Patent | Date |
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Optical element for the beam guidance of imaging light in projection lithography Grant 11,029,606 - Prochnau , et al. June 8, 2 | 2021-06-08 |
Optical Element For The Beam Guidance Of Imaging Light In Projection Lithography App 20200150544 - Prochnau; Jens ;   et al. | 2020-05-14 |
Mounting arrangement for an optical imaging arrangement Grant 10,520,838 - Schaffer , et al. Dec | 2019-12-31 |
Mounting Arrangement For An Optical Imaging Arrangement App 20190086823 - Schaffer; Dirk ;   et al. | 2019-03-21 |
Optical element module with minimized parasitic loads Grant 10,215,948 - Kugler , et al. Feb | 2019-02-26 |
Optical element unit for exposure processes Grant 10,203,607 - Schwertner , et al. Feb | 2019-02-12 |
Moveably mounted component of projection exposure system, as well as device and method for movement limitation for same Grant 10,095,126 - Prochnau , et al. October 9, 2 | 2018-10-09 |
Optical arrangement of a microlithographic projection exposure apparatus Grant 10,007,186 - Prochnau , et al. June 26, 2 | 2018-06-26 |
Mirror module, in particular for a microlithographic projection exposure appararatus Grant 9,996,015 - Prochnau , et al. June 12, 2 | 2018-06-12 |
Mirror arrangement for a lithography apparatus and method for producing the same Grant 9,869,937 - Schaffer January 16, 2 | 2018-01-16 |
Moveably Mounted Component Of Projection Exposure System, As Well As Device And Method For Movement Limitation For Same App 20170357164 - Prochnau; Jens ;   et al. | 2017-12-14 |
Optical Arrangement Of A Microlithographic Projection Exposure Apparatus App 20170192360 - Prochnau; Jens ;   et al. | 2017-07-06 |
Mirror Module, In Particular For A Microlithographic Projection Exposure Appararatus App 20170153552 - Prochnau; Jens ;   et al. | 2017-06-01 |
Lithography apparatus and method for producing a mirror arrangement Grant 9,459,538 - Schaffer , et al. October 4, 2 | 2016-10-04 |
Optical Element Unit And Method Of Supporting An Optical Element App 20160109679 - Schaffer; Dirk ;   et al. | 2016-04-21 |
Optical arrangement in a microlithographic projection exposure apparatus Grant 9,250,417 - Schaffer , et al. February 2, 2 | 2016-02-02 |
Optical element unit and method of supporting an optical element Grant 9,134,501 - Schaffer , et al. September 15, 2 | 2015-09-15 |
Mirror Arrangement For A Lithography Apparatus And Method For Producing The Same App 20150168844 - Schaffer; Dirk | 2015-06-18 |
Optical Element Unit For Exposure Processes App 20150168846 - Schwertner; Tilman ;   et al. | 2015-06-18 |
Optical element unit for exposure processes having sealing element Grant 9,046,795 - Schwertner , et al. June 2, 2 | 2015-06-02 |
Lithography Apparatus And Method For Producing A Mirror Arrangement App 20150055112 - Schaffer; Dirk ;   et al. | 2015-02-26 |
Method for bonding bodies and composite body Grant 8,927,090 - Chung , et al. January 6, 2 | 2015-01-06 |
Optical element for UV or EUV lithography with coatings having optimized stress and thickness Grant 8,848,167 - Lippert , et al. September 30, 2 | 2014-09-30 |
Device For The Low-deformation Replaceable Mounting Of An Optical Element App 20140063628 - Sorg; Franz ;   et al. | 2014-03-06 |
Device for the low-deformation replaceable mounting of an optical element Grant 8,582,081 - Sorg , et al. November 12, 2 | 2013-11-12 |
Optical Element Module With Minimized Parasitic Loads App 20130100547 - Kugler; Jens ;   et al. | 2013-04-25 |
Optical element module with minimized parasitic loads Grant 8,351,139 - Kugler , et al. January 8, 2 | 2013-01-08 |
Optical Arrangement In A Microlithographic Projection Exposure Apparatus App 20120300183 - Schaffer; Dirk ;   et al. | 2012-11-29 |
Method For Bonding Bodies And Composite Body App 20120082823 - CHUNG; Hin Yiu Anthony ;   et al. | 2012-04-05 |
Optical Element For Uv Or Euv Lithography App 20120044473 - LIPPERT; Johannes ;   et al. | 2012-02-23 |
Optical Element Module With Minimized Parasitic Loads App 20100214675 - Kugler; Jens ;   et al. | 2010-08-26 |
Optical element unit and method of supporting an optical element App 20090147229 - Schaffer; Dirk ;   et al. | 2009-06-11 |
Device For The Low-deformation Replaceable Mounting Of An Optical Element App 20090122288 - Sorg; Franz ;   et al. | 2009-05-14 |
Device for the low-deformation replaceable mounting of an optical element Grant 7,471,469 - Sorg , et al. December 30, 2 | 2008-12-30 |
Optical Element Unit For Exposure Processes App 20080225247 - Schwertner; Tilman ;   et al. | 2008-09-18 |
Low-deformation support device of an optical element Grant 7,085,080 - Schaffer , et al. August 1, 2 | 2006-08-01 |
Device for the low-deformation replaceable mounting of an optical element App 20060158749 - Sorg; Franz ;   et al. | 2006-07-20 |
Low-deformation support device of an optical element App 20050128607 - Schaffer, Dirk ;   et al. | 2005-06-16 |