Savas; Stephen E.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Savas; Stephen E..The latest application filed is for "enhanced ignition in inductively coupled plasmas for workpiece processing".

Company Profile

5.38.47

Savas; Stephen E. - Pleasanton CA
SAVAS; STEPHEN E. - SAN JOSE CA
Savas; Stephen E. - Fremont CA
Savas; Stephen E. - Taoyuan TW
Savas; Stephen E. - Alameda CA
Savas; Stephen E. - Newark CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Processing App 20220310359 - Savas; Stephen E. ; et al.	2022-09-29
Enhanced ignition in inductively coupled plasmas for workpiece processing Grant 11,348,784 - Savas , et al. May 31, 2	2022-05-31
Systems And Methods For Workpiece Processing Using Neutral Atom Beams App 20220165614 - Savas; Stephen E.	2022-05-26
Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential App 20220084792 - Savas; Stephen E. ; et al.	2022-03-17
Systems and methods for workpiece processing using neutral atom beams Grant 11,251,075 - Savas February 15, 2	2022-02-15
Variable mode plasma chamber utilizing tunable plasma potential Grant 11,189,464 - Savas , et al. November 30, 2	2021-11-30
Pulsing Control Match Network And Generator App 20210225613 - SAVAS; STEPHEN E. ; et al.	2021-07-22
Fast Arc Detecting Match Network App 20210217590 - SAVAS; STEPHEN E. ; et al.	2021-07-15
Broad-band Sensors For Electromagnetic Waves App 20210217595 - SAVAS; STEPHEN E. ; et al.	2021-07-15
Plasma Non-uniformity Detection App 20210217587 - SAVAS; STEPHEN E. ; et al.	2021-07-15
Uniformity Control For Radio Frequency Plasma Processing Systems App 20210217589 - SAVAS; STEPHEN E. ; et al.	2021-07-15
Azimuthal Sensor Array For Radio Frequency Plasma-based Wafer Processing Systems App 20210217588 - SAVAS; STEPHEN E. ; et al.	2021-07-15
Sector Shunts For Plasma-based Wafer Processing Systems App 20210217593 - SAVAS; STEPHEN E. ; et al.	2021-07-15
Methods for tuning plasma potential using variable mode plasma chamber Grant 11,049,692 - Savas , et al. June 29, 2	2021-06-29
Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Processing App 20210050213 - Savas; Stephen E. ; et al.	2021-02-18
Methods For Tuning Plasma Potential Using Variable Mode Plasma Chamber App 20210020404 - Savas; Stephen E. ; et al.	2021-01-21
Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential App 20210020411 - Savas; Stephen E. ; et al.	2021-01-21
Systems And Methods For Workpiece Processing Using Neutral Atom Beams App 20200043775 - Savas; Stephen E.	2020-02-06
Methods for forming thin protective and optical layers on substrates Grant 10,526,708 - Savas , et al. J	2020-01-07
Methods For Forming Thin Protective And Optical Layers On Substrates App 20180202046 - Savas; Stephen E. ; et al.	2018-07-19
Method for depositing a multi-layer moisture barrier on electronic devices and electronic devices protected by a multi-layer moisture barrier Grant 9,831,466 - Savas , et al. November 28, 2	2017-11-28
Apparatus And Method For Forming Thin Protective And Optical Layers On Substrates App 20160289837 - Savas; Stephen E. ; et al.	2016-10-06
Methods for plasma processing Grant 9,443,702 - Savas , et al. September 13, 2	2016-09-13
Method For Deposition Of High-performance Coatings And Encapsulated Electronic Devices App 20160111684 - SAVAS; Stephen E. ; et al.	2016-04-21
Method for deposition of high-performance coatings and encapsulated electronic devices Grant 9,299,956 - Savas , et al. March 29, 2	2016-03-29
Advanced multi-workpiece processing chamber Grant 9,184,072 - Devine , et al. November 10, 2	2015-11-10
Methods For Plasma Processing App 20150270109 - Savas; Stephen E. ; et al.	2015-09-24
