Patent | Date |
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Aberration corrector and electron microscope Grant 10,720,301 - Sawada | 2020-07-21 |
Distortion measurement method for electron microscope image, electron microscope, distortion measurement specimen, and method of manufacturing distortion measurement specimen Grant 10,541,111 - Konyuba , et al. Ja | 2020-01-21 |
Aberration Corrector and Electron Microscope App 20190228945 - Sawada; Hidetaka | 2019-07-25 |
Distortion Measurement Method for Electron Microscope Image, Electron Microscope, Distortion Measurement Specimen, and Method of Manufacturing Distortion Measurement Specimen App 20180342370 - Konyuba; Yuji ;   et al. | 2018-11-29 |
Liner Tube and Electron Microscope App 20180166252 - Sawada; Hidetaka ;   et al. | 2018-06-14 |
Liner tube and electron microscope Grant 9,997,327 - Sawada , et al. June 12, 2 | 2018-06-12 |
Electron microscope and measurement method Grant 9,859,095 - Shibata , et al. January 2, 2 | 2018-01-02 |
Two-stage dodecapole aberration corrector for charged-particle beam Grant 9,793,088 - Sawada , et al. October 17, 2 | 2017-10-17 |
Electron Microscope and Measurement Method App 20170025248 - Shibata; Naoya ;   et al. | 2017-01-26 |
Multipole lens, aberration corrector, and electron microscope Grant 9,349,565 - Sawada May 24, 2 | 2016-05-24 |
Spherical aberration corrector, method of spherical aberration correction, and charged particle beam instrument Grant 9,256,068 - Sawada , et al. February 9, 2 | 2016-02-09 |
Multipole Lens, Aberration Corrector, and Electron Microscope App 20150332889 - Sawada; Hidetaka | 2015-11-19 |
Spherical Aberration Corrector, Method of Spherical Aberration Correction, and Charged Particle Beam Instrument App 20150029593 - Sawada; Hidetaka ;   et al. | 2015-01-29 |
Method For Axial Alignment Of Charged Particle Beam And Charged Particle Beam System App 20140367585 - Sawada; Hidetaka ;   et al. | 2014-12-18 |
Method for axial alignment of charged particle beam and charged particle beam system Grant 8,907,298 - Sawada , et al. December 9, 2 | 2014-12-09 |
Method for axial alignment of charged particle beam and charged particle beam system Grant 8,847,172 - Sawada , et al. September 30, 2 | 2014-09-30 |
Chromatic aberration corrector and electron microscope Grant 8,785,880 - Sawada , et al. July 22, 2 | 2014-07-22 |
Chromatic Aberration Corrector And Electron Microscope App 20140158901 - Sawada; Hidetaka ;   et al. | 2014-06-12 |
Electron microscope Grant 8,541,755 - Sawada September 24, 2 | 2013-09-24 |
Transmission electron microscope Grant 8,431,897 - Shibata , et al. April 30, 2 | 2013-04-30 |
Spherical aberration corrector and method of spherical aberration correction Grant 8,389,951 - Sawada March 5, 2 | 2013-03-05 |
Transmission Electron Microscope App 20120187293 - Shibata; Naoya ;   et al. | 2012-07-26 |
Method for Axial Alignment of Charged Particle Beam and Charged Particle Beam System App 20120119107 - Sawada; Hidetaka ;   et al. | 2012-05-17 |
Chromatic aberration corrector for charged-particle beam system and correction method therefor Grant 8,178,850 - Sawada , et al. May 15, 2 | 2012-05-15 |
Scanning transmission electron microscope and method of aberration correction therefor Grant 8,168,956 - Sawada May 1, 2 | 2012-05-01 |
Spherical Aberration Corrector and Method of Spherical Aberration Correction App 20110284758 - Sawada; Hidetaka | 2011-11-24 |
Aberration correction system Grant 7,723,683 - Sawada May 25, 2 | 2010-05-25 |
Chromatic Aberration Corrector for Charged-Particle Beam System and Correction Method Therefor App 20100084567 - Sawada; Hidetaka ;   et al. | 2010-04-08 |
Aberration Corrector and Charged-Particle Beam System Equipped Therewith App 20100072387 - Sawada; Hidetaka ;   et al. | 2010-03-25 |
Method of measuring aberrations and correcting aberrations using Ronchigram and electron microscope Grant 7,619,220 - Sawada , et al. November 17, 2 | 2009-11-17 |
Charged-particle beam system Grant 7,598,496 - Sawada , et al. October 6, 2 | 2009-10-06 |
Scanning Transmission Electron Microscope and Method of Aberration Correction Therefor App 20090224169 - SAWADA; Hidetaka | 2009-09-10 |
Aberration Correction System App 20090032709 - SAWADA; Hidetaka | 2009-02-05 |
Charged-Particle Beam System App 20080128635 - SAWADA; Hidetaka ;   et al. | 2008-06-05 |
Aberration Corrector and Method of Aberration Correction App 20080093563 - Sawada; Hidetaka ;   et al. | 2008-04-24 |
Method of measuring aberrations and correcting aberrations using ronchigram and electron microscope App 20070120055 - Sawada; Hidetaka ;   et al. | 2007-05-31 |
Apparatus for manufacturing ultra-pure water Grant 5,250,183 - Sawada , et al. October 5, 1 | 1993-10-05 |