| Patent | Date |
|---|
Stepped indirectly heated cathode with improved shielding
Grant 11,244,800 - Platow , et al. February 8, 2 | 2022-02-08 |
Stepped Indirectly Heated Cathode With Improved Shielding
App 20210398765 - Platow; Wilhelm ; et al. | 2021-12-23 |
Tuning Apparatus For Minimum Divergence Ion Beam
App 20210398772 - Satoh; Shu ; et al. | 2021-12-23 |
Apparatus And Method For Metal Contamination Control In An Ion Implantation System Using Charge Stripping Mechanism
App 20210249222 - Jen; Causon Ko-Chuan ; et al. | 2021-08-12 |
Method Of Enhancing The Energy And Beam Current On Rf Based Implanter
App 20210057182 - Satoh; Shu | 2021-02-25 |
Charge Stripping For Ion Implantation Systems
App 20200381209 - Satoh; Shu | 2020-12-03 |
RF resonator for ion beam acceleration
Grant 10,342,114 - Satoh | 2019-07-02 |
Rf Resonator For Ion Beam Acceleration
App 20190088443 - Satoh; Shu | 2019-03-21 |
Wafer clamp detection based on vibration or acoustic characteristic analysis
Grant 10,024,825 - Satoh July 17, 2 | 2018-07-17 |
Method of measuring vertical beam profile in an ion implantation system having a vertical beam angle device
Grant 9,711,328 - Satoh July 18, 2 | 2017-07-18 |
Implant-induced damage control in ion implantation
Grant 9,490,185 - Reece , et al. November 8, 2 | 2016-11-08 |
Wafer Clamp Detection Based On Vibration Or Acoustic Characteristic Analysis
App 20160187302 - Satoh; Shu | 2016-06-30 |
Method of Measuring Vertical Beam Profile in an Ion Implantation System Having a Vertical Beam Angle Device
App 20160189927 - Satoh; Shu | 2016-06-30 |
Method for enhancing beam utilization in a scanned beam ion implanter
Grant 9,111,719 - Satoh August 18, 2 | 2015-08-18 |
Method For Enhancing Beam Utilization In A Scanned Beam Ion Implanter
App 20150214005 - Satoh; Shu | 2015-07-30 |
Method for measuring transverse beam intensity distribution
Grant 8,933,424 - Satoh January 13, 2 | 2015-01-13 |
Implant-induced Damage Control In Ion Implantation
App 20140065730 - Reece; Ronald N. ; et al. | 2014-03-06 |
Versatile beam glitch detection system
Grant 8,227,773 - Satoh July 24, 2 | 2012-07-24 |
Versatile Beam Glitch Detection System
App 20120025107 - Satoh; Shu | 2012-02-02 |
Method for improving implant uniformity during photoresist outgassing
Grant 8,080,814 - Satoh December 20, 2 | 2011-12-20 |
System and method of performing uniform dose implantation under adverse conditions
Grant 8,071,964 - Satoh December 6, 2 | 2011-12-06 |
Method and system for increasing beam current above a maximum energy for a charge state
Grant 8,035,080 - Satoh October 11, 2 | 2011-10-11 |
Method for Improving Implant Uniformity During Photoresist Outgassing
App 20110215262 - Satoh; Shu | 2011-09-08 |
System and method of beam energy identification for single wafer ion implantation
Grant 7,973,290 - Satoh July 5, 2 | 2011-07-05 |
Method And System For Increasing Beam Current Above A Maximum Energy For A Charge State
App 20110101213 - Satoh; Shu | 2011-05-05 |
System and method of controlling broad beam uniformity
Grant 7,858,955 - Satoh , et al. December 28, 2 | 2010-12-28 |
Extraction electrode manipulator
Grant 7,842,931 - Satoh , et al. November 30, 2 | 2010-11-30 |
Broad ribbon beam ion implanter architecture with high mass-energy capability
Grant 7,705,328 - Satoh , et al. April 27, 2 | 2010-04-27 |
Extraction Electrode Manipulator
App 20100072402 - Satoh; Shu ; et al. | 2010-03-25 |
System And Method Of Beam Energy Identification For Single Wafer Ion Implantation
App 20100038553 - Satoh; Shu | 2010-02-18 |
System And Method Of Controlling Broad Beam Uniformity
App 20090321657 - Satoh; Shu ; et al. | 2009-12-31 |
System And Method Of Performing Uniform Dose Implantation Under Adverse Conditions
App 20090272918 - Satoh; Shu | 2009-11-05 |
Method of implanting a substrate and an ion implanter for performing the method
Grant 7,611,975 - Murrell , et al. November 3, 2 | 2009-11-03 |
Broad beam ion implantation architecture
Grant 7,528,390 - Satoh May 5, 2 | 2009-05-05 |
Broad Ribbon Beam Ion Implanter Architecture With High Mass-energy Capability
App 20090108198 - Satoh; Shu ; et al. | 2009-04-30 |
Broad beam ion implantation architecture
App 20080078956 - Satoh; Shu | 2008-04-03 |
Method Of Implanting A Substrate And An Ion Implanter For Performing The Method
App 20070259511 - Murrell; Adrian ; et al. | 2007-11-08 |
Method of implanting a substrate and an ion implanter for performing the method
Grant 7,282,427 - Murrell , et al. October 16, 2 | 2007-10-16 |
Method of implanting a substrate and an ion implanter for performing the method
Grant 7,253,424 - Murrell , et al. August 7, 2 | 2007-08-07 |
Method of implanting a substrate and an ion implanter for performing the method
Grant 7,235,797 - Murrell , et al. June 26, 2 | 2007-06-26 |
Method of implanting a substrate and an ion implanter for performing the method
App 20070105355 - Murrell; Adrian ; et al. | 2007-05-10 |
Method of implanting a substrate and an ion implanter for performing the method
App 20060197016 - Murrell; Adrian ; et al. | 2006-09-07 |
Method of implanting a substrate and an ion implanter for performing the method
Grant 7,049,210 - Murrell , et al. May 23, 2 | 2006-05-23 |
Method of producing a dopant gas species
Grant 6,998,626 - Ryding , et al. February 14, 2 | 2006-02-14 |
Method of implanting a substrate and an ion implanter for performing the method
App 20050269527 - Murrell, Adrian ; et al. | 2005-12-08 |
Method of implanting a substrate and an ion implanter for performing the method
Grant 6,908,836 - Murrell , et al. June 21, 2 | 2005-06-21 |
Indirectly heated button cathode for an ion source
Grant 6,878,946 - Farley , et al. April 12, 2 | 2005-04-12 |
Method of implanting a substrate and an ion implanter for performing the method
App 20040191931 - Murrell, Adrian ; et al. | 2004-09-30 |
Indirectly heated button cathode for an ion source
App 20040061068 - Farley, Marvin ; et al. | 2004-04-01 |
Method of implanting a substrate and an ion implanter for performing the method
App 20040058513 - Murrell, Adrian ; et al. | 2004-03-25 |
Indirectly heated button cathode for an ion source
App 20030168609 - Farley, Marvin ; et al. | 2003-09-11 |
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