semiconductor wafer
Grant 6,630,024 - Schmolke , et al. October 7, 2 | 2003-10-07 |
Method for the production of an epitaxially grown semiconductor wafer
App 20020022351 - Schmolke, Rudiger ; et al. | 2002-02-21 |
Standard for a nanotopography unit, and a method for producing the standard
App 20010041258 - Passek, Friedrich ; et al. | 2001-11-15 |
Method for producing a semiconductor wafer
Grant 6,306,735 - Schauer October 23, 2 | 2001-10-23 |
Epitaxially coated semiconductor wafers having low-oxygen zone of adjustable extent and process for producing same
Grant 5,355,831 - Schauer October 18, 1 | 1994-10-18 |
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