Methods for plasma processing Grant 9,096,933 - Savas , et al. August 4, 2	2015-08-04
Methods for plasma processing Grant 9,096,932 - Savas , et al. August 4, 2	2015-08-04
Methods For Plasma Processing App 20140220262 - Savas; Stephen E. ; et al.	2014-08-07
Methods For Plasma Processing App 20140212601 - Savas; Stephen E. ; et al.	2014-07-31
Method For Deposition Of High-performance Coatings And Encapsulated Electronic Devices App 20130334511 - Savas; Stephen E. ; et al.	2013-12-19
Apparatus And Method For Forming Thin Protective And Optical Layers On Substrates App 20130337657 - Savas; Stephen E. ; et al.	2013-12-19
Slotted Electrostatic Shield Modification For Improved Etch And Cvd Process Uniformity App 20130196510 - George; Rene ; et al.	2013-08-01
Slotted electrostatic shield modification for improved etch and CVD process uniformity Grant 8,413,604 - George , et al. April 9, 2	2013-04-09
Method And Apparatus For Growing Thin Oxide Films On Silicon While Minimizing Impact On Existing Structures App 20120298039 - PEUSE; Bruce W. ; et al.	2012-11-29
Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structures Grant 8,236,706 - Peuse , et al. August 7, 2	2012-08-07
Post ion implant photoresist strip using a pattern fill and method Grant 7,947,605 - George , et al. May 24, 2	2011-05-24
System and method for removal of photoresist in transistor fabrication for integrated circuit manufacturing Grant 7,799,685 - Savas , et al. September 21, 2	2010-09-21
Method And Apparatus For Growing Thin Oxide Films On Silicon While Minimizing Impact On Existing Structures App 20100151694 - Peuse; Bruce W. ; et al.	2010-06-17
Uniform etching system and process for large rectangular substrates Grant 7,534,362 - Savas May 19, 2	2009-05-19
Advanced Multi-workpiece Processing Chamber App 20090028761 - Devine; Daniel J. ; et al.	2009-01-29
System and method for removal of photoresist and residues following contact etch with a stop layer present Grant 7,361,605 - Savas , et al. April 22, 2	2008-04-22
Post Ion Implant Photoresist Strip using a Pattern Fill and Method App 20070287291 - George; Rene ; et al.	2007-12-13
System and method for removal of photoresist and stop layer following contact dielectric etch App 20070269975 - Savas; Stephen E. ; et al.	2007-11-22
Systems and Methods for Photoresist Strip and Residue Treatment in Integrated Circuit Manufacturing App 20070193602 - Savas; Stephen E. ; et al.	2007-08-23
Systems and Methods for Photoresist Strip and Residue Treatment in Integrated Circuit Manufacturing App 20070186953 - Savas; Stephen E. ; et al.	2007-08-16
Slotted electrostatic shield modification for improved etch and CVD process uniformity Grant 7,232,767 - George , et al. June 19, 2	2007-06-19
Slotted Electrostatic Shield Modification for Improved Etch and CVD Process Uniformity App 20070113979 - George; Rene ; et al.	2007-05-24
Substrate handling system and process for manufacturing large substrates App 20060045667 - Savas; Stephen E.	2006-03-02
Fast isotropic etching system and process for large, non-circular substrates App 20060011582 - Savas; Stephen E.	2006-01-19
Uniform etching system and process for large rectangular substrates App 20060011581 - Savas; Stephen E.	2006-01-19
System and method for removal of photoresist and residues following contact etch with a stop layer present App 20050196967 - Savas, Stephen E. ; et al.	2005-09-08
System and method for removal of photoresist in transistor fabrication for integrated circuit manufacturing App 20050112883 - Savas, Stephen E. ; et al.	2005-05-26
