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Patent applications and USPTO patent grants for Savage; Richard N..The latest application filed is for "semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system".
Patent | Date |
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Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system Grant 6,846,149 - Savage , et al. January 25, 2 | 2005-01-25 |
Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system Grant 6,610,150 - Savage , et al. August 26, 2 | 2003-08-26 |
Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system App 20020033136 - Savage, Richard N. ;   et al. | 2002-03-21 |
Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system App 20010010950 - Savage, Richard N. ;   et al. | 2001-08-02 |
Apparatus and method for automatically identifying chemical species within a plasma reactor environment Grant 5,014,217 - Savage May 7, 1 | 1991-05-07 |
Optical switch Grant 4,938,555 - Savage July 3, 1 | 1990-07-03 |
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