Scaccabarozzi; Luigi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Scaccabarozzi; Luigi.The latest application filed is for "membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane".

Company Profile

3.19.27

Scaccabarozzi; Luigi - Valkenswaard NL
Scaccabarozzi; Luigi - Warkenswaard NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane Grant 10,698,312 - Van Zwol , et al.	2020-06-30
Suppression filter, radiation collector and radiation source for a lithographic apparatus; method of determining a separation distance between at least two reflective surface levels of a suppression filter Grant 10,678,140 - Banine , et al.	2020-06-09
Membranes For Use Within A Lithographic Apparatus And A Lithographic Apparatus Comprising Such A Membrane App 20190146332 - VAN ZWOL; Pieter-Jan ; et al.	2019-05-16
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane Grant 10,228,615 - Nikipelov , et al.	2019-03-12
Lithographic apparatus Grant 10,139,725 - Wiley , et al. Nov	2018-11-27
Suppression Filter, Radiation Collector And Radiation Source For A Lithographic Apparatus; Method Of Determining A Separation Distance Between At Least Two Reflective Surface Levels Of A Suppression Filter App 20180246414 - BANINE; Vadim Yevgenyevich ; et al.	2018-08-30
Membranes For Use Within A Lithographic Apparatus And A Lithographic Apparatus Comprising Such A Membrane App 20170205704 - NIKIPELOV; Andrey Alexandrovich ; et al.	2017-07-20
Lithographic apparatus and method of manufacturing a device Grant 9,606,445 - Banine , et al. March 28, 2	2017-03-28
Lithographic apparatus and device manufacturing method Grant 9,563,137 - Lammers , et al. February 7, 2	2017-02-07
Methods and apparatus for inspection of articles, EUV lithography reticles, lithography apparatus and method of manufacturing devices Grant 9,488,922 - Vainer , et al. November 8, 2	2016-11-08
Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device Grant 9,298,110 - Steinhoff , et al. March 29, 2	2016-03-29
Lithographic Apparatus App 20160033860 - WILEY; James Norman ; et al.	2016-02-04
Object inspection systems and methods Grant 9,122,178 - Ivanov , et al. September 1, 2	2015-09-01
Lithographic Apparatus and Method of Manufacturing a Device App 20150192861 - Banine; Vadim Yevgenyevich ; et al.	2015-07-09
Apparatus for Monitoring a Lithographic Patterning Device App 20140340663 - Scaccabarozzi; Luigi ; et al.	2014-11-20
Inspection method and apparatus Grant 8,830,455 - Den Boef , et al. September 9, 2	2014-09-09
Methods and Apparatus for Inspection of Articles, EUV Lithography Reticles, Lithography Apparatus and Method of Manufacturing Devices App 20140146297 - Vainer; Yuri ; et al.	2014-05-29
Gas-liquid Phase Transition Method And Apparatus For Cleaning Of Surfaces In Semiconductor Manufacturing App 20140014138 - Spiegelman; Jeffrey J. ; et al.	2014-01-16
Electrostatic Clamp Apparatus And Lithographic Apparatus App 20140002805 - Banine; Vadim Yevgenyevich ; et al.	2014-01-02
Particle cleaning of optical elements for microlithography Grant 8,477,285 - Ehm , et al. July 2, 2	2013-07-02
Method of detecting a particle and a lithographic apparatus Grant 8,405,825 - Scaccabarozzi , et al. March 26, 2	2013-03-26
System For Removing Contaminant Particles, Lithographic Apparatus, Method For Removing Contaminant Particles And Method For Manufacturing A Device App 20130070218 - Ivanov; Vladimir Vitalevich ; et al.	2013-03-21
Methods and Apparatus for Inspection Of Articles, EUV Lithography Reticles, Lithography Apparatus and Method of Manufacturing Devices App 20120182538 - Koole; Roelof ; et al.	2012-07-19
Object Inspection Systems and Methods App 20120127467 - Ivanov; Vitalii ; et al.	2012-05-24
Lithographic Apparatus And Device Manufacturing Method App 20120086929 - Lammers; Nicolaas Arnoldus ; et al.	2012-04-12
Object Inspection Systems and Methods App 20120081684 - Den Oef; Arie Jeffrey ; et al.	2012-04-05
Radiation Source Apparatus, Lithographic Apparatus, Method Of Generating And Delivering Radiation And Method For Manufacturing A Device App 20110222040 - STEINHOFF; Jens Arno ; et al.	2011-09-15
Particle Cleaning Of Optical Elements For Microlithography App 20110188011 - EHM; Dirk Heinrich ; et al.	2011-08-04
Lithographic Apparatus and Device Manufacturing Method App 20110170083 - Scaccabarozzi; Luigi ; et al.	2011-07-14
Method of Detecting a Particle and a Lithographic Apparatus App 20110149276 - SCACCABAROZZI; Luigi ; et al.	2011-06-23
Inspection method and apparatus App 20110043795 - Den Boef; Arie Jeffrey ; et al.	2011-02-24
Lithographic Apparatus, Device Manufacturing Method, Cleaning System And Method For Cleaning A Patterning Device App 20110037960 - Scaccabarozzi; Luigi ; et al.	2011-02-17
EUV Mask Inspection App 20100165310 - SEWELL; Harry ; et al.	2010-07-01
System for Contactless Cleaning, Lithographic Apparatus and Device Manufacturing Method App 20100151394 - Scaccabarozzi; Luigi ; et al.	2010-06-17

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