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Nanosecond Pulsed Electric Field System App 20220023631 - KRIEG; Kenneth R. ;   et al. | 2022-01-27 |
Nanosecond Pulsed Power Sources Having Multi-core Transformers App 20210187292 - HUANG; Chaofeng ;   et al. | 2021-06-24 |
Microstructure sealing tool and methods of using the same Grant 7,655,553 - Schaadt February 2, 2 | 2010-02-02 |
Methods and apparatus of etch process control in fabrications of microstructures Grant 7,645,704 - Shi , et al. January 12, 2 | 2010-01-12 |
Microstructure Sealing Tool And Methods Of Using The Same App 20070172991 - Schaadt; Gregory P. | 2007-07-26 |
Apparatus And Method For Detecting An Endpoint In A Vapor Phase Etch App 20070119814 - Patel; Satyadev R. ;   et al. | 2007-05-31 |
Apparatus and method for detecting an endpoint in a vapor phase etch Grant 7,189,332 - Patel , et al. March 13, 2 | 2007-03-13 |
Method for vapor phase etching of silicon Grant 7,041,224 - Patel , et al. May 9, 2 | 2006-05-09 |
Etching method used in fabrications of microstructures Grant 7,027,200 - Shi , et al. April 11, 2 | 2006-04-11 |
Apparatus and method for flow of process gas in an ultra-clean environment Grant 6,949,202 - Patel , et al. September 27, 2 | 2005-09-27 |
Method for achieving improved selectivity in an etching process Grant 6,942,811 - Patel , et al. September 13, 2 | 2005-09-13 |
Etching method in fabrications of microstructures Grant 6,939,472 - Schaadt , et al. September 6, 2 | 2005-09-06 |
Methods and apparatus of etch process control in fabrications of microstructures App 20050059254 - Shi, Hongqin ;   et al. | 2005-03-17 |
Etching method in fabrications of microstructures App 20050059253 - Schaadt, Gregory P. ;   et al. | 2005-03-17 |
Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants App 20050045276 - Patel, Satyadev R. ;   et al. | 2005-03-03 |
Etching method used in fabrications of microstructures App 20050020089 - Shi, Hongqin ;   et al. | 2005-01-27 |
Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants Grant 6,800,210 - Patel , et al. October 5, 2 | 2004-10-05 |
Apparatus and method for detecting an endpoint in a vapor phase etch App 20040069747 - Patel, Satyadev R. ;   et al. | 2004-04-15 |
Method for vapor phase etching of silicon App 20020195423 - Patel, Satyadev R. ;   et al. | 2002-12-26 |
Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants App 20020197761 - Patel, Satyadev R. ;   et al. | 2002-12-26 |
Method for achieving improved selectivity in an etching process App 20020121502 - Patel, Satyadev R. ;   et al. | 2002-09-05 |
Fluoride gas etching of silicon with improved selectivity Grant 6,290,864 - Patel , et al. September 18, 2 | 2001-09-18 |