Satoh; Takamasa

Patent Applications and Registrations

Patent applications and USPTO patent grants for Satoh; Takamasa.The latest application filed is for "electron gun, electron beam exposure apparatus, and exposure method".

Company Profile

0.16.7

Satoh; Takamasa - Tokyo JP
Satoh; Takamasa - Kawasaki JP
Satoh, Takamasa - Kawasaki-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Electron gun, electron beam exposure apparatus, and exposure method Grant 7,919,750 - Yasuda , et al. April 5, 2	2011-04-05
Electron beam exposure apparatus involving the position and velocity calculation Grant 7,777,202 - Satoh , et al. August 17, 2	2010-08-17
D/A conversion device and method and charged particle beam exposure apparatus and method Grant 7,557,357 - Satoh , et al. July 7, 2	2009-07-07
Electron gun, electron beam exposure apparatus, and exposure method App 20080315089 - Yasuda; Hiroshi ; et al.	2008-12-25
Electron beam exposure apparatus App 20080277598 - Satoh; Takamasa ; et al.	2008-11-13
D/A conversion device and method and charged particle beam exposure apparatus and method App 20080054185 - Satoh; Takamasa ; et al.	2008-03-06
Electron beam generating apparatus and electron beam exposure apparatus Grant 6,727,658 - Ooae , et al. April 27, 2	2004-04-27
Charged particle beam exposure system and method Grant 6,646,275 - Oae , et al. November 11, 2	2003-11-11
Electron beam generating apparatus and electron beam exposure apparatus App 20030155522 - Ooae, Yoshihisa ; et al.	2003-08-21
Electron beam exposing method and exposure apparatus App 20030071231 - Haraguchi, Takeshi ; et al.	2003-04-17
Charged particle beam exposure system and method App 20030025088 - Oae, Yoshihisa ; et al.	2003-02-06
Charged particle beam exposure system and method Grant 6,486,479 - Oae , et al. November 26, 2	2002-11-26
Charged-particle-beam exposure device and charged-particle-beam exposure method App 20010013581 - Takemoto, Akio ; et al.	2001-08-16
Charged-particle-beam exposure device and charged-particle-beam exposure method Grant 6,242,751 - Takemoto , et al. June 5, 2	2001-06-05
Method and system for exposing an exposure pattern on an object by a charged particle beam which is shaped into a plurality of beam elements Grant 6,118,129 - Oae , et al. September 12, 2	2000-09-12
Method of and system for exposing pattern on object by charged particle beam Grant 6,057,907 - Satoh , et al. May 2, 2	2000-05-02
Charged particle beam exposure system and method Grant 5,977,548 - Oae , et al. November 2, 1	1999-11-02
Charged-particle-beam exposure device and charged-particle-beam exposure method Grant 5,969,365 - Takemoto , et al. October 19, 1	1999-10-19
Method of and system for exposing pattern on object by charged particle beam Grant 5,841,145 - Satoh , et al. November 24, 1	1998-11-24
Method and system for exposing pattern on object by charged particle beam Grant 5,744,810 - Satoh April 28, 1	1998-04-28
Charged particle beam exposure system and method Grant 5,614,725 - Oae , et al. March 25, 1	1997-03-25
Charged particle beam exposure system and method Grant 5,528,048 - Oae , et al. June 18, 1	1996-06-18
Charged particle beam exposure apparatus and method of cleaning the same Grant 5,401,974 - Oae , et al. March 28, 1	1995-03-28

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