Sawada; Motoshi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sawada; Motoshi.The latest application filed is for "method of manufacturing semiconductor device, substrate processing apparatus, and recording medium".
- Sawada; Motoshi - Toyama JP
- SAWADA; Motoshi - Toyama-shi JP
- Sawada; Motoshi - Tokyo JP
| Patent | Date |
|---|---|
| Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus, and recording medium Grant 10,032,626 - Noda , et al. July 24, 2 | 2018-07-24 |
| Substrate processing apparatus Grant 9,869,022 - Sawada January 16, 2 | 2018-01-16 |
| Substrate processing apparatus Grant 9,816,183 - Ashihara , et al. November 14, 2 | 2017-11-14 |
| Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20170287696 - NODA; Takaaki ; et al. | 2017-10-05 |
| Substrate Processing Apparatus App 20170076964 - SAWADA; Motoshi | 2017-03-16 |
| Substrate Processing Apparatus App 20170067157 - ASHIHARA; Hiroshi ; et al. | 2017-03-09 |
| Substrate Processing Apparatus App 20160002787 - SAWADA; Motoshi | 2016-01-07 |
| Microwave detector Grant 6,154,166 - Sawada , et al. November 28, 2 | 2000-11-28 |
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