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name:-0.022889852523804
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Schaffer; Dirk Patent Filings

Schaffer; Dirk

Patent Applications and Registrations

Patent applications and USPTO patent grants for Schaffer; Dirk.The latest application filed is for "optical element for the beam guidance of imaging light in projection lithography".

Company Profile
4.24.20
  • Schaffer; Dirk - Jena DE
  • Schaffer; Dirk - Aalen DE
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Optical element for the beam guidance of imaging light in projection lithography
Grant 11,029,606 - Prochnau , et al. June 8, 2
2021-06-08
Optical Element For The Beam Guidance Of Imaging Light In Projection Lithography
App 20200150544 - Prochnau; Jens ;   et al.
2020-05-14
Mounting arrangement for an optical imaging arrangement
Grant 10,520,838 - Schaffer , et al. Dec
2019-12-31
Mounting Arrangement For An Optical Imaging Arrangement
App 20190086823 - Schaffer; Dirk ;   et al.
2019-03-21
Optical element module with minimized parasitic loads
Grant 10,215,948 - Kugler , et al. Feb
2019-02-26
Optical element unit for exposure processes
Grant 10,203,607 - Schwertner , et al. Feb
2019-02-12
Moveably mounted component of projection exposure system, as well as device and method for movement limitation for same
Grant 10,095,126 - Prochnau , et al. October 9, 2
2018-10-09
Optical arrangement of a microlithographic projection exposure apparatus
Grant 10,007,186 - Prochnau , et al. June 26, 2
2018-06-26
Mirror module, in particular for a microlithographic projection exposure appararatus
Grant 9,996,015 - Prochnau , et al. June 12, 2
2018-06-12
Mirror arrangement for a lithography apparatus and method for producing the same
Grant 9,869,937 - Schaffer January 16, 2
2018-01-16
Moveably Mounted Component Of Projection Exposure System, As Well As Device And Method For Movement Limitation For Same
App 20170357164 - Prochnau; Jens ;   et al.
2017-12-14
Optical Arrangement Of A Microlithographic Projection Exposure Apparatus
App 20170192360 - Prochnau; Jens ;   et al.
2017-07-06
Mirror Module, In Particular For A Microlithographic Projection Exposure Appararatus
App 20170153552 - Prochnau; Jens ;   et al.
2017-06-01
Lithography apparatus and method for producing a mirror arrangement
Grant 9,459,538 - Schaffer , et al. October 4, 2
2016-10-04
Optical Element Unit And Method Of Supporting An Optical Element
App 20160109679 - Schaffer; Dirk ;   et al.
2016-04-21
Optical arrangement in a microlithographic projection exposure apparatus
Grant 9,250,417 - Schaffer , et al. February 2, 2
2016-02-02
Optical element unit and method of supporting an optical element
Grant 9,134,501 - Schaffer , et al. September 15, 2
2015-09-15
Mirror Arrangement For A Lithography Apparatus And Method For Producing The Same
App 20150168844 - Schaffer; Dirk
2015-06-18
Optical Element Unit For Exposure Processes
App 20150168846 - Schwertner; Tilman ;   et al.
2015-06-18
Optical element unit for exposure processes having sealing element
Grant 9,046,795 - Schwertner , et al. June 2, 2
2015-06-02
Lithography Apparatus And Method For Producing A Mirror Arrangement
App 20150055112 - Schaffer; Dirk ;   et al.
2015-02-26
Method for bonding bodies and composite body
Grant 8,927,090 - Chung , et al. January 6, 2
2015-01-06
Optical element for UV or EUV lithography with coatings having optimized stress and thickness
Grant 8,848,167 - Lippert , et al. September 30, 2
2014-09-30
Device For The Low-deformation Replaceable Mounting Of An Optical Element
App 20140063628 - Sorg; Franz ;   et al.
2014-03-06
Device for the low-deformation replaceable mounting of an optical element
Grant 8,582,081 - Sorg , et al. November 12, 2
2013-11-12
Optical Element Module With Minimized Parasitic Loads
App 20130100547 - Kugler; Jens ;   et al.
2013-04-25
Optical element module with minimized parasitic loads
Grant 8,351,139 - Kugler , et al. January 8, 2
2013-01-08
Optical Arrangement In A Microlithographic Projection Exposure Apparatus
App 20120300183 - Schaffer; Dirk ;   et al.
2012-11-29
Method For Bonding Bodies And Composite Body
App 20120082823 - CHUNG; Hin Yiu Anthony ;   et al.
2012-04-05
Optical Element For Uv Or Euv Lithography
App 20120044473 - LIPPERT; Johannes ;   et al.
2012-02-23
Optical Element Module With Minimized Parasitic Loads
App 20100214675 - Kugler; Jens ;   et al.
2010-08-26
Optical element unit and method of supporting an optical element
App 20090147229 - Schaffer; Dirk ;   et al.
2009-06-11
Device For The Low-deformation Replaceable Mounting Of An Optical Element
App 20090122288 - Sorg; Franz ;   et al.
2009-05-14
Device for the low-deformation replaceable mounting of an optical element
Grant 7,471,469 - Sorg , et al. December 30, 2
2008-12-30
Optical Element Unit For Exposure Processes
App 20080225247 - Schwertner; Tilman ;   et al.
2008-09-18
Low-deformation support device of an optical element
Grant 7,085,080 - Schaffer , et al. August 1, 2
2006-08-01
Device for the low-deformation replaceable mounting of an optical element
App 20060158749 - Sorg; Franz ;   et al.
2006-07-20
Low-deformation support device of an optical element
App 20050128607 - Schaffer, Dirk ;   et al.
2005-06-16

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