loadpatents
Patent applications and USPTO patent grants for Satoh; Kiyoshi.The latest application filed is for "method of self-cleaning of carbon-based film".
Patent | Date |
---|---|
Gas-introducing system and plasma CVD apparatus Grant 7,718,004 - Satoh , et al. May 18, 2 | 2010-05-18 |
Semiconductor processing apparatus with lift pin structure Grant 7,638,003 - Satoh , et al. December 29, 2 | 2009-12-29 |
Semiconductor-processing apparatus provided with self-cleaning device Grant 7,534,469 - Satoh , et al. May 19, 2 | 2009-05-19 |
Plasma treatment apparatus Grant 7,520,244 - Yamagishi , et al. April 21, 2 | 2009-04-21 |
Method Of Self-cleaning Of Carbon-based Film App 20090090382 - Morisada; Yoshinori ;   et al. | 2009-04-09 |
Semiconductor Processing With A Remote Plasma Source For Self-cleaning App 20070227554 - Satoh; Kiyoshi ;   et al. | 2007-10-04 |
Low-carbon-doped silicon oxide film and damascene structure using same Grant 7,271,093 - Loke , et al. September 18, 2 | 2007-09-18 |
Semiconductor processing apparatus with lift pin structure App 20070160507 - Satoh; Kiyoshi ;   et al. | 2007-07-12 |
Method of forming silicon carbide films Grant 7,238,393 - Goundar , et al. July 3, 2 | 2007-07-03 |
Semiconductor-processing apparatus provided with self-cleaning device App 20060228473 - Satoh; Kiyoshi ;   et al. | 2006-10-12 |
Gas-introducing system and plasma CVD apparatus App 20060090700 - Satoh; Kiyoshi ;   et al. | 2006-05-04 |
Method of manufacturing silicon carbide film Grant 6,991,959 - Goundar , et al. January 31, 2 | 2006-01-31 |
Low-carbon-doped silicon oxide film and damascene structure using same App 20050260850 - Loke, Chou San Nelson ;   et al. | 2005-11-24 |
Mounting system for disk drive having a rotary actuator Grant 6,937,432 - Sri-Jayantha , et al. August 30, 2 | 2005-08-30 |
System and method of CVD chamber cleaning App 20050178333 - Loke, Chou San Nelson ;   et al. | 2005-08-18 |
Method of manufacturing silicon carbide film Grant 6,919,270 - Satoh , et al. July 19, 2 | 2005-07-19 |
Thin-film forming apparatus having an automatic cleaning function for cleaning the inside App 20050139578 - Fukuda, Hideaki ;   et al. | 2005-06-30 |
Source gas flow control and CVD using same App 20050098906 - Satoh, Kiyoshi ;   et al. | 2005-05-12 |
Method for forming integrated dielectric layers Grant 6,815,332 - San , et al. November 9, 2 | 2004-11-09 |
Plasma treatment apparatus App 20040194709 - Yamagishi, Takayuki ;   et al. | 2004-10-07 |
Iron component and a manufacturing method therefor Grant 6,780,257 - Nagata , et al. August 24, 2 | 2004-08-24 |
Method of forming silicon carbide films App 20040161535 - Goundar, Kamal Kishore ;   et al. | 2004-08-19 |
Semiconductor processing device provided with a remote plasma source for self-cleaning App 20040144489 - Satoh, Kiyoshi ;   et al. | 2004-07-29 |
Semiconductor processing with a remote plasma source for self-cleaning App 20040144400 - Satoh, Kiyoshi ;   et al. | 2004-07-29 |
Method of cleaning a CVD reaction chamber using an active oxygen species Grant 6,767,836 - San , et al. July 27, 2 | 2004-07-27 |
Semiconductor substrate-supporting apparatus Grant 6,761,771 - Satoh , et al. July 13, 2 | 2004-07-13 |
Method of manufacturing silicon carbide film App 20040115876 - Goundar, Kamal Kishore ;   et al. | 2004-06-17 |
Semiconductor-processing device provided with a remote plasma source for self-cleaning Grant 6,736,147 - Satoh , et al. May 18, 2 | 2004-05-18 |
