loadpatents
name:-0.0084021091461182
name:-0.0079090595245361
name:-0.00055789947509766
Scharl; Stefan Patent Filings

Scharl; Stefan

Patent Applications and Registrations

Patent applications and USPTO patent grants for Scharl; Stefan.The latest application filed is for "exposure system".

Company Profile
0.6.6
  • Scharl; Stefan - Wasserburg DE
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Exposure system
Grant 8,248,581 - Opower , et al. August 21, 2
2012-08-21
Method and device for producing exposed structures
Grant 8,027,018 - Opower , et al. September 27, 2
2011-09-27
Exposure system
Grant 7,705,967 - Opower , et al. April 27, 2
2010-04-27
Lithography exposure device having a plurality of radiation sources
Grant 7,652,750 - Opower , et al. January 26, 2
2010-01-26
Exposure system
App 20080316454 - Opower; Hans ;   et al.
2008-12-25
Exposure system
App 20060244943 - Opower; Hans ;   et al.
2006-11-02
Lithography exposure device
App 20060170893 - Opower; Hans ;   et al.
2006-08-03
Apparatus for exposing substrate materials
Grant 7,019,818 - Opower , et al. March 28, 2
2006-03-28
Method and device for producing exposed structures
App 20050282087 - Opower, Hans ;   et al.
2005-12-22
Apparatus for exposing substrate materials
App 20050083509 - Opower, Hans ;   et al.
2005-04-21
Lithography exposure device
Grant 6,859,261 - Opower , et al. February 22, 2
2005-02-22
Lithography exposure device
App 20030160948 - Opower, Hans ;   et al.
2003-08-28

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