SAURABH; Ashish
Patent Applications and Registrations
Patent applications and USPTO patent grants for SAURABH; Ashish.The latest application filed is for "temperature control of a multi-zone pedestal".
- SAURABH; Ashish - Portland OR
- Saurabh; Ashish - Haryana IN
| Patent | Date |
|---|---|
| Temperature Control Of A Multi-zone Pedestal App 20220243332 - CHANDRASEKHARAN; Ramesh ; et al. | 2022-08-04 |
| Trim And Deposition Profile Control With Multi-zone Heated Substrate Support For Multi-patterning Processes App 20220205105 - CHANDRASEKHARAN; Ramesh ; et al. | 2022-06-30 |
| Multi zone substrate support for ALD film property correction and tunability Grant 11,236,422 - Roberts , et al. February 1, 2 | 2022-02-01 |
| Multi Zone Pedestal For Ald Film Property Correction And Tunability App 20190153600 - Roberts; Michael Philip ; et al. | 2019-05-23 |
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