Method for forming integrated dielectric layers App 20040087179 - San, Nelson Loke Chou ;   et al. | 2004-05-06 |
Method of manufacturing silicon carbide film App 20040076767 - Satoh, Kiyoshi ;   et al. | 2004-04-22 |
Mounting system for disk drive having a rotary actuator App 20040070865 - Sri-Jayantha, Sri M. ;   et al. | 2004-04-15 |
Method of forming a film on a semiconductor substrate App 20040043626 - Chou San, Nelson Loke ;   et al. | 2004-03-04 |
Rotationally free mount system for disk drive having a rotary actuator Grant 6,683,745 - Sri-Jayantha , et al. January 27, 2 | 2004-01-27 |
Suspension, head suspension assembly, and disk drive apparatus Grant 6,633,456 - Tsuchida , et al. October 14, 2 | 2003-10-14 |
Apparatus and method for fixing and checking connections of piezoelectric sensor, actuator, and disk unit Grant 6,604,431 - Soga , et al. August 12, 2 | 2003-08-12 |
Spindle motor-having improved bonding between its bearing cartridge and hub Grant 6,556,374 - Satoh , et al. April 29, 2 | 2003-04-29 |
Servo system for disk-flutter in rotating storage systems Grant 6,487,028 - Sri-Jayantha , et al. November 26, 2 | 2002-11-26 |
Semiconductor substrate-supporting apparatus App 20020162630 - Satoh, Kiyoshi ;   et al. | 2002-11-07 |
Iron component and a manufacturing method therefor App 20020117023 - Nagata, Tsuyoshi ;   et al. | 2002-08-29 |
Semiconductor processing apparatus with substrate-supporting mechanism Grant 6,435,798 - Satoh August 20, 2 | 2002-08-20 |
Semiconductor-processing device provided with a remote plasma source for self-cleaning App 20020011210 - Satoh, Kiyoshi ;   et al. | 2002-01-31 |
Spindle motor structure using ceramic ball bearing for hard disk drive Grant 6,342,743 - Matsuzaki , et al. January 29, 2 | 2002-01-29 |
Disk drive apparatus, attachment structure, and attachment method Grant 6,327,115 - Satoh , et al. December 4, 2 | 2001-12-04 |
Apparatus and method for forming thin film Grant 6,235,112 - Satoh May 22, 2 | 2001-05-22 |
Disk drive with controlled reduced internal pressure Grant 6,144,178 - Hirano , et al. November 7, 2 | 2000-11-07 |
Disk drive rotary actuator system including synchronous counter torque generator Grant 6,122,139 - Sri-Jayantha , et al. September 19, 2 | 2000-09-19 |
Substrate-supporting device for semiconductor processing Grant 6,113,704 - Satoh , et al. September 5, 2 | 2000-09-05 |
Susceptor for plasma CVD equipment and process for producing the same Grant 6,063,203 - Satoh May 16, 2 | 2000-05-16 |
Crash stop and disk drive employing the crash stop Grant 5,973,888 - Chawanya , et al. October 26, 1 | 1999-10-26 |
Magnetoresistive head Grant 5,805,389 - Saito , et al. September 8, 1 | 1998-09-08 |
Suspension attachment apparatus for a disk drive Grant 5,355,267 - Aoyagi , et al. October 11, 1 | 1994-10-11 |
Thermal mass flow meter Grant 5,347,861 - Satoh September 20, 1 | 1994-09-20 |
Mass flow controller Grant 4,977,916 - Ohmi , et al. December 18, 1 | 1990-12-18 |
Thermal flow meter Grant 4,815,280 - Tujimura , et al. March 28, 1 | 1989-03-28 |
Thermal recording head and process for manufacturing wiring substrate therefor Grant 4,689,638 - Matsuzaki , et al. August 25, 1 | 1987-08-25 |
Thermal printing head with an anti-abrasion layer and method of fabricating the same Grant 4,595,823 - Sorimachi , et al. June 17, 1 | 1986-06-17 |
Tantalum thin film capacitor Grant 4,364,099 - Koyama , et al. December 14, 1 | 1982-12-14 |
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