SAWACHI; Atsushi

Patent Applications and Registrations

Patent applications and USPTO patent grants for SAWACHI; Atsushi.The latest application filed is for "processing apparatus and processing method".

Company Profile

11.10.27

SAWACHI; Atsushi - Miyagi JP
SAWACHI; Atsushi - Kurokawa-gun JP
Sawachi; Atsushi - Nirasaki-Shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Processing Apparatus And Processing Method App 20220148890 - SAWACHI; Atsushi ; et al.	2022-05-12
Substrate Processing Apparatus, Substrate Processing System, And Maintenance Method App 20220122818 - SAWACHI; Atsushi ; et al.	2022-04-21
Gas Supply System, Plasma Processing Apparatus, And Control Method For Gas Supply System App 20220115213 - SAWACHI; Atsushi	2022-04-14
Gas supply system, plasma processing apparatus, and control method for gas supply system Grant 11,217,432 - Sawachi January 4, 2	2022-01-04
Substrate Processing Apparatus App 20210407768 - SAWACHI; Atsushi ; et al.	2021-12-30
Part Replacement System And Part Replacement Device App 20210339350 - Sawachi; Atsushi ; et al.	2021-11-04
Gas Supply System And Gas Supply Method App 20210216088 - SAWACHI; Atsushi ; et al.	2021-07-15
Measuring Device, Measuring Method, And Vacuum Processing Apparatus App 20210175055 - SAWACHI; Atsushi ; et al.	2021-06-10
Gas Supply System, Substrate Processing Apparatus, And Control Method For Gas Supply System App 20210134564 - SAWACHI; Atsushi ; et al.	2021-05-06
Gas supply system and gas supply method Grant 10,996,688 - Sawachi , et al. May 4, 2	2021-05-04
Flow Rate Controller, Gas Supply System, And Flow Rate Control Method App 20210111004 - SAWACHI; Atsushi	2021-04-15
Gas Supply System, Plasma Processing Device, And Control Method For Gas Supply System App 20210043425 - SAWACHI; Atsushi	2021-02-11
Performance Calculation Method And Processing Apparatus App 20210013012 - Sawachi; Atsushi ; et al.	2021-01-14
Gas supply system, substrate processing system and gas supply method Grant 10,665,430 - Sawachi , et al.	2020-05-26
Processing method Grant 10,665,431 - Tezuka , et al.	2020-05-26
Method Of Inspecting And Flow Rate Controller App 20200124456 - SAWACHI; Atsushi ; et al.	2020-04-23
Method Of Inspecting And Inspection Apparatus App 20200124455 - SAWACHI; Atsushi ; et al.	2020-04-23
Cleaning method and processing apparatus Grant 10,607,819 - Takahashi , et al.	2020-03-31
Method for inspecting for leaks in gas supply system valves Grant 10,533,916 - Sawachi , et al. Ja	2020-01-14
Gas supply system, plasma processing apparatus, and operation method for plasma processing apparatus Grant 10,472,717 - Sawachi , et al. Nov	2019-11-12
Gas Supply System And Gas Supply Method App 20190138033 - SAWACHI; Atsushi ; et al.	2019-05-09
Gas supply system, gas supply control method and gas replacement method Grant 10,229,844 - Sawachi , et al.	2019-03-12
Processing Method App 20180294145 - Tezuka; Kazuyuki ; et al.	2018-10-11
Method For Inspecting For Leaks In Gas Supply System Valves App 20180180509 - SAWACHI; Atsushi ; et al.	2018-06-28
Plasma Processing Apparatus App 20180122620 - AMIKURA; Norihiko ; et al.	2018-05-03
Gas supply control method Grant 9,904,299 - Ono , et al. February 27, 2	2018-02-27
Gas Supply System, Substrate Processing System And Gas Supply Method App 20180012735 - SAWACHI; Atsushi ; et al.	2018-01-11
Gas Supply System, Plasma Processing Apparatus, And Operation Method For Plasma Processing Apparatus App 20170159180 - Sawachi; Atsushi ; et al.	2017-06-08
Gas Supply System, Gas Supply Control Method And Gas Replacement Method App 20160372348 - Sawachi; Atsushi ; et al.	2016-12-22
Apparatus for dividing and supplying gas and method for dividing and supplying gas Grant 9,477,232 - Takahashi , et al. October 25, 2	2016-10-25
Gas Supply Control Method App 20160299514 - ONO; Kumiko ; et al.	2016-10-13
Gas Supply Method And Plasma Processing Apparatus App 20150228457 - Yamashita; Kazuo ; et al.	2015-08-13
Plasma Processing Apparatus App 20150206713 - AMIKURA; Norihiko ; et al.	2015-07-23
Apparatus For Dividing And Supplying Gas And Method For Dividing And Supplying Gas App 20150059859 - Takahashi; Eiji ; et al.	2015-03-05
Cleaning Method And Processing Apparatus App 20150000707 - TAKAHASHI; Eiji ; et al.	2015-01-01
Processing Apparatus App 20120132367 - Tezuka; Kazuyuki ; et al.	2012-05-31
Film Deposition System App 20110226178 - TSUJI; Norihiko ; et al.	2011-09-22

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