| Patent | Date |
|---|
Semiconductor Device
App 20220165332 - SAWADA; Yohei | 2022-05-26 |
Valve device and fluid control device
Grant 11,339,881 - Watanabe , et al. May 24, 2 | 2022-05-24 |
Flow rate measuring method and flow rate measuring device
Grant 11,326,921 - Nagase , et al. May 10, 2 | 2022-05-10 |
Securing Member And Wall Structure
App 20220136255 - SAWADA; Yohei ; et al. | 2022-05-05 |
Flow rate control device and abnormality detection method using flow rate control device
Grant 11,313,756 - Nagase , et al. April 26, 2 | 2022-04-26 |
Semiconductor Device
App 20220028455 - SAWADA; Yohei ; et al. | 2022-01-27 |
Contact lens and method for manufacturing the same
Grant 11,231,598 - Sawada , et al. January 25, 2 | 2022-01-25 |
Fluid control device, method for controlling fluid control device, and fluid control system
Grant 11,137,779 - Hirata , et al. October 5, 2 | 2021-10-05 |
Flow rate control device, method of calibrating flow rate of flow rate control device, flow rate measuring device, and method of measuring flow rate using flow rate measuring device
Grant 10,969,259 - Sawada , et al. April 6, 2 | 2021-04-06 |
Pressure-type flow rate control device and flow rate self-diagnosis method using critical expansion condition
Grant 10,928,813 - Nagase , et al. February 23, 2 | 2021-02-23 |
Gas supply device capable of measuring flow rate, flowmeter, and flow rate measuring method
Grant 10,895,484 - Sawada , et al. January 19, 2 | 2021-01-19 |
Method of determining flow rate of a gas in a substrate processing system
Grant 10,876,870 - Miyoshi , et al. December 29, 2 | 2020-12-29 |
Valve Device And Fluid Control Device
App 20200370664 - WATANABE; Kazunari ; et al. | 2020-11-26 |
Flow Rate Control Device And Abnormality Detection Method Using Flow Rate Control Device
App 20200232873 - NAGASE; Masaaki ; et al. | 2020-07-23 |
Semiconductor memory device
Grant 10,706,917 - Nii , et al. | 2020-07-07 |
Gas supply system, substrate processing system and gas supply method
Grant 10,665,430 - Sawachi , et al. | 2020-05-26 |
Fluid Control System and Flow Rate Measurement Method
App 20200159257 - YAMASHITA; Satoru ; et al. | 2020-05-21 |
Valve with built-in orifice, and pressure-type flow rate control device
Grant 10,648,572 - Sawada , et al. | 2020-05-12 |
Content addressable memory
Grant 10,629,264 - Sawada , et al. | 2020-04-21 |
Flow Rate Measuring Method And Flow Rate Measuring Device
App 20200011720 - NAGASE; Masaaki ; et al. | 2020-01-09 |
Semiconductor device
Grant 10,453,519 - Sawada , et al. Oc | 2019-10-22 |
Contact Lens And Method For Manufacturing The Same
App 20190317337 - SAWADA; Yohei ; et al. | 2019-10-17 |
Method Of Determining Flow Rate Of Gas
App 20190212176 - MIYOSHI; Risako ; et al. | 2019-07-11 |
Semiconductor Memory Device
App 20190189197 - NII; Koji ; et al. | 2019-06-20 |
Valve With Built-in Orifice, And Pressure-type Flow Rate Control Device
App 20190178389 - SAWADA; Yohei ; et al. | 2019-06-13 |
Flow Rate Control Device, Method Of Calibrating Flow Rate Of Flow Rate Control Device, Flow Rate Measuring Device, And Method Of Measuring Flow Rate Using Flow Rate Measuring Device
App 20190137309 - SAWADA; Yohei ; et al. | 2019-05-09 |
Fluid Control Device, Method For Controlling Fluid Control Device, And Fluid Control System
App 20190129452 - HIRATA; Kaoru ; et al. | 2019-05-02 |
Pressure-type Flow Rate Control Device And Flow Rate Self-diagnosis Method
