Scharnweber; Ralf

Patent Applications and Registrations

Patent applications and USPTO patent grants for Scharnweber; Ralf.The latest application filed is for "illumination system for a microlithographic projection exposure apparatus".

Company Profile

0.14.12

Scharnweber; Ralf - Aalen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method Grant 9,946,161 - Saenger , et al. April 17, 2	2018-04-17
Illumination system for a microlithographic projection exposure apparatus Grant 9,575,414 - Wangler , et al. February 21, 2	2017-02-21
Illumination System For A Microlithographic Projection Exposure Apparatus App 20160077446 - Wangler; Johannes ; et al.	2016-03-17
Illumination system for a microlithographic projection exposure apparatus Grant 9,217,930 - Wangler , et al. December 22, 2	2015-12-22
Method for a multiple exposure, microlithography projection exposure installation and a projection system Grant 8,634,060 - Scharnweber January 21, 2	2014-01-21
Illumination optics for EUV microlithography and related system and apparatus Grant 8,587,767 - Fiolka , et al. November 19, 2	2013-11-19
Optical integrator for an illumination system of a microlithographic projection exposure apparatus Grant 8,520,307 - Wolf , et al. August 27, 2	2013-08-27
Illumination System For A Microlithographic Projection Exposure Apparatus App 20130148092 - Wangler; Johannes ; et al.	2013-06-13
Optical System For A Microlithographic Projection Exposure Apparatus And Microlithographic Exposure Method App 20130077077 - Saenger; Ingo ; et al.	2013-03-28
Illumination system for a microlithographic projection exposure apparatus Grant 8,395,756 - Wangler , et al. March 12, 2	2013-03-12
Optical Integrator For An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20110083542 - Wolf; Oliver ; et al.	2011-04-14
Illumination Optics For Euv Microlithography And Related System And Apparatus App 20110063598 - Fiolka; Damian ; et al.	2011-03-17
Optical integrator for an illumination system of a microlithographic projection exposure apparatus Grant 7,880,969 - Wolf , et al. February 1, 2	2011-02-01
Method for a multiple exposure, microlithography projection exposure installation and a projection system Grant 7,875,418 - Scharnweber January 25, 2	2011-01-25
Method For A Multiple Exposure, Microlithography Projection Exposure Installation And A Projection System App 20100173250 - Scharnweber; Ralf	2010-07-08
Method for a multiple exposure, microlithography projection exposure installation and a projection system Grant 7,561,253 - Scharnweber July 14, 2	2009-07-14
Illumination System For A Microlithographic Projection Exposure Apparatus App 20090021716 - Wangler; Johannes ; et al.	2009-01-22
Optical Integrator For An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20090021839 - Wolf; Oliver ; et al.	2009-01-22
Method For A Multiple Exposure, Microlithography Projection Exposure Installation And A Projection System App 20080311526 - Scharnweber; Ralf	2008-12-18
Illumination system for a microlithographic projection exposure apparatus App 20060055909 - Fiolka; Damian ; et al.	2006-03-16
Method for a multiple exposure, microlithography projection exposure installation and a projection system App 20050213070 - Scharnweber, Ralf	2005-09-29

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