loadpatents
Patent applications and USPTO patent grants for Sawashima; Jun.The latest application filed is for "substrate processing apparatus and substrate processing method".
Patent | Date |
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Substrate Processing Apparatus And Substrate Processing Method App 20220301894 - AIHARA; Tomoaki ;   et al. | 2022-09-22 |
Substrate Treating Apparatus App 20220277966 - SAWASHIMA; Jun ;   et al. | 2022-09-01 |
Substrate Processing Apparatus And Method Of Machining Tubular Guard App 20220258198 - YAMAGUCHI; Takahiro ;   et al. | 2022-08-18 |
Substrate Treating Apparatus App 20220258196 - SAWASHIMA; Jun ;   et al. | 2022-08-18 |
Substrate Treating Apparatus App 20220134390 - SAWASHIMA; Jun ;   et al. | 2022-05-05 |
Substrate Processing Apparatus And Substrate Processing Method App 20220068682 - YAMAGUCHI; Takahiro ;   et al. | 2022-03-03 |
Substrate Treating Apparatus App 20210265177 - SAWASHIMA; Jun ;   et al. | 2021-08-26 |
Substrate Treating Apparatus App 20210265178 - SAWASHIMA; Jun ;   et al. | 2021-08-26 |
Substrate Processing Apparatus App 20210249279 - KOBAYASHI; Kenji ;   et al. | 2021-08-12 |
Substrate processing apparatus Grant 11,075,095 - Kobayashi , et al. July 27, 2 | 2021-07-27 |
Substrate processing apparatus Grant 10,403,517 - Kobayashi , et al. Sep | 2019-09-03 |
Substrate Processing Apparatus App 20190267257 - KOBAYASHI; Kenji ;   et al. | 2019-08-29 |
Substrate processing apparatus Grant 10,332,761 - Kobayashi , et al. | 2019-06-25 |
Substrate processing apparatus Grant 10,297,476 - Sawashima , et al. | 2019-05-21 |
Substrate processing apparatus and substrate processing method Grant 9,805,938 - Fujiwara , et al. October 31, 2 | 2017-10-31 |
Substrate processing apparatus and substrate processing method Grant 9,793,176 - Kobayashi , et al. October 17, 2 | 2017-10-17 |
Substrate Processing Apparatus And Substrate Processing Method App 20160372341 - KOBAYASHI; Kenji ;   et al. | 2016-12-22 |
Substrate treating apparatus and method of treating substrate Grant 9,460,944 - Fujiwara , et al. October 4, 2 | 2016-10-04 |
Heater Abnormality Detecting Apparatus, Processing Liquid Supplying Apparatus, And Substrate Processing System App 20160251754 - NAKASHIMA; Akihiro ;   et al. | 2016-09-01 |
Substrate Processing Apparatus App 20160247697 - SAWASHIMA; Jun ;   et al. | 2016-08-25 |
Substrate Processing Apparatus App 20160240399 - KOBAYASHI; Kenji ;   et al. | 2016-08-18 |
Substrate Processing Apparatus App 20160240413 - KOBAYASHI; Kenji ;   et al. | 2016-08-18 |
Substrate Processing Apparatus And Substrate Processing Method App 20160086810 - FUJIWARA; Naozumi ;   et al. | 2016-03-24 |
Substrate Treating Apparatus And Method Of Treating Substrate App 20160005630 - FUJIWARA; Naozumi ;   et al. | 2016-01-07 |
Substrate Treatment Apparatus App 20090320885 - INOUE; Kazuki ;   et al. | 2009-12-31 |
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