App 20190094847 - NAGASE; Masaaki ; et al. | 2019-03-28 |
Semiconductor Device
App 20190027212 - SAWADA; Yohei ; et al. | 2019-01-24 |
Gas Supply Device Capable Of Measuring Flow Rate, Flowmeter, And Flow Rate Measuring Method
App 20190017855 - SAWADA; Yohei ; et al. | 2019-01-17 |
Content Addressable Memory
App 20180350437 - Sawada; Yohei ; et al. | 2018-12-06 |
Semiconductor device
Grant 10,102,899 - Sawada , et al. October 16, 2 | 2018-10-16 |
Gas Supply System, Substrate Processing System And Gas Supply Method
App 20180012735 - SAWACHI; Atsushi ; et al. | 2018-01-11 |
Waterproofing member and exterior wall structure
Grant 9,850,700 - Sawada December 26, 2 | 2017-12-26 |
Semiconductor Device
App 20170309326 - SAWADA; Yohei ; et al. | 2017-10-26 |
Calibration method and flow rate measurement method for flow rate controller for gas supply device
Grant 9,638,560 - Nagase , et al. May 2, 2 | 2017-05-02 |
Variable orifice type pressure-controlled flow controller
Grant 9,507,352 - Dohi , et al. November 29, 2 | 2016-11-29 |
Apparatus for dividing and supplying gas and method for dividing and supplying gas
Grant 9,477,232 - Takahashi , et al. October 25, 2 | 2016-10-25 |
Waterproofing Member And Exterior Wall Structure
App 20160265270 - SAWADA; Yohei | 2016-09-15 |
Apparatus for dividing and supplying gas and method for dividing and supplying gas by use of this apparatus
Grant 9,261,884 - Sawada , et al. February 16, 2 | 2016-02-16 |
Flow rate measurement device and flow rate measurement method for flow rate controller for gas supply device
Grant 9,163,969 - Sawada , et al. October 20, 2 | 2015-10-20 |
Opening degree detection device for automatically operated valve
Grant 9,038,663 - Dohi , et al. May 26, 2 | 2015-05-26 |
Variable Orifice Type Pressure-controlled Flow Controller
App 20150114499 - Dohi; Ryousuke ; et al. | 2015-04-30 |
Apparatus For Dividing And Supplying Gas And Method For Dividing And Supplying Gas
App 20150059859 - Takahashi; Eiji ; et al. | 2015-03-05 |
Cam control valve
Grant 8,833,730 - Sawada , et al. September 16, 2 | 2014-09-16 |
Throating
Grant 8,635,812 - Sawada , et al. January 28, 2 | 2014-01-28 |
Flow Rate Measurement Device And Flow Rate Measurement Method For Flow Rate Controller For Gas Supply Device
App 20140013838 - Sawada; Yohei ; et al. | 2014-01-16 |
Opening Degree Detection Device For Automatically Operated Valve
App 20130319551 - Dohi; Ryousuke ; et al. | 2013-12-05 |
Cam valve
Grant 8,561,966 - Dohi , et al. October 22, 2 | 2013-10-22 |
Flow rate ratio variable type fluid supply apparatus
Grant 8,555,920 - Hirata , et al. October 15, 2 | 2013-10-15 |
Apparatus For Dividing And Supplying Gas And Method For Dividing And Supplying Gas By Use Of This Apparatus
App 20130220433 - Sawada; Yohei ; et al. | 2013-08-29 |
Calibration Method And Flow Rate Measurement Method For Flow Rate Controller For Gas Supply Device
App 20130186471 - Nagase; Masaaki ; et al. | 2013-07-25 |
Cam Control Valve
App 20120223265 - Sawada; Yohei ; et al. | 2012-09-06 |
Piezoelectric driven control valve
Grant 8,162,286 - Sawada , et al. April 24, 2 | 2012-04-24 |
Throating
App 20110192095 - Sawada; Yohei ; et al. | 2011-08-11 |
Flow Rate Ratio Variable Type Fluid Supply Apparatus
App 20100229976 - Hirata; Kaoru ; et al. | 2010-09-16 |
Piezoelectric Driven Control Valve
App 20100127196 - Sawada; Yohei ; et al. | 2010-05-27 |
| 