Systems and methods for photoresist strip and residue treatment in integrated circuit manufacturing App 20050079717 - Savas, Stephen E. ; et al.	2005-04-14
Systems and methods for photoresist strip and residue treatment in integrated circuit manufacturing App 20050022839 - Savas, Stephen E. ; et al.	2005-02-03
Slotted electrostatic shield modification for improved etch and CVD process uniformity App 20040244691 - George, Rene ; et al.	2004-12-09
Systems and methods for cleaning semiconductor substrates using a reduced volume of liquid App 20040238008 - Savas, Stephen E. ; et al.	2004-12-02
Systems and methods for photoresist strip and residue treatment in integrated circuit manufacturing Grant 6,805,139 - Savas , et al. October 19, 2	2004-10-19
Pulsed plasma processing of semiconductor substrates Grant 6,794,301 - Savas September 21, 2	2004-09-21
Apparatus and method for low temperature stripping of photoresist and residues App 20040154743 - Savas, Stephen E. ; et al.	2004-08-12
Systems and methods for enhancing plasma processing of a semiconductor substrate Grant 6,706,142 - Savas , et al. March 16, 2	2004-03-16
Inductive plasma reactor Grant 6,551,447 - Savas , et al. April 22, 2	2003-04-22
Pulsed plasma processing of semiconductor substrates App 20020115301 - Savas, Stephen E.	2002-08-22
Systems and methods for enhancing plasma processing of a semiconductor substrate App 20020096258 - Savas, Stephen E. ; et al.	2002-07-25
Apparatus and method for pulsed plasma processing of a semiconductor substrate Grant 6,395,641 - Savas May 28, 2	2002-05-28
Icp Reactor Having A Conically-shaped Plasma-generating Section App 20020033233 - SAVAS, STEPHEN E.	2002-03-21
Method and apparatus for thermal processing of semiconductor substrates Grant 6,355,909 - Griffiths , et al. March 12, 2	2002-03-12
Apparatus and method for thermal processing of semiconductor substrates Grant 6,342,691 - Johnsgard , et al. January 29, 2	2002-01-29
Systems And Methods For Variable Mode Plasma Enhanced Processing Of Semiconductor Wafers App 20020005392 - LUO, LEROY ; et al.	2002-01-17
Apparatus and method for pulsed plasma processing of a semiconductor substrate App 20010023743 - Savas, Stephen E.	2001-09-27
System and method for rapid thermal processing App 20010009255 - Savas, Stephen E.	2001-07-26
Apparatus and method for pulsed plasma processing of a semiconductor substrate Grant 6,253,704 - Savas July 3, 2	2001-07-03
System and method for rapid thermal processing with transitional heater Grant 6,198,074 - Savas March 6, 2	2001-03-06
Model based method for wafer temperature control in a thermal processing system for semiconductor manufacturing Grant 6,169,271 - Savas , et al. January 2, 2	2001-01-02
Inductive plasma reactor Grant 6,143,129 - Savas , et al. November 7, 2	2000-11-07
Method and apparatus for thermal processing of semiconductor substrates Grant 6,133,550 - Griffiths , et al. October 17, 2	2000-10-17
Apparatus and method for pulsed plasma processing of a semiconductor substrate Grant 5,983,828 - Savas November 16, 1	1999-11-16
ICP reactor having a conically-shaped plasma-generating section Grant 5,964,949 - Savas October 12, 1	1999-10-12
Inductive plasma reactor Grant 5,811,022 - Savas , et al. September 22, 1	1998-09-22
Low frequency inductive RF plasma reactor Grant 5,534,231 - Savas July 9, 1	1996-07-09
Magnetically enhanced plasma reactor system for semiconductor processing Grant 5,225,024 - Hanley , et al. July 6, 1	1993-07-06
Particulate contamination prevention using low power plasma Grant 5,102,496 - Savas April 7, 1	1992-04-07

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