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Patent applications and USPTO patent grants for Schattenburg; Mark L..The latest application filed is for "exposure dose homogenization through rotation, translation, and variable processing conditions".
Patent | Date |
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Exposure dose homogenization through rotation, translation, and variable processing conditions Grant 9,612,534 - Schattenburg , et al. April 4, 2 | 2017-04-04 |
Exposure Dose Homogenization Through Rotation, Translation, And Variable Processing Conditions App 20160291474 - SCHATTENBURG; Mark L. ;   et al. | 2016-10-06 |
Method for shaping sheet thermoplastic and the like Grant 8,025,832 - Akilian , et al. September 27, 2 | 2011-09-27 |
Method for Shaping Sheet Thermoplastic and the Like App 20090302511 - Akilian; Mireille K. ;   et al. | 2009-12-10 |
Spatial phase locking with shaped electron beam lithography Grant 6,822,248 - Ferrera , et al. November 23, 2 | 2004-11-23 |
Spatial phase locking with shaped electron beam lithography App 20020130274 - Ferrera, Juan ;   et al. | 2002-09-19 |
Holographic lithography Grant 5,142,385 - Anderson , et al. August 25, 1 | 1992-08-25 |
Energy beam locating Grant 5,136,169 - Smith , et al. August 4, 1 | 1992-08-04 |
Lithography mask with a .pi.-phase shifting attenuator Grant 4,890,309 - Smith , et al. December 26, 1 | 1989-12-26